DE60142406D1 - Integrierter kapazitiver cmos-drucksensor - Google Patents
Integrierter kapazitiver cmos-drucksensorInfo
- Publication number
- DE60142406D1 DE60142406D1 DE60142406T DE60142406T DE60142406D1 DE 60142406 D1 DE60142406 D1 DE 60142406D1 DE 60142406 T DE60142406 T DE 60142406T DE 60142406 T DE60142406 T DE 60142406T DE 60142406 D1 DE60142406 D1 DE 60142406D1
- Authority
- DE
- Germany
- Prior art keywords
- pressure sensor
- integrated capacitive
- cmos pressure
- capacitive cmos
- integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0617—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/734,473 US6472243B2 (en) | 2000-12-11 | 2000-12-11 | Method of forming an integrated CMOS capacitive pressure sensor |
PCT/US2001/044013 WO2002048668A2 (en) | 2000-12-11 | 2001-11-19 | Integrated cmos capacitive pressure sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60142406D1 true DE60142406D1 (de) | 2010-07-29 |
Family
ID=24951833
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60142406T Expired - Lifetime DE60142406D1 (de) | 2000-12-11 | 2001-11-19 | Integrierter kapazitiver cmos-drucksensor |
Country Status (6)
Country | Link |
---|---|
US (1) | US6472243B2 (de) |
EP (1) | EP1344035B1 (de) |
JP (1) | JP4267322B2 (de) |
AU (1) | AU2002228637A1 (de) |
DE (1) | DE60142406D1 (de) |
WO (1) | WO2002048668A2 (de) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6664909B1 (en) * | 2001-08-13 | 2003-12-16 | Impinj, Inc. | Method and apparatus for trimming high-resolution digital-to-analog converter |
US6828172B2 (en) * | 2002-02-04 | 2004-12-07 | Delphi Technologies, Inc. | Process for a monolithically-integrated micromachined sensor and circuit |
US20040206999A1 (en) * | 2002-05-09 | 2004-10-21 | Impinj, Inc., A Delaware Corporation | Metal dielectric semiconductor floating gate variable capacitor |
DE10245627B3 (de) * | 2002-09-30 | 2004-05-06 | Infineon Technologies Ag | Fingerabdrucksensor |
US7115438B2 (en) * | 2004-04-29 | 2006-10-03 | United Microelectronics Corp. | Method for manufacturing a complementary metal-oxide semiconductor sensor |
JP5280609B2 (ja) * | 2004-10-01 | 2013-09-04 | 株式会社日立製作所 | 半導体装置およびその製造方法 |
US7121146B1 (en) * | 2004-10-29 | 2006-10-17 | National Semiconductor Corporation | MEMS pressure sensing device |
US7328609B1 (en) | 2004-10-29 | 2008-02-12 | National Semiconductor Corporation | Wireless pressure sensing Schrader valve |
US7109055B2 (en) * | 2005-01-20 | 2006-09-19 | Freescale Semiconductor, Inc. | Methods and apparatus having wafer level chip scale package for sensing elements |
JP4501715B2 (ja) * | 2005-02-16 | 2010-07-14 | セイコーエプソン株式会社 | Mems素子およびmems素子の製造方法 |
US7281421B2 (en) * | 2005-06-03 | 2007-10-16 | Temic Automotive Of North America, Inc. | Package for a tire pressure sensor assembly |
US7284418B2 (en) * | 2005-06-03 | 2007-10-23 | Temic Automotive Of North America, Inc. | Tire pressure sensor assembly |
JP4988217B2 (ja) * | 2006-02-03 | 2012-08-01 | 株式会社日立製作所 | Mems構造体の製造方法 |
US7632698B2 (en) | 2006-05-16 | 2009-12-15 | Freescale Semiconductor, Inc. | Integrated circuit encapsulation and method therefor |
US7528468B2 (en) * | 2006-09-25 | 2009-05-05 | Freescale Semiconductor, Inc. | Capacitor assembly with shielded connections and method for forming the same |
JP5127210B2 (ja) * | 2006-11-30 | 2013-01-23 | 株式会社日立製作所 | Memsセンサが混載された半導体装置 |
JP4337870B2 (ja) | 2006-12-15 | 2009-09-30 | セイコーエプソン株式会社 | Memsレゾネータ及びmemsレゾネータの製造方法 |
JP4947065B2 (ja) * | 2009-01-09 | 2012-06-06 | セイコーエプソン株式会社 | Memsレゾネータの製造方法 |
GB2467776A (en) * | 2009-02-13 | 2010-08-18 | Wolfson Microelectronics Plc | Integrated MEMS transducer and circuitry |
JP2011158317A (ja) * | 2010-01-29 | 2011-08-18 | Panasonic Electric Works Co Ltd | 圧力センサ |
CN102856177B (zh) * | 2011-06-27 | 2015-01-28 | 中芯国际集成电路制造(北京)有限公司 | 半导体器件和用于制造半导体器件的方法 |
KR101781553B1 (ko) * | 2011-08-22 | 2017-09-26 | 삼성전자주식회사 | 용량성 트랜스듀서와 그 제조 및 동작방법 |
US10094988B2 (en) * | 2012-08-31 | 2018-10-09 | Micron Technology, Inc. | Method of forming photonics structures |
DE102012023429B8 (de) | 2012-11-29 | 2013-10-24 | Elmos Semiconductor Ag | CMOS kompatibler Drucksensor auf Tunneleffekt-Basis mit Verfahren |
JP5832417B2 (ja) * | 2012-12-07 | 2015-12-16 | 三菱電機株式会社 | 半導体圧力センサおよびその製造方法 |
EP3604207A1 (de) | 2013-03-05 | 2020-02-05 | Ams Ag | Halbleiterbauelement mit kapazitivem sensor und integrierter schaltung |
JP5933480B2 (ja) * | 2013-04-26 | 2016-06-08 | 三菱電機株式会社 | 半導体圧力センサおよびその製造方法 |
JP6119615B2 (ja) * | 2014-01-08 | 2017-04-26 | 三菱電機株式会社 | 半導体装置の製造方法 |
JP6433349B2 (ja) * | 2015-03-19 | 2018-12-05 | 三菱電機株式会社 | 半導体圧力センサおよびその製造方法 |
US20170115322A1 (en) * | 2015-10-22 | 2017-04-27 | Freescale Semiconductor, Inc. | Mems sensor device having integrated multiple stimulus sensing |
JP6532429B2 (ja) | 2016-06-01 | 2019-06-19 | 三菱電機株式会社 | 半導体圧力センサ |
EP3260821B1 (de) | 2016-06-21 | 2019-09-11 | ams International AG | Sensorpaket und verfahren zur herstellung des sensorpakets |
EP3261366B1 (de) | 2016-06-21 | 2021-09-22 | Sciosense B.V. | Mikrofon- und drucksensorverpackung sowie verfahren zur herstellung des mikrofons und der drucksensorverpackung |
CN108183163A (zh) * | 2018-01-08 | 2018-06-19 | 杭州士兰微电子股份有限公司 | 一种超声波传感器的制造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4004179A1 (de) | 1990-02-12 | 1991-08-14 | Fraunhofer Ges Forschung | Integrierbarer, kapazitiver drucksensor und verfahren zum herstellen desselben |
US5431057A (en) | 1990-02-12 | 1995-07-11 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Integratable capacitative pressure sensor |
US6012336A (en) * | 1995-09-06 | 2000-01-11 | Sandia Corporation | Capacitance pressure sensor |
-
2000
- 2000-12-11 US US09/734,473 patent/US6472243B2/en not_active Expired - Lifetime
-
2001
- 2001-11-19 DE DE60142406T patent/DE60142406D1/de not_active Expired - Lifetime
- 2001-11-19 JP JP2002549926A patent/JP4267322B2/ja not_active Expired - Fee Related
- 2001-11-19 EP EP01989753A patent/EP1344035B1/de not_active Expired - Lifetime
- 2001-11-19 AU AU2002228637A patent/AU2002228637A1/en not_active Abandoned
- 2001-11-19 WO PCT/US2001/044013 patent/WO2002048668A2/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
US6472243B2 (en) | 2002-10-29 |
AU2002228637A1 (en) | 2002-06-24 |
US20020072144A1 (en) | 2002-06-13 |
EP1344035A2 (de) | 2003-09-17 |
WO2002048668A2 (en) | 2002-06-20 |
JP4267322B2 (ja) | 2009-05-27 |
WO2002048668A3 (en) | 2002-10-10 |
JP2004526299A (ja) | 2004-08-26 |
EP1344035B1 (de) | 2010-06-16 |
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