DE60144214D1 - Kapazitiver Drucksensor - Google Patents

Kapazitiver Drucksensor

Info

Publication number
DE60144214D1
DE60144214D1 DE60144214T DE60144214T DE60144214D1 DE 60144214 D1 DE60144214 D1 DE 60144214D1 DE 60144214 T DE60144214 T DE 60144214T DE 60144214 T DE60144214 T DE 60144214T DE 60144214 D1 DE60144214 D1 DE 60144214D1
Authority
DE
Germany
Prior art keywords
pressure sensor
capacitive pressure
capacitive
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60144214T
Other languages
English (en)
Inventor
Peter H Frackelton
Stanley J Lukasiewicz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sensata Technologies Inc
Original Assignee
Sensata Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensata Technologies Inc filed Critical Sensata Technologies Inc
Application granted granted Critical
Publication of DE60144214D1 publication Critical patent/DE60144214D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
DE60144214T 2000-11-21 2001-11-20 Kapazitiver Drucksensor Expired - Lifetime DE60144214D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/717,763 US6487911B1 (en) 2000-11-21 2000-11-21 Pressure sensor apparatus

Publications (1)

Publication Number Publication Date
DE60144214D1 true DE60144214D1 (de) 2011-04-28

Family

ID=24883377

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60144214T Expired - Lifetime DE60144214D1 (de) 2000-11-21 2001-11-20 Kapazitiver Drucksensor

Country Status (4)

Country Link
US (1) US6487911B1 (de)
EP (1) EP1211497B1 (de)
JP (1) JP4208456B2 (de)
DE (1) DE60144214D1 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7570065B2 (en) * 2006-03-01 2009-08-04 Loadstar Sensors Inc Cylindrical capacitive force sensing device and method
SE525356C2 (sv) * 2003-06-19 2005-02-08 Tetra Laval Holdings & Finance Givarhållare
JP4774678B2 (ja) * 2003-08-29 2011-09-14 富士電機株式会社 圧力センサ装置
JP4839648B2 (ja) * 2005-03-23 2011-12-21 富士電機株式会社 圧力センサ装置
US6968744B1 (en) * 2004-10-18 2005-11-29 Silverbrook Research Pty Ltd Capacitative pressure sensor with close electrodes
US7234357B2 (en) * 2004-10-18 2007-06-26 Silverbrook Research Pty Ltd Wafer bonded pressure sensor
US7240560B2 (en) * 2004-10-18 2007-07-10 Silverbrook Research Pty Ltd Pressure sensor with remote power source
US7194901B2 (en) * 2004-10-18 2007-03-27 Silverbrook Research Pty Ltd Pressure sensor with apertured membrane guard
US7159467B2 (en) * 2004-10-18 2007-01-09 Silverbrook Research Pty Ltd Pressure sensor with conductive ceramic membrane
US7089790B2 (en) * 2004-10-18 2006-08-15 Silverbrook Research Pty Ltd Pressure sensor with laminated membrane
US7143652B2 (en) * 2004-10-18 2006-12-05 Silverbrook Research Pty Ltd Pressure sensor for high acceleration environment
US7093494B2 (en) * 2004-10-18 2006-08-22 Silverbrook Research Pty Ltd Micro-electromechanical pressure sensor
US7089798B2 (en) * 2004-10-18 2006-08-15 Silverbrook Research Pty Ltd Pressure sensor with thin membrane
DE102005015160A1 (de) * 2005-02-17 2006-08-31 Continental Teves Ag & Co. Ohg Drucksensor mit kapazitivem Messprinzip
US7383737B1 (en) 2007-03-29 2008-06-10 Delphi Technologies, Inc Capacitive pressure sensor
EP2113760A1 (de) * 2008-04-30 2009-11-04 Delphi Technologies, Inc. Kapazitiver Drucksensor
JP5187529B2 (ja) * 2008-07-22 2013-04-24 セイコーエプソン株式会社 圧力センサー
US8156816B2 (en) * 2010-05-27 2012-04-17 Sensata Technologies, Inc. Pressure sensor
US8365607B2 (en) * 2011-06-30 2013-02-05 Sensata Technologies, Inc. Anti-slip grooves in a crimped pressure sensor assembly
EP2546625B1 (de) * 2011-07-12 2016-04-13 Sensata Technologies, Inc. Kraftsensoranordnung und Verfahren zum Zusammenbau einer Kraftsensoranordnung
CN205190076U (zh) * 2013-02-18 2016-04-27 伊利诺斯工具制品有限公司 传感器组件及发动机系统
US9146164B2 (en) * 2013-03-07 2015-09-29 Sensata Technologies, Inc. Pressure transducer substrate with self alignment feature
JP6228790B2 (ja) * 2013-09-18 2017-11-08 アルプス電気株式会社 圧力検知装置およびこれを使用した吸気圧測定装置
DE102013223442A1 (de) * 2013-11-18 2015-05-21 Robert Bosch Gmbh Drucksensoranordnung zur Erfassung eines Drucks eines fluiden Mediums in einem Messraum
DE102014202354A1 (de) * 2014-02-10 2015-08-13 Zf Friedrichshafen Ag Dichtvorrichtung für ein Sensorgehäuse
JP6252241B2 (ja) * 2014-02-27 2017-12-27 セイコーエプソン株式会社 力検出装置、およびロボット
CN107290099B (zh) 2016-04-11 2021-06-08 森萨塔科技公司 压力传感器、用于压力传感器的插塞件和制造插塞件的方法
EP3236226B1 (de) 2016-04-20 2019-07-24 Sensata Technologies, Inc. Verfahren zur herstellung eines drucksensors
US10295427B2 (en) 2017-04-04 2019-05-21 Sensata Technologies, Inc. Multi-chamber pressure sensing apparatus
US10545064B2 (en) 2017-05-04 2020-01-28 Sensata Technologies, Inc. Integrated pressure and temperature sensor
US10323998B2 (en) 2017-06-30 2019-06-18 Sensata Technologies, Inc. Fluid pressure sensor
US10724907B2 (en) 2017-07-12 2020-07-28 Sensata Technologies, Inc. Pressure sensor element with glass barrier material configured for increased capacitive response
US10557770B2 (en) 2017-09-14 2020-02-11 Sensata Technologies, Inc. Pressure sensor with improved strain gauge
FR3075358B1 (fr) * 2017-12-14 2020-10-09 Coutier Moulage Gen Ind Dispositif de mesure d'un parametre physique d'un fluide d'un circuit de vehicule automobile
ES1217769Y (es) * 2018-07-26 2018-12-13 Cebi Electromechanical Components Spain S A Medidor de presion para circuitos de fluidos
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4716492A (en) 1986-05-05 1987-12-29 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
US4918833A (en) * 1988-04-08 1990-04-24 General Electric Company Method of assembling an electronic transducer
US4875135A (en) * 1988-12-02 1989-10-17 Texas Instruments Incorporated Pressure sensor
US4888662A (en) * 1988-12-08 1989-12-19 Texas Instruments Incorporated High pressure package for pressure transducers
US5159525A (en) * 1991-07-29 1992-10-27 Fuji Koki Manufacturing Co., Ltd. Pressure sensor
US5880371A (en) 1997-01-27 1999-03-09 Texas Instruments Incorporated Pressure transducer apparatus and method for making
US6009757A (en) * 1997-07-28 2000-01-04 Texas Instruments Incorporated Voltage regulated pressure transducer apparatus
US6223603B1 (en) * 1999-05-18 2001-05-01 Texas Instruments Incorporated Capacitive pressure transducer having reduced output error

Also Published As

Publication number Publication date
EP1211497B1 (de) 2011-03-16
JP4208456B2 (ja) 2009-01-14
EP1211497A3 (de) 2005-07-20
EP1211497A2 (de) 2002-06-05
US6487911B1 (en) 2002-12-03
JP2002202215A (ja) 2002-07-19

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