DK1061351T3 - Kapacitiv keramisk relativtryksensor - Google Patents

Kapacitiv keramisk relativtryksensor

Info

Publication number
DK1061351T3
DK1061351T3 DK99111580T DK99111580T DK1061351T3 DK 1061351 T3 DK1061351 T3 DK 1061351T3 DK 99111580 T DK99111580 T DK 99111580T DK 99111580 T DK99111580 T DK 99111580T DK 1061351 T3 DK1061351 T3 DK 1061351T3
Authority
DK
Denmark
Prior art keywords
pressure sensor
ceramic pressure
capacitive relative
relative ceramic
capacitive
Prior art date
Application number
DK99111580T
Other languages
English (en)
Inventor
Frank Hegner
Original Assignee
Endress & Hauser Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress & Hauser Gmbh & Co Kg filed Critical Endress & Hauser Gmbh & Co Kg
Application granted granted Critical
Publication of DK1061351T3 publication Critical patent/DK1061351T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0654—Protection against aggressive medium in general against moisture or humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
DK99111580T 1999-06-15 1999-06-15 Kapacitiv keramisk relativtryksensor DK1061351T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP99111580A EP1061351B1 (de) 1999-06-15 1999-06-15 Kapazitiver keramischer Relativdruck-Sensor

Publications (1)

Publication Number Publication Date
DK1061351T3 true DK1061351T3 (da) 2003-11-03

Family

ID=8238361

Family Applications (1)

Application Number Title Priority Date Filing Date
DK99111580T DK1061351T3 (da) 1999-06-15 1999-06-15 Kapacitiv keramisk relativtryksensor

Country Status (5)

Country Link
EP (1) EP1061351B1 (da)
JP (1) JP3205327B2 (da)
CA (1) CA2311569C (da)
DE (1) DE59906514D1 (da)
DK (1) DK1061351T3 (da)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10163567A1 (de) * 2001-12-21 2003-07-17 Endress & Hauser Gmbh & Co Kg Drucksensor mit hydrophober Beschichtung
DE10326975A1 (de) 2003-06-12 2005-01-20 Endress + Hauser Gmbh + Co. Kg Drucksensor mit Feuchteschutz
KR20080083039A (ko) * 2005-12-31 2008-09-12 코닝 인코포레이티드 마이크로리액터 유리 막 센서
DE102008043175A1 (de) 2008-10-24 2010-04-29 Endress + Hauser Gmbh + Co. Kg Relativdrucksensor
EP2463635B2 (de) 2010-12-07 2016-01-06 VEGA Grieshaber KG Druckmesszelle
DE102010063065A1 (de) 2010-12-14 2012-06-14 Endress + Hauser Gmbh + Co. Kg Drucksensor und Verfahren zu dessen Herstellung+
DE102010063723A1 (de) 2010-12-21 2012-06-21 Endress + Hauser Gmbh + Co. Kg Keramischer Drucksensor mit Überlastschutz
EP2584332A1 (en) 2011-10-19 2013-04-24 Baumer Bourdon Haenni SAS Pressure sensor
DE102014117706A1 (de) * 2014-12-02 2016-06-02 Endress + Hauser Gmbh + Co. Kg Kapazitiver Relativdrucksensor
EP3173760A1 (de) 2015-11-30 2017-05-31 VEGA Grieshaber KG Relativdrucksensor
CN111693186A (zh) * 2020-05-12 2020-09-22 江苏大学 一种陶瓷电容式压力传感器电极的制备方法
CN113884225A (zh) * 2021-10-09 2022-01-04 广州九思科技有限公司 一种瞬间响应的陶瓷电容压力传感器及其制作方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5050034A (en) * 1990-01-22 1991-09-17 Endress U. Hauser Gmbh U. Co. Pressure sensor and method of manufacturing same
JP3384900B2 (ja) * 1995-01-09 2003-03-10 長野計器株式会社 圧力センサ

Also Published As

Publication number Publication date
EP1061351A1 (de) 2000-12-20
EP1061351B1 (de) 2003-08-06
CA2311569C (en) 2004-01-27
JP2001021430A (ja) 2001-01-26
CA2311569A1 (en) 2000-12-15
DE59906514D1 (de) 2003-09-11
JP3205327B2 (ja) 2001-09-04

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