DE60002954D1 - Filmartiger drucksensor - Google Patents

Filmartiger drucksensor

Info

Publication number
DE60002954D1
DE60002954D1 DE60002954T DE60002954T DE60002954D1 DE 60002954 D1 DE60002954 D1 DE 60002954D1 DE 60002954 T DE60002954 T DE 60002954T DE 60002954 T DE60002954 T DE 60002954T DE 60002954 D1 DE60002954 D1 DE 60002954D1
Authority
DE
Germany
Prior art keywords
film
pressure sensor
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60002954T
Other languages
English (en)
Other versions
DE60002954T2 (de
Inventor
Takayuki Enomoto
Hiroyo Okamura
Naobumi Kuboki
Kyosuke Hashimoto
Takuya Nishimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Publication of DE60002954D1 publication Critical patent/DE60002954D1/de
Application granted granted Critical
Publication of DE60002954T2 publication Critical patent/DE60002954T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Passenger Equipment (AREA)
  • Push-Button Switches (AREA)
DE60002954T 1999-01-27 2000-01-20 Filmartiger drucksensor Expired - Lifetime DE60002954T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP1896399 1999-01-27
JP1896399 1999-01-27
JP31723399 1999-11-08
JP11317233A JP2000283866A (ja) 1999-01-27 1999-11-08 フィルム状圧力センサ
PCT/JP2000/000254 WO2000045142A1 (fr) 1999-01-27 2000-01-20 Capteur de pression de type film

Publications (2)

Publication Number Publication Date
DE60002954D1 true DE60002954D1 (de) 2003-07-03
DE60002954T2 DE60002954T2 (de) 2004-03-11

Family

ID=26355737

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60002954T Expired - Lifetime DE60002954T2 (de) 1999-01-27 2000-01-20 Filmartiger drucksensor

Country Status (6)

Country Link
US (1) US6499351B1 (de)
EP (1) EP1067373B1 (de)
JP (1) JP2000283866A (de)
KR (1) KR100794942B1 (de)
DE (1) DE60002954T2 (de)
WO (1) WO2000045142A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2396942A (en) * 2002-12-31 2004-07-07 Autoliv Dev Impact detector with varying stiffness
FR2850615B1 (fr) * 2003-02-04 2006-09-01 Faurecia Sieges Automobile Element de siege dote d'un capteur de presence et dispositif de detection pour un tel element de siege
US8063886B2 (en) * 2006-07-18 2011-11-22 Iee International Electronics & Engineering S.A. Data input device
JP5089774B2 (ja) * 2008-05-29 2012-12-05 株式会社ハーモニック・ドライブ・システムズ 複合型センサおよびロボットハンド
JP5226442B2 (ja) * 2008-09-19 2013-07-03 日本写真印刷株式会社 感圧センサ
JP4824831B2 (ja) * 2008-09-29 2011-11-30 日本写真印刷株式会社 感圧センサ
KR101125732B1 (ko) * 2011-10-26 2012-03-27 문창수 압력 이중 감지에 의한 주사속도 자동 조절형 반자동 약물 주입기 및 그를 이용한 약물 주입방법
DE102012107667A1 (de) 2012-08-21 2014-02-27 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG Verfahren und Vorrichtung zur Bestimmung eines Sauerstoffgehaltes in einem flüssigen oder gasförmigen Medium, vorzugsweise zur Überwachung einer sicherheitsrelevanten Anlage
KR101580013B1 (ko) * 2013-07-18 2015-12-24 연세대학교 산학협력단 건설재료 열물리량 측정장치를 구성하는 접촉식 측온 센서 및 이를 구비한 열물리량 측정장치
JP6909709B2 (ja) * 2017-11-09 2021-07-28 ニッタ株式会社 センサシート
US11225409B2 (en) 2018-09-17 2022-01-18 Invensense, Inc. Sensor with integrated heater
JP7094845B2 (ja) * 2018-09-20 2022-07-04 Ｎｉｓｓｈａ株式会社 圧力センサーシート
JP2020046387A (ja) * 2018-09-21 2020-03-26 Ｎｉｓｓｈａ株式会社 圧力センサーシート
JP6757530B2 (ja) * 2018-09-20 2020-09-23 Ｎｉｓｓｈａ株式会社 圧力センサーシート
JP6699954B1 (ja) * 2019-08-20 2020-05-27 Ｎｉｓｓｈａ株式会社 静電容量検出装置
JP7094846B2 (ja) * 2018-09-20 2022-07-04 Ｎｉｓｓｈａ株式会社 圧力センサーシート
JP7094847B2 (ja) * 2018-09-20 2022-07-04 Ｎｉｓｓｈａ株式会社 圧力センサーシート
JP6823100B2 (ja) * 2019-03-11 2021-01-27 Ｎｉｓｓｈａ株式会社 静電容量検出装置
JP6823101B2 (ja) * 2019-03-14 2021-01-27 Ｎｉｓｓｈａ株式会社 静電容量検出装置および静電容量検出装置群
KR102668666B1 (ko) 2018-09-20 2024-05-24 닛샤 가부시키가이샤 전단력을 산출할 수 있는 정전용량 검출장치
JP6757529B2 (ja) * 2018-09-20 2020-09-23 Ｎｉｓｓｈａ株式会社 圧力センサーシート
JP6837702B1 (ja) * 2019-11-12 2021-03-03 Ｎｉｓｓｈａ株式会社 静電容量検出装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE197273C (de) *
US3806471A (en) * 1968-04-29 1974-04-23 R Mitchell Pressure responsive resistive material
JPS5935788Y2 (ja) * 1979-02-28 1984-10-03 池田物産株式会社 圧力分布の検知体
US4320664A (en) * 1980-02-25 1982-03-23 Texas Instruments Incorporated Thermally compensated silicon pressure sensor
US4577510A (en) * 1984-09-06 1986-03-25 The United States Of America As Represented By The Secretary Of The Air Force Dynamic polymer pressure transducer with temperature compensation
JPH0295827U (de) * 1989-01-19 1990-07-31
DE4000326C2 (de) * 1990-01-08 1995-12-14 Mannesmann Ag Drucksensor
US5303593A (en) * 1991-06-07 1994-04-19 Maclean-Fogg Company Strain gauge distribution for resistive strain gauge pressure sensor
JPH0738932U (ja) * 1992-09-21 1995-07-14 大和製衡株式会社 温度補償型ストレインゲージ式ロードセル
EP0618435A3 (de) * 1993-03-30 1995-02-01 Siemens Ag Kapazitiver Drucksensor.
US5511427A (en) * 1993-07-21 1996-04-30 Honeywell Inc. Cantilevered microbeam temperature sensor
US5447073A (en) * 1994-02-04 1995-09-05 The Foxboro Company Multimeasurement replaceable vortex sensor
KR0119540Y1 (ko) * 1994-06-13 1998-07-01 이상영 감압저항 가변형 압력센서
JPH1019703A (ja) * 1996-06-28 1998-01-23 Matsushita Electric Works Ltd 薄膜歪みゲージ及びその製造方法
JPH10115564A (ja) * 1996-10-14 1998-05-06 Toyota Motor Corp 乗員検知シートセンサ

Also Published As

Publication number Publication date
JP2000283866A (ja) 2000-10-13
WO2000045142A1 (fr) 2000-08-03
EP1067373B1 (de) 2003-05-28
KR100794942B1 (ko) 2008-01-15
US6499351B1 (en) 2002-12-31
EP1067373A4 (de) 2002-03-20
KR20010034633A (ko) 2001-04-25
EP1067373A1 (de) 2001-01-10
DE60002954T2 (de) 2004-03-11

Similar Documents

Publication Publication Date Title
JP2002504674A5 (ja) 圧力センサ
DE50016091D1 (de) Drucksensor
DE60002954D1 (de) Filmartiger drucksensor
DE60033491D1 (de) Kraftsensor
DE60012645D1 (de) Kapazitiver Drucksensor
DE60131129D1 (de) Drucksensor
DE60004454D1 (de) Drucksensoreinheit
DE60030395D1 (de) Elektronischer Drucksensor
DE60144214D1 (de) Kapazitiver Drucksensor
DE59911611D1 (de) Druckmessgerät
DE60030262D1 (de) Sensorsystem
DE50015477D1 (de) Drucksensor
DE50000339D1 (de) Drucksystem
NO20021089L (no) Trykkindikator
DE69803519D1 (de) Drucksensor
DE50015835D1 (de) Sensor
NO20003985L (no) Halvledende trykksensor
DE59914223D1 (de) Relativdrucksensor
DE50014915D1 (de) Drucksensor
DE59803182D1 (de) Drucksensor
DE60030116D1 (de) Einzelpositionsdruckmesser
NO973038D0 (no) Trykksensor
DE69917943D1 (de) Halbleiter-drucksensor
DE50002620D1 (de) Aktorintegrierter kraftsensor
DE60029550D1 (de) Verbrennungsdrucksensor

Legal Events

Date Code Title Description
8364 No opposition during term of opposition