DE60141748D1 - Statisches relais und dieses verwendendes kommunikationsgerät - Google Patents

Statisches relais und dieses verwendendes kommunikationsgerät

Info

Publication number
DE60141748D1
DE60141748D1 DE60141748T DE60141748T DE60141748D1 DE 60141748 D1 DE60141748 D1 DE 60141748D1 DE 60141748 T DE60141748 T DE 60141748T DE 60141748 T DE60141748 T DE 60141748T DE 60141748 D1 DE60141748 D1 DE 60141748D1
Authority
DE
Germany
Prior art keywords
silicon substrate
electrically continuous
communication device
signal lines
reverse surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60141748T
Other languages
English (en)
Inventor
Mitsuru Fujii
Minoru Sakata
Tomonori Seki
Shobu Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Application granted granted Critical
Publication of DE60141748D1 publication Critical patent/DE60141748D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00Electrostatic relays; Electro-adhesion relays
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00Electrostatic relays; Electro-adhesion relays
    • H01H59/0009Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/12Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20Bridging contacts
DE60141748T 2000-04-21 2001-04-23 Statisches relais und dieses verwendendes kommunikationsgerät Expired - Lifetime DE60141748D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000121549 2000-04-21
PCT/JP2001/003486 WO2001082323A1 (fr) 2000-04-21 2001-04-23 Relais statique et dispositif de communication utilisant ledit relais statique

Publications (1)

Publication Number Publication Date
DE60141748D1 true DE60141748D1 (de) 2010-05-20

Family

ID=18632180

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60141748T Expired - Lifetime DE60141748D1 (de) 2000-04-21 2001-04-23 Statisches relais und dieses verwendendes kommunikationsgerät

Country Status (8)

Country Link
US (1) US6753487B2 (de)
EP (1) EP1283539B1 (de)
JP (1) JP3918559B2 (de)
KR (1) KR100506583B1 (de)
CN (1) CN1249760C (de)
AT (1) ATE463831T1 (de)
DE (1) DE60141748D1 (de)
WO (1) WO2001082323A1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3714020B2 (ja) * 1999-04-20 2005-11-09 オムロン株式会社 半導体素子の密封構造
AUPQ113799A0 (en) 1999-06-22 1999-07-15 University Of Queensland, The A method and device for measuring lymphoedema
US6787897B2 (en) * 2001-12-20 2004-09-07 Agilent Technologies, Inc. Wafer-level package with silicon gasket
JP2004103559A (ja) * 2002-07-15 2004-04-02 Toshiba Corp Mems装置
US7551048B2 (en) * 2002-08-08 2009-06-23 Fujitsu Component Limited Micro-relay and method of fabricating the same
JP4730750B2 (ja) * 2002-08-08 2011-07-20 富士通コンポーネント株式会社 マイクロリレー
JP4182861B2 (ja) * 2002-12-05 2008-11-19 オムロン株式会社 接点開閉器および接点開閉器を備えた装置
EP1426992A3 (de) * 2002-12-05 2005-11-30 Omron Corporation Mikroelektromechanische elektrostatische Schalter
US7719392B2 (en) * 2003-10-20 2010-05-18 University Of Dayton Ferroelectric varactors suitable for capacitive shunt switching
WO2005043669A1 (en) * 2003-10-20 2005-05-12 University Of Dayton Ferroelectric varactors suitable for capacitive shunt switching
US20070069264A1 (en) * 2003-10-20 2007-03-29 Guru Subramanyam Ferroelectric varactors suitable for capacitive shunt switching and wireless sensing
EP1605487A4 (de) 2004-01-27 2008-08-06 Matsushita Electric Works Ltd Mikrorelais
CA2625631C (en) 2005-10-11 2016-11-29 Impedance Cardiology Systems, Inc. Hydration status monitoring
ES2545730T3 (es) 2006-05-30 2015-09-15 Impedimed Limited Mediciones de impedancia
WO2008064426A1 (en) 2006-11-30 2008-06-05 Impedimed Limited Measurement apparatus
CA2703361C (en) 2007-03-30 2016-06-28 Impedimed Limited Active guarding for reduction of resistive and capacitive signal loading with adjustable control of compensation level
US10307074B2 (en) 2007-04-20 2019-06-04 Impedimed Limited Monitoring system and probe
JP4564549B2 (ja) * 2008-05-01 2010-10-20 株式会社半導体理工学研究センター Memsスイッチ
US20100096678A1 (en) * 2008-10-20 2010-04-22 University Of Dayton Nanostructured barium strontium titanate (bst) thin-film varactors on sapphire
AU2009321478B2 (en) 2008-11-28 2014-01-23 Impedimed Limited Impedance measurement process
US20120143034A1 (en) * 2009-05-18 2012-06-07 Impedimed Limited Electrode assembly
JP5494038B2 (ja) * 2009-05-21 2014-05-14 富士通株式会社 電子デバイスおよびその製造方法
US8847087B2 (en) 2009-09-17 2014-09-30 Panasonic Corporation MEMS switch and communication device using the same
WO2011033728A1 (ja) 2009-09-17 2011-03-24 パナソニック株式会社 Memsスイッチおよびそれを用いた通信装置
US9455106B2 (en) * 2011-02-02 2016-09-27 Littelfuse, Inc. Three-function reflowable circuit protection device
US8941461B2 (en) 2011-02-02 2015-01-27 Tyco Electronics Corporation Three-function reflowable circuit protection device
CN102798489B (zh) * 2011-10-21 2015-04-15 清华大学 一种压力传感器及其制备方法
US9000866B2 (en) 2012-06-26 2015-04-07 University Of Dayton Varactor shunt switches with parallel capacitor architecture
WO2021097337A1 (en) * 2019-11-13 2021-05-20 Massachusetts Institute Of Technology Micro-electromechanical (mem) power relay

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0765315B2 (ja) * 1989-12-07 1995-07-19 清水建設株式会社 盛土の構造
JPH0644883A (ja) 1992-07-23 1994-02-18 Sharp Corp マルチマイクロリレー
JPH0992116A (ja) 1995-09-22 1997-04-04 Omron Corp 静電継電器および静電継電器の製造方法
JPH09180616A (ja) 1995-12-28 1997-07-11 Omron Corp 静電継電器および静電継電器の製造方法
JPH10162713A (ja) * 1996-11-29 1998-06-19 Omron Corp マイクロリレー
JPH1174717A (ja) 1997-06-23 1999-03-16 Nec Corp フェーズドアレーアンテナ装置
EP0887879A1 (de) 1997-06-23 1998-12-30 Nec Corporation Phasengesteuerte Antennenvorrichtung

Also Published As

Publication number Publication date
JP3918559B2 (ja) 2007-05-23
WO2001082323A1 (fr) 2001-11-01
EP1283539B1 (de) 2010-04-07
ATE463831T1 (de) 2010-04-15
EP1283539A4 (de) 2006-10-18
US20020163408A1 (en) 2002-11-07
KR100506583B1 (ko) 2005-08-08
CN1249760C (zh) 2006-04-05
KR20020075824A (ko) 2002-10-07
US6753487B2 (en) 2004-06-22
EP1283539A1 (de) 2003-02-12
CN1366694A (zh) 2002-08-28

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