DE60128768D1 - Polierverfahren und vorrichtung - Google Patents
Polierverfahren und vorrichtungInfo
- Publication number
- DE60128768D1 DE60128768D1 DE60128768T DE60128768T DE60128768D1 DE 60128768 D1 DE60128768 D1 DE 60128768D1 DE 60128768 T DE60128768 T DE 60128768T DE 60128768 T DE60128768 T DE 60128768T DE 60128768 D1 DE60128768 D1 DE 60128768D1
- Authority
- DE
- Germany
- Prior art keywords
- polishing process
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
- B24B37/015—Temperature control
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
- B24B37/14—Lapping plates for working plane surfaces characterised by the composition or properties of the plate materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
- B24B41/042—Balancing mechanisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/14—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the temperature during grinding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000022591 | 2000-01-31 | ||
JP2000022591 | 2000-01-31 | ||
PCT/JP2001/000568 WO2001056742A1 (fr) | 2000-01-31 | 2001-01-29 | Dispositif et procede de polissage |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60128768D1 true DE60128768D1 (de) | 2007-07-19 |
DE60128768T2 DE60128768T2 (de) | 2007-10-11 |
Family
ID=18548876
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60136759T Expired - Fee Related DE60136759D1 (de) | 2000-01-31 | 2001-01-29 | Polierverfahren |
DE60128768T Expired - Fee Related DE60128768T2 (de) | 2000-01-31 | 2001-01-29 | Polierverfahren und vorrichtung |
DE60133231T Expired - Fee Related DE60133231T2 (de) | 2000-01-31 | 2001-01-29 | Polierverfahren |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60136759T Expired - Fee Related DE60136759D1 (de) | 2000-01-31 | 2001-01-29 | Polierverfahren |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60133231T Expired - Fee Related DE60133231T2 (de) | 2000-01-31 | 2001-01-29 | Polierverfahren |
Country Status (6)
Country | Link |
---|---|
US (2) | US6827638B2 (de) |
EP (3) | EP1602444B1 (de) |
KR (1) | KR100729022B1 (de) |
DE (3) | DE60136759D1 (de) |
TW (1) | TWI291730B (de) |
WO (1) | WO2001056742A1 (de) |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20020010537A (ko) * | 2000-07-27 | 2002-02-04 | 추후기재 | 화학적 기계적 평탄화 처리를 위한 폴리싱 표면 온도 조절시스템 |
JP4448297B2 (ja) * | 2002-12-27 | 2010-04-07 | 株式会社荏原製作所 | 基板研磨装置及び基板研磨方法 |
CN101306512A (zh) * | 2002-12-27 | 2008-11-19 | 株式会社荏原制作所 | 基片抛光设备 |
JP2005268566A (ja) * | 2004-03-19 | 2005-09-29 | Ebara Corp | 化学機械研磨装置の基板把持機構のヘッド構造 |
DE102004017452A1 (de) * | 2004-04-08 | 2005-11-03 | Siltronic Ag | Vorrichtung zur flächigen, abrasiven Bearbeitung eines scheibenförmigen Werkstücks |
DE102005045339B4 (de) * | 2005-09-22 | 2009-04-02 | Siltronic Ag | Epitaxierte Siliciumscheibe und Verfahren zur Herstellung von epitaxierten Siliciumscheiben |
KR101004432B1 (ko) * | 2008-06-10 | 2010-12-28 | 세메스 주식회사 | 매엽식 기판 처리 장치 |
JP5516184B2 (ja) * | 2010-07-26 | 2014-06-11 | 信越化学工業株式会社 | 合成石英ガラス基板の製造方法 |
JP5404673B2 (ja) * | 2011-02-25 | 2014-02-05 | 株式会社東芝 | Cmp装置、研磨パッド及びcmp方法 |
JP5628067B2 (ja) * | 2011-02-25 | 2014-11-19 | 株式会社荏原製作所 | 研磨パッドの温度調整機構を備えた研磨装置 |
JP2013099814A (ja) * | 2011-11-08 | 2013-05-23 | Toshiba Corp | 研磨方法及び研磨装置 |
US9418904B2 (en) | 2011-11-14 | 2016-08-16 | Taiwan Semiconductor Manufacturing Co., Ltd. | Localized CMP to improve wafer planarization |
US10065288B2 (en) | 2012-02-14 | 2018-09-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Chemical mechanical polishing (CMP) platform for local profile control |
US20130210173A1 (en) * | 2012-02-14 | 2013-08-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Multiple Zone Temperature Control for CMP |
US8860040B2 (en) | 2012-09-11 | 2014-10-14 | Dow Corning Corporation | High voltage power semiconductor devices on SiC |
US9018639B2 (en) * | 2012-10-26 | 2015-04-28 | Dow Corning Corporation | Flat SiC semiconductor substrate |
US9797064B2 (en) | 2013-02-05 | 2017-10-24 | Dow Corning Corporation | Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a support shelf which permits thermal expansion |
US9738991B2 (en) | 2013-02-05 | 2017-08-22 | Dow Corning Corporation | Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a supporting shelf which permits thermal expansion |
US9017804B2 (en) | 2013-02-05 | 2015-04-28 | Dow Corning Corporation | Method to reduce dislocations in SiC crystal growth |
US8940614B2 (en) | 2013-03-15 | 2015-01-27 | Dow Corning Corporation | SiC substrate with SiC epitaxial film |
JP6161999B2 (ja) * | 2013-08-27 | 2017-07-12 | 株式会社荏原製作所 | 研磨方法および研磨装置 |
JP6237264B2 (ja) * | 2014-01-24 | 2017-11-29 | 東京エレクトロン株式会社 | 縦型熱処理装置、熱処理方法及び記憶媒体 |
US9279192B2 (en) | 2014-07-29 | 2016-03-08 | Dow Corning Corporation | Method for manufacturing SiC wafer fit for integration with power device manufacturing technology |
JP2017037918A (ja) * | 2015-08-07 | 2017-02-16 | エスアイアイ・セミコンダクタ株式会社 | 研磨ヘッド、研磨ヘッドを有するcmp研磨装置およびそれを用いた半導体集積回路の製造方法 |
JP6376085B2 (ja) * | 2015-09-03 | 2018-08-22 | 信越半導体株式会社 | 研磨方法及び研磨装置 |
CN105150106B (zh) * | 2015-09-21 | 2017-05-17 | 上海工程技术大学 | 晶圆双面化学机械研磨抛光用冷却装置及方法 |
JP6312229B1 (ja) * | 2017-06-12 | 2018-04-18 | 信越半導体株式会社 | 研磨方法及び研磨装置 |
US10777418B2 (en) | 2017-06-14 | 2020-09-15 | Rohm And Haas Electronic Materials Cmp Holdings, I | Biased pulse CMP groove pattern |
US10857648B2 (en) | 2017-06-14 | 2020-12-08 | Rohm And Haas Electronic Materials Cmp Holdings | Trapezoidal CMP groove pattern |
US10586708B2 (en) | 2017-06-14 | 2020-03-10 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Uniform CMP polishing method |
US10857647B2 (en) * | 2017-06-14 | 2020-12-08 | Rohm And Haas Electronic Materials Cmp Holdings | High-rate CMP polishing method |
US10861702B2 (en) * | 2017-06-14 | 2020-12-08 | Rohm And Haas Electronic Materials Cmp Holdings | Controlled residence CMP polishing method |
CN108188900B (zh) * | 2018-02-08 | 2021-07-20 | 张玲 | 废旧钢板磨削装置 |
CN108857600B (zh) * | 2018-07-25 | 2023-07-14 | 浙江工业大学 | 一种基于光催化的钴基合金加工方法及加工平台 |
JP6746756B1 (ja) * | 2019-05-24 | 2020-08-26 | Towa株式会社 | 吸着プレート、切断装置および切断方法 |
JP2023516871A (ja) | 2020-06-29 | 2023-04-21 | アプライド マテリアルズ インコーポレイテッド | Cmpにおける温度及びスラリ流量の制御 |
CN113414672B (zh) * | 2021-07-15 | 2022-02-11 | 安徽新境界自动化技术有限公司 | 一种八轴六联动打磨机器人本体结构 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5454390A (en) | 1977-10-08 | 1979-04-28 | Shibayama Kikai Kk | Cooling water temperature control system for polishing table |
US4313284A (en) * | 1980-03-27 | 1982-02-02 | Monsanto Company | Apparatus for improving flatness of polished wafers |
JPS5796767A (en) * | 1980-11-28 | 1982-06-16 | Toshiba Corp | Polishing device |
DE3128880A1 (de) * | 1981-07-22 | 1983-02-10 | Fa. Peter Wolters, 2370 Rendsburg | Maschine zum laeppen oder polieren |
US4450652A (en) * | 1981-09-04 | 1984-05-29 | Monsanto Company | Temperature control for wafer polishing |
US4457114A (en) * | 1982-09-30 | 1984-07-03 | Magnetic Peripherals Inc. | Workpiece carrier |
US5127196A (en) * | 1990-03-01 | 1992-07-07 | Intel Corporation | Apparatus for planarizing a dielectric formed over a semiconductor substrate |
US5036630A (en) * | 1990-04-13 | 1991-08-06 | International Business Machines Corporation | Radial uniformity control of semiconductor wafer polishing |
JP2985490B2 (ja) * | 1992-02-28 | 1999-11-29 | 信越半導体株式会社 | 研磨機の除熱方法 |
JPH06124931A (ja) * | 1992-08-28 | 1994-05-06 | Hitachi Cable Ltd | 基板貼付用接着剤及び基板の研磨方法 |
US5607718A (en) * | 1993-03-26 | 1997-03-04 | Kabushiki Kaisha Toshiba | Polishing method and polishing apparatus |
JP2838021B2 (ja) * | 1993-08-19 | 1998-12-16 | 新日本製鐵株式会社 | ウェーハ研磨装置 |
US5571044A (en) * | 1994-10-11 | 1996-11-05 | Ontrak Systems, Inc. | Wafer holder for semiconductor wafer polishing machine |
US5791969A (en) * | 1994-11-01 | 1998-08-11 | Lund; Douglas E. | System and method of automatically polishing semiconductor wafers |
JPH1094957A (ja) * | 1996-09-25 | 1998-04-14 | Toshiba Corp | 研磨定盤およびそれを用いた研磨装置 |
JPH10296619A (ja) * | 1997-05-02 | 1998-11-10 | Fujikoshi Mach Corp | 研磨用定盤 |
US5873769A (en) * | 1997-05-30 | 1999-02-23 | Industrial Technology Research Institute | Temperature compensated chemical mechanical polishing to achieve uniform removal rates |
JP3741523B2 (ja) * | 1997-07-30 | 2006-02-01 | 株式会社荏原製作所 | 研磨装置 |
US6121144A (en) * | 1997-12-29 | 2000-09-19 | Intel Corporation | Low temperature chemical mechanical polishing of dielectric materials |
US6386957B1 (en) * | 1998-10-30 | 2002-05-14 | Shin-Etsu Handotai Co., Ltd. | Workpiece holder for polishing, method for producing the same, method for polishing workpiece, and polishing apparatus |
EP1046462B1 (de) * | 1999-03-26 | 2003-10-29 | Ibiden Co., Ltd. | Halteplatte für Scheiben bei Schleifmaschinen und Verfahren zur Herstellung dieser Platte |
JP2001351874A (ja) * | 2000-06-09 | 2001-12-21 | Ebara Corp | 基板回転装置 |
JP6059623B2 (ja) * | 2012-09-19 | 2017-01-11 | 株式会社新高製作所 | 免震クリアランス用床板垂直可動装置 |
-
2001
- 2001-01-29 KR KR1020017008650A patent/KR100729022B1/ko not_active IP Right Cessation
- 2001-01-29 EP EP05018524A patent/EP1602444B1/de not_active Expired - Lifetime
- 2001-01-29 DE DE60136759T patent/DE60136759D1/de not_active Expired - Fee Related
- 2001-01-29 WO PCT/JP2001/000568 patent/WO2001056742A1/ja active IP Right Grant
- 2001-01-29 DE DE60128768T patent/DE60128768T2/de not_active Expired - Fee Related
- 2001-01-29 EP EP01902662A patent/EP1197293B1/de not_active Expired - Lifetime
- 2001-01-29 EP EP05018525A patent/EP1614505B1/de not_active Expired - Lifetime
- 2001-01-29 DE DE60133231T patent/DE60133231T2/de not_active Expired - Fee Related
- 2001-01-29 US US09/926,243 patent/US6827638B2/en not_active Expired - Fee Related
- 2001-01-30 TW TW090101821A patent/TWI291730B/zh not_active IP Right Cessation
-
2004
- 2004-10-15 US US10/964,624 patent/US7513819B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO2001056742A1 (fr) | 2001-08-09 |
EP1197293A1 (de) | 2002-04-17 |
US20050048882A1 (en) | 2005-03-03 |
EP1614505B1 (de) | 2008-11-26 |
KR20010108076A (ko) | 2001-12-07 |
DE60136759D1 (de) | 2009-01-08 |
DE60133231T2 (de) | 2008-07-03 |
EP1197293A4 (de) | 2004-12-15 |
DE60128768T2 (de) | 2007-10-11 |
US6827638B2 (en) | 2004-12-07 |
US20020187728A1 (en) | 2002-12-12 |
EP1602444A2 (de) | 2005-12-07 |
US7513819B2 (en) | 2009-04-07 |
TWI291730B (en) | 2007-12-21 |
KR100729022B1 (ko) | 2007-06-14 |
EP1602444B1 (de) | 2008-03-12 |
EP1602444A3 (de) | 2005-12-14 |
DE60133231D1 (de) | 2008-04-24 |
EP1614505A1 (de) | 2006-01-11 |
EP1197293B1 (de) | 2007-06-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |