DE60132528D1 - Microlötverfahren und -vorrichtung - Google Patents

Microlötverfahren und -vorrichtung

Info

Publication number
DE60132528D1
DE60132528D1 DE60132528T DE60132528T DE60132528D1 DE 60132528 D1 DE60132528 D1 DE 60132528D1 DE 60132528 T DE60132528 T DE 60132528T DE 60132528 T DE60132528 T DE 60132528T DE 60132528 D1 DE60132528 D1 DE 60132528D1
Authority
DE
Germany
Prior art keywords
microloading
microloading process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60132528T
Other languages
English (en)
Other versions
DE60132528T2 (de
Inventor
Yaoling Pan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avago Technologies International Sales Pte Ltd
Original Assignee
Avago Technologies Fiber IP Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Avago Technologies Fiber IP Singapore Pte Ltd filed Critical Avago Technologies Fiber IP Singapore Pte Ltd
Publication of DE60132528D1 publication Critical patent/DE60132528D1/de
Application granted granted Critical
Publication of DE60132528T2 publication Critical patent/DE60132528T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • HELECTRICITY
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    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/345Arrangements for heating
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    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/50Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
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    • H05K1/0201Thermal arrangements, e.g. for cooling, heating or preventing overheating
    • H05K1/0212Printed circuits or mounted components having integral heating means
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    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10674Flip chip
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    • H05K2203/11Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1115Resistance heating, e.g. by current through the PCB conductors or through a metallic mask
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    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341Surface mounted components
    • H05K3/3431Leadless components
    • H05K3/3436Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
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    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3494Heating methods for reflowing of solder
DE60132528T 2000-10-02 2001-08-27 Mikrolötverfahren und -vorrichtung Expired - Lifetime DE60132528T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US678288 2000-10-02
US09/678,288 US6423939B1 (en) 2000-10-02 2000-10-02 Micro soldering method and apparatus

Publications (2)

Publication Number Publication Date
DE60132528D1 true DE60132528D1 (de) 2008-03-13
DE60132528T2 DE60132528T2 (de) 2009-01-15

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DE60132528T Expired - Lifetime DE60132528T2 (de) 2000-10-02 2001-08-27 Mikrolötverfahren und -vorrichtung

Country Status (4)

Country Link
US (1) US6423939B1 (de)
EP (1) EP1193750B1 (de)
JP (1) JP2002176074A (de)
DE (1) DE60132528T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6492620B1 (en) * 2001-05-18 2002-12-10 Trw Inc. Equipotential fault tolerant integrated circuit heater
US6841739B2 (en) * 2002-07-31 2005-01-11 Motorola, Inc. Flexible circuit board having electrical resistance heater trace
US6911624B2 (en) * 2002-08-23 2005-06-28 Micron Technology, Inc. Component installation, removal, and replacement apparatus and method
US7064004B2 (en) 2003-12-29 2006-06-20 Intel Corporation Induction-based heating for chip attach
FR2912029B1 (fr) * 2007-01-31 2010-10-22 Hispano Suiza Sa Carte electronique incorporant une resistance chauffante.
US8519304B2 (en) 2010-07-09 2013-08-27 International Business Machines Corporation Implementing selective rework for chip stacks and silicon carrier assemblies
US20120074131A1 (en) * 2010-09-29 2012-03-29 Seagate Technology Llc Integrated resistive heaters for microelectronic devices and methods utilizing the same
FR2981500B1 (fr) * 2011-10-13 2013-11-01 Commissariat Energie Atomique Hybridation flip-chip de composants microelectroniques au moyen d'elements de connexion resistifs fusibles suspendus
US9125301B2 (en) 2011-10-18 2015-09-01 Integrated Microwave Corporation Integral heater assembly and method for carrier or host board of electronic package assembly
US8462462B1 (en) 2011-10-20 2013-06-11 Western Digital (Fremont), Llc Localized heating for flip chip bonding
FR2981795B1 (fr) * 2011-10-25 2015-01-02 Commissariat Energie Atomique Hybridation flip-chip de composants microelectroniques par chauffage local des elements de connexion
US9205631B2 (en) 2013-08-14 2015-12-08 Globalfoundries Inc Controlling the melt front of thin film applications
DE102014213535A1 (de) * 2014-07-11 2016-01-14 Siemens Aktiengesellschaft Verfahren zum Herstellen einer elektronischen Baugruppe und elektronische Baugruppe, wobei in dem Substrat der Baugruppe eine Heizeinrichtung vorgesehen ist
US10103139B2 (en) * 2015-07-07 2018-10-16 Xilinx, Inc. Method and design of low sheet resistance MEOL resistors
DE102016106734A1 (de) * 2015-12-14 2017-06-14 Osram Opto Semiconductors Gmbh Träger für ein optoelektronisches Bauelement, Verfahren zum Herstellen eines Trägers für ein optoelektronisches Bauelement, Wafer und Lötverfahren
US20170179069A1 (en) * 2015-12-18 2017-06-22 Jonathon R. Carstens Ball grid array solder attachment

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4506139A (en) * 1983-04-04 1985-03-19 Honeywell Inc. Circuit chip
GB2189620B (en) * 1986-04-23 1990-03-28 Stc Plc Optical fibre transmission package
US4788404A (en) * 1985-06-20 1988-11-29 Metcal, Inc. Self-soldering flexible circuit connector
US4769525A (en) * 1986-09-02 1988-09-06 Hughes Aircraft Company Circuit package attachment apparatus and method
FR2638050B1 (fr) * 1988-10-18 1996-03-01 Thomson Hybrides Dispositif de report de composant sur un circuit hybride
US5103071A (en) * 1988-11-29 1992-04-07 Amp Incorporated Surface mount technology breakaway self regulating temperature heater
US5010233A (en) * 1988-11-29 1991-04-23 Amp Incorporated Self regulating temperature heater as an integral part of a printed circuit board
US5483270A (en) * 1990-02-26 1996-01-09 Canon Kabushiki Kaisha Substrate for ink jet head
US5539186A (en) * 1992-12-09 1996-07-23 International Business Machines Corporation Temperature controlled multi-layer module
US5568892A (en) * 1994-06-16 1996-10-29 Lucent Technologies Inc. Alignment and bonding techniques
GB9508631D0 (en) * 1995-04-28 1995-06-14 Smiths Industries Ltd Electrical circuits
DE19542165A1 (de) * 1995-11-11 1997-05-15 Wuerth Elektronik Gmbh & Co Kg Leiterplatte
US5951893A (en) * 1995-12-05 1999-09-14 Motorola, Inc. Integrated circuit pad structure with high temperature heating element and method therefor
DE19620113A1 (de) * 1996-05-18 1997-11-20 Bosch Gmbh Robert Verfahren und Vorrichtung zur Befestigung von Bonddrähten auf Bondlands einer Hybridschaltung
US6114674A (en) * 1996-10-04 2000-09-05 Mcdonnell Douglas Corporation Multilayer circuit board with electrically resistive heating element
FI981032A (fi) * 1998-05-08 1999-11-09 Nokia Networks Oy Lämmitysmenetelmä ja piirilevy
US6221141B1 (en) * 1998-06-23 2001-04-24 Canon Kabushiki Kaisha Ink, ink-jet recording process, recording unit, ink cartridge and ink-jet recording apparatus

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US6423939B1 (en) 2002-07-23
EP1193750A3 (de) 2002-07-10
DE60132528T2 (de) 2009-01-15
EP1193750A2 (de) 2002-04-03
JP2002176074A (ja) 2002-06-21
EP1193750B1 (de) 2008-01-23

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