DE60127030D1 - ESD-beständige Vorrichtung und Herstellungsverfahren dazu - Google Patents

ESD-beständige Vorrichtung und Herstellungsverfahren dazu

Info

Publication number
DE60127030D1
DE60127030D1 DE60127030T DE60127030T DE60127030D1 DE 60127030 D1 DE60127030 D1 DE 60127030D1 DE 60127030 T DE60127030 T DE 60127030T DE 60127030 T DE60127030 T DE 60127030T DE 60127030 D1 DE60127030 D1 DE 60127030D1
Authority
DE
Germany
Prior art keywords
esd
manufacturing
resistant device
resistant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60127030T
Other languages
English (en)
Other versions
DE60127030T2 (de
Inventor
Gustav Edward Derkits Jr
Leslie Marchut
Franklin R Nash
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agere Systems LLC
Original Assignee
Agere Systems Optoelectronics Guardian Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24334200&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE60127030(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Agere Systems Optoelectronics Guardian Corp filed Critical Agere Systems Optoelectronics Guardian Corp
Publication of DE60127030D1 publication Critical patent/DE60127030D1/de
Application granted granted Critical
Publication of DE60127030T2 publication Critical patent/DE60127030T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
    • H01L31/105—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
    • H01L31/107—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Light Receiving Elements (AREA)
  • Solid State Image Pick-Up Elements (AREA)
DE60127030T 2000-05-31 2001-04-06 ESD-beständige Vorrichtung und Herstellungsverfahren dazu Expired - Lifetime DE60127030T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/583,699 US6489232B1 (en) 2000-05-31 2000-05-31 ESD resistant device
US583699 2000-05-31

Publications (2)

Publication Number Publication Date
DE60127030D1 true DE60127030D1 (de) 2007-04-19
DE60127030T2 DE60127030T2 (de) 2007-12-13

Family

ID=24334200

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60127030T Expired - Lifetime DE60127030T2 (de) 2000-05-31 2001-04-06 ESD-beständige Vorrichtung und Herstellungsverfahren dazu

Country Status (5)

Country Link
US (2) US6489232B1 (de)
EP (1) EP1162666B1 (de)
JP (1) JP2002009162A (de)
CA (1) CA2343086A1 (de)
DE (1) DE60127030T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6753214B1 (en) * 2001-02-16 2004-06-22 Optical Communication Products, Inc. Photodetector with isolation implant region for reduced device capacitance and increased bandwidth
US7440865B1 (en) * 2003-02-03 2008-10-21 Finisar Corporation Screening optical transceiver modules for electrostatic discharge damage
KR100651498B1 (ko) * 2004-10-28 2006-11-29 삼성전기주식회사 다파장 수광소자 및 그 제조방법
US7433167B2 (en) * 2005-03-08 2008-10-07 Synaptics Incorporated Strike ring based electrostatic discharge protection
JP2008305857A (ja) * 2007-06-05 2008-12-18 Mitsubishi Electric Corp 光半導体装置
CN101459045B (zh) * 2007-12-13 2011-03-23 中芯国际集成电路制造(上海)有限公司 晶体管保护环的制作方法、离子注入工艺优化方法及装置
EP2335283B1 (de) * 2008-09-11 2017-08-02 Nexperia B.V. Schutz für eine integrierte schaltung
US8232810B2 (en) * 2009-05-12 2012-07-31 Synaptics Incorporated Extended proximity sensor device with electrostatic discharge protection
US7948006B2 (en) * 2009-06-01 2011-05-24 Jds Uniphase Corporation Photodiode with high ESD threshold
JP5218610B2 (ja) * 2011-07-08 2013-06-26 三菱電機株式会社 光半導体装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0828426B2 (ja) 1985-10-15 1996-03-21 エイ・ティ・アンド・ティ・コーポレーション Ｉｇｆｅｔ集積回路の静電放電からの保護
US5019002A (en) * 1989-07-12 1991-05-28 Honeywell, Inc. Method of manufacturing flat panel backplanes including electrostatic discharge prevention and displays made thereby
JPH06169061A (ja) * 1992-01-17 1994-06-14 Ricoh Co Ltd 入出力保護装置
JPH07240534A (ja) * 1993-03-16 1995-09-12 Seiko Instr Inc 光電変換半導体装置及びその製造方法
US6091082A (en) * 1998-02-17 2000-07-18 Stmicroelectronics, Inc. Electrostatic discharge protection for integrated circuit sensor passivation
US6121080A (en) * 1998-11-06 2000-09-19 United Microelectronics Corp. Electronic discharge protective circuit for DRAM
US6686546B2 (en) * 1998-12-30 2004-02-03 Stmicroelectronics, Inc. Static charge dissipation for an active circuit surface

Also Published As

Publication number Publication date
EP1162666A3 (de) 2004-07-07
US20020195263A1 (en) 2002-12-26
US6835984B2 (en) 2004-12-28
US6489232B1 (en) 2002-12-03
DE60127030T2 (de) 2007-12-13
EP1162666B1 (de) 2007-03-07
EP1162666A2 (de) 2001-12-12
JP2002009162A (ja) 2002-01-11
CA2343086A1 (en) 2001-11-30

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication of lapse of patent is to be deleted
8364 No opposition during term of opposition