JPS5454390A - Cooling water temperature control system for polishing table - Google Patents
Cooling water temperature control system for polishing tableInfo
- Publication number
- JPS5454390A JPS5454390A JP12109677A JP12109677A JPS5454390A JP S5454390 A JPS5454390 A JP S5454390A JP 12109677 A JP12109677 A JP 12109677A JP 12109677 A JP12109677 A JP 12109677A JP S5454390 A JPS5454390 A JP S5454390A
- Authority
- JP
- Japan
- Prior art keywords
- control system
- cooling water
- temperature control
- water temperature
- polishing table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12109677A JPS5454390A (en) | 1977-10-08 | 1977-10-08 | Cooling water temperature control system for polishing table |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12109677A JPS5454390A (en) | 1977-10-08 | 1977-10-08 | Cooling water temperature control system for polishing table |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5454390A true JPS5454390A (en) | 1979-04-28 |
Family
ID=14802768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12109677A Pending JPS5454390A (en) | 1977-10-08 | 1977-10-08 | Cooling water temperature control system for polishing table |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5454390A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5775776A (en) * | 1980-10-28 | 1982-05-12 | Supiide Fuamu Kk | Temperature detector and controller of polishing machine |
JPS5840265A (en) * | 1981-08-28 | 1983-03-09 | Toshiba Corp | Both faces polishing device |
JPS5894016A (en) * | 1981-12-01 | 1983-06-04 | Toshiba Corp | Temperature controller |
JPS58196967A (en) * | 1982-05-11 | 1983-11-16 | Hitachi Ltd | Polishing of both surfaces of wafer |
JPS6056460U (en) * | 1983-09-27 | 1985-04-19 | 株式会社東芝 | polishing equipment |
JPH01199762A (en) * | 1988-02-04 | 1989-08-11 | Tdk Corp | Polishing device |
WO2001056742A1 (en) * | 2000-01-31 | 2001-08-09 | Shin-Etsu Handotai Co., Ltd. | Polishing device and method |
-
1977
- 1977-10-08 JP JP12109677A patent/JPS5454390A/en active Pending
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5775776A (en) * | 1980-10-28 | 1982-05-12 | Supiide Fuamu Kk | Temperature detector and controller of polishing machine |
JPH0317621B2 (en) * | 1980-10-28 | 1991-03-08 | Speedfam Corp | |
JPS5840265A (en) * | 1981-08-28 | 1983-03-09 | Toshiba Corp | Both faces polishing device |
JPH0323304B2 (en) * | 1981-08-28 | 1991-03-28 | Tokyo Shibaura Electric Co | |
JPS5894016A (en) * | 1981-12-01 | 1983-06-04 | Toshiba Corp | Temperature controller |
JPS58196967A (en) * | 1982-05-11 | 1983-11-16 | Hitachi Ltd | Polishing of both surfaces of wafer |
JPS6056460U (en) * | 1983-09-27 | 1985-04-19 | 株式会社東芝 | polishing equipment |
JPH01199762A (en) * | 1988-02-04 | 1989-08-11 | Tdk Corp | Polishing device |
WO2001056742A1 (en) * | 2000-01-31 | 2001-08-09 | Shin-Etsu Handotai Co., Ltd. | Polishing device and method |
US6827638B2 (en) | 2000-01-31 | 2004-12-07 | Shin-Etsu Handotai Co., Ltd. | Polishing device and method |
US7513819B2 (en) | 2000-01-31 | 2009-04-07 | Shin-Eisu Handotai Co., Ltd | Polishing apparatus and method |
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