JPS5454390A - Cooling water temperature control system for polishing table - Google Patents

Cooling water temperature control system for polishing table

Info

Publication number
JPS5454390A
JPS5454390A JP12109677A JP12109677A JPS5454390A JP S5454390 A JPS5454390 A JP S5454390A JP 12109677 A JP12109677 A JP 12109677A JP 12109677 A JP12109677 A JP 12109677A JP S5454390 A JPS5454390 A JP S5454390A
Authority
JP
Japan
Prior art keywords
control system
cooling water
temperature control
water temperature
polishing table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12109677A
Other languages
Japanese (ja)
Inventor
Kouichi Hatano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibayama Kikai Co Ltd
Original Assignee
Shibayama Kikai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibayama Kikai Co Ltd filed Critical Shibayama Kikai Co Ltd
Priority to JP12109677A priority Critical patent/JPS5454390A/en
Publication of JPS5454390A publication Critical patent/JPS5454390A/en
Pending legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP12109677A 1977-10-08 1977-10-08 Cooling water temperature control system for polishing table Pending JPS5454390A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12109677A JPS5454390A (en) 1977-10-08 1977-10-08 Cooling water temperature control system for polishing table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12109677A JPS5454390A (en) 1977-10-08 1977-10-08 Cooling water temperature control system for polishing table

Publications (1)

Publication Number Publication Date
JPS5454390A true JPS5454390A (en) 1979-04-28

Family

ID=14802768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12109677A Pending JPS5454390A (en) 1977-10-08 1977-10-08 Cooling water temperature control system for polishing table

Country Status (1)

Country Link
JP (1) JPS5454390A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5775776A (en) * 1980-10-28 1982-05-12 Supiide Fuamu Kk Temperature detector and controller of polishing machine
JPS5840265A (en) * 1981-08-28 1983-03-09 Toshiba Corp Both faces polishing device
JPS5894016A (en) * 1981-12-01 1983-06-04 Toshiba Corp Temperature controller
JPS58196967A (en) * 1982-05-11 1983-11-16 Hitachi Ltd Polishing of both surfaces of wafer
JPS6056460U (en) * 1983-09-27 1985-04-19 株式会社東芝 polishing equipment
JPH01199762A (en) * 1988-02-04 1989-08-11 Tdk Corp Polishing device
WO2001056742A1 (en) * 2000-01-31 2001-08-09 Shin-Etsu Handotai Co., Ltd. Polishing device and method

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5775776A (en) * 1980-10-28 1982-05-12 Supiide Fuamu Kk Temperature detector and controller of polishing machine
JPH0317621B2 (en) * 1980-10-28 1991-03-08 Speedfam Corp
JPS5840265A (en) * 1981-08-28 1983-03-09 Toshiba Corp Both faces polishing device
JPH0323304B2 (en) * 1981-08-28 1991-03-28 Tokyo Shibaura Electric Co
JPS5894016A (en) * 1981-12-01 1983-06-04 Toshiba Corp Temperature controller
JPS58196967A (en) * 1982-05-11 1983-11-16 Hitachi Ltd Polishing of both surfaces of wafer
JPS6056460U (en) * 1983-09-27 1985-04-19 株式会社東芝 polishing equipment
JPH01199762A (en) * 1988-02-04 1989-08-11 Tdk Corp Polishing device
WO2001056742A1 (en) * 2000-01-31 2001-08-09 Shin-Etsu Handotai Co., Ltd. Polishing device and method
US6827638B2 (en) 2000-01-31 2004-12-07 Shin-Etsu Handotai Co., Ltd. Polishing device and method
US7513819B2 (en) 2000-01-31 2009-04-07 Shin-Eisu Handotai Co., Ltd Polishing apparatus and method

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