TWI285295B
(en)
*
|
2001-02-23 |
2007-08-11 |
Asml Netherlands Bv |
Illumination optimization in lithography
|
JP2003100603A
(ja)
*
|
2001-09-25 |
2003-04-04 |
Canon Inc |
露光装置及びその制御方法並びにデバイスの製造方法
|
US6906305B2
(en)
*
|
2002-01-08 |
2005-06-14 |
Brion Technologies, Inc. |
System and method for aerial image sensing
|
US6828542B2
(en)
*
|
2002-06-07 |
2004-12-07 |
Brion Technologies, Inc. |
System and method for lithography process monitoring and control
|
US6782525B2
(en)
*
|
2002-09-05 |
2004-08-24 |
Lsi Logic Corporation |
Wafer process critical dimension, alignment, and registration analysis simulation tool
|
US7266480B2
(en)
*
|
2002-10-01 |
2007-09-04 |
The Regents Of The University Of California |
Rapid scattering simulation of objects in imaging using edge domain decomposition
|
US6807503B2
(en)
|
2002-11-04 |
2004-10-19 |
Brion Technologies, Inc. |
Method and apparatus for monitoring integrated circuit fabrication
|
SG139530A1
(en)
*
|
2003-01-14 |
2008-02-29 |
Asml Masktools Bv |
Method of optical proximity correction design for contact hole mask
|
KR100792808B1
(ko)
|
2003-01-14 |
2008-01-14 |
에이에스엠엘 마스크툴즈 비.브이. |
딥 서브-파장 광학 리소그래피용 레티클 패턴에 광근접성피처들을 제공하는 방법 및 장치
|
US7030966B2
(en)
*
|
2003-02-11 |
2006-04-18 |
Asml Netherlands B.V. |
Lithographic apparatus and method for optimizing an illumination source using photolithographic simulations
|
US7471375B2
(en)
*
|
2003-02-11 |
2008-12-30 |
Asml Netherlands B.V. |
Correction of optical proximity effects by intensity modulation of an illumination arrangement
|
US6839125B2
(en)
*
|
2003-02-11 |
2005-01-04 |
Asml Netherlands B.V. |
Method for optimizing an illumination source using full resist simulation and process window response metric
|
US7180576B2
(en)
*
|
2003-02-11 |
2007-02-20 |
Asml Netherlands B.V. |
Exposure with intensity balancing to mimic complex illuminator shape
|
US7245356B2
(en)
*
|
2003-02-11 |
2007-07-17 |
Asml Netherlands B.V. |
Lithographic apparatus and method for optimizing illumination using a photolithographic simulation
|
US7053355B2
(en)
|
2003-03-18 |
2006-05-30 |
Brion Technologies, Inc. |
System and method for lithography process monitoring and control
|
TWI334511B
(en)
*
|
2003-03-31 |
2010-12-11 |
Asml Masktools Bv |
Source and mask optimization
|
CA2526105C
(en)
*
|
2003-06-20 |
2010-08-10 |
Mitsubishi Denki Kabushiki Kaisha |
Image display method and image display apparatus
|
US7096452B2
(en)
*
|
2003-06-24 |
2006-08-22 |
Micron Technology, Inc. |
Method and device for checking lithography data
|
KR101115477B1
(ko)
|
2003-06-30 |
2012-03-06 |
에이에스엠엘 마스크툴즈 비.브이. |
이미지 필드 맵을 이용하여 어시스트 피처를 생성하는방법, 프로그램물 및 장치
|
US20050015233A1
(en)
*
|
2003-07-17 |
2005-01-20 |
International Business Machines Corporation |
Method for computing partially coherent aerial imagery
|
DE602004011860T2
(de)
|
2003-09-05 |
2009-02-12 |
Asml Masktools B.V. |
Methode und Vorrichtung für modellgestützte Plazierung phasenbalancierter Hilfsstrukturen für optische Lithographie mit Auflösungsgrenzen unterhalb der Belichtungswellenlänge
|
US6968532B2
(en)
*
|
2003-10-08 |
2005-11-22 |
Intel Corporation |
Multiple exposure technique to pattern tight contact geometries
|
US7287239B2
(en)
|
2003-10-27 |
2007-10-23 |
International Business Machines Corporation |
Performance in model-based OPC engine utilizing efficient polygon pinning method
|
US7055126B2
(en)
|
2003-10-27 |
2006-05-30 |
International Business Machines Corporation |
Renesting interaction map into design for efficient long range calculations
|
US7010776B2
(en)
|
2003-10-27 |
2006-03-07 |
International Business Machines Corporation |
Extending the range of lithographic simulation integrals
|
US7343271B2
(en)
|
2003-10-27 |
2008-03-11 |
International Business Machines Corporation |
Incorporation of a phase map into fast model-based optical proximity correction simulation kernels to account for near and mid-range flare
|
US7366342B2
(en)
|
2003-10-27 |
2008-04-29 |
International Business Machines Corporation |
Simultaneous computation of multiple points on one or multiple cut lines
|
JP5121117B2
(ja)
|
2003-10-31 |
2013-01-16 |
エーエスエムエル マスクツールズ ビー.ブイ. |
強度プロフィールを最適化する方法及びプログラム
|
KR20050043713A
(ko)
*
|
2003-11-05 |
2005-05-11 |
에이에스엠엘 마스크툴즈 비.브이. |
고유 분해 기반 opc 모델
|
US7457838B2
(en)
*
|
2003-12-03 |
2008-11-25 |
Marvell World Trade Ltd. |
Methods and apparatus for performing calculations using reduced-width data
|
US7127699B2
(en)
*
|
2003-12-16 |
2006-10-24 |
International Business Machines Corporation |
Method for optimizing a number of kernels used in a sum of coherent sources for optical proximity correction in an optical microlithography process
|
SG125970A1
(en)
*
|
2003-12-19 |
2006-10-30 |
Asml Masktools Bv |
Feature optimization using interference mapping lithography
|
US7242459B2
(en)
*
|
2004-01-30 |
2007-07-10 |
Asml Masktools B.V. |
Method of predicting and minimizing model OPC deviation due to mix/match of exposure tools using a calibrated Eigen decomposition model
|
US8027813B2
(en)
*
|
2004-02-20 |
2011-09-27 |
Nikon Precision, Inc. |
Method and system for reconstructing aberrated image profiles through simulation
|
US7079223B2
(en)
*
|
2004-02-20 |
2006-07-18 |
International Business Machines Corporation |
Fast model-based optical proximity correction
|
US7620930B2
(en)
|
2004-08-24 |
2009-11-17 |
Asml Masktools B.V. |
Method, program product and apparatus for model based scattering bar placement for enhanced depth of focus in quarter-wavelength lithography
|
US7331033B2
(en)
*
|
2004-08-27 |
2008-02-12 |
Applied Materials, Israel, Ltd. |
Simulation of aerial images
|
US7310796B2
(en)
*
|
2004-08-27 |
2007-12-18 |
Applied Materials, Israel, Ltd. |
System and method for simulating an aerial image
|
US7246343B2
(en)
*
|
2004-09-01 |
2007-07-17 |
Invarium, Inc. |
Method for correcting position-dependent distortions in patterning of integrated circuits
|
US7379170B2
(en)
*
|
2005-05-02 |
2008-05-27 |
Invarium, Inc. |
Apparatus and method for characterizing an image system in lithography projection tool
|
JP4336671B2
(ja)
|
2005-07-15 |
2009-09-30 |
キヤノン株式会社 |
露光パラメータの決定をコンピュータに実行させるプログラム、露光パラメータを決定する決定方法、露光方法及びデバイス製造方法。
|
DE602005019711D1
(de)
|
2005-07-15 |
2010-04-15 |
Imec |
Methode und System für einen verbesserten lithographischen Prozess
|
JP4701030B2
(ja)
*
|
2005-07-22 |
2011-06-15 |
キヤノン株式会社 |
露光装置、露光パラメータを設定する設定方法、露光方法、デバイス製造方法及びプログラム
|
US7313777B1
(en)
*
|
2005-08-01 |
2007-12-25 |
Advanced Micro Devices, Inc. |
Layout verification based on probability of printing fault
|
US20070038585A1
(en)
*
|
2005-08-15 |
2007-02-15 |
Thommes Family, Llc |
Method for simulating a response to a stimulus
|
US7788628B1
(en)
*
|
2006-01-11 |
2010-08-31 |
Olambda, Inc. |
Computational efficiency in photolithographic process simulation
|
KR101315237B1
(ko)
*
|
2006-02-01 |
2013-10-07 |
어플라이드 머티리얼즈 이스라엘 리미티드 |
패턴의 파라미터에서의 변화를 평가하는 방법 및 시스템
|
US7836423B2
(en)
*
|
2006-03-08 |
2010-11-16 |
Mentor Graphics Corporation |
Sum of coherent systems (SOCS) approximation based on object information
|
US20070253637A1
(en)
*
|
2006-03-08 |
2007-11-01 |
Mentor Graphics Corp. |
Image intensity calculation using a sectored source map
|
US8238644B2
(en)
*
|
2006-03-17 |
2012-08-07 |
International Business Machines Corporation |
Fast method to model photoresist images using focus blur and resist blur
|
US7954072B2
(en)
*
|
2006-05-15 |
2011-05-31 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
Model import for electronic design automation
|
JP5235322B2
(ja)
*
|
2006-07-12 |
2013-07-10 |
キヤノン株式会社 |
原版データ作成方法及び原版データ作成プログラム
|
KR100818999B1
(ko)
*
|
2006-10-09 |
2008-04-02 |
삼성전자주식회사 |
마스크 제작 방법
|
US8576377B2
(en)
*
|
2006-12-28 |
2013-11-05 |
Asml Netherlands B.V. |
Lithographic apparatus and device manufacturing method
|
JP5038743B2
(ja)
*
|
2007-03-05 |
2012-10-03 |
株式会社東芝 |
リソグラフィシミュレーション方法及びプログラム
|
US7564545B2
(en)
*
|
2007-03-15 |
2009-07-21 |
Kla-Tencor Technologies Corp. |
Inspection methods and systems for lithographic masks
|
US8975599B2
(en)
*
|
2007-05-03 |
2015-03-10 |
Asml Netherlands B.V. |
Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus
|
US7974728B2
(en)
*
|
2007-05-04 |
2011-07-05 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
System for extraction of key process parameters from fault detection classification to enable wafer prediction
|
DE102007033243A1
(de)
*
|
2007-07-12 |
2009-01-15 |
Carl Zeiss Sms Gmbh |
Verfahren und Anordnung zur Analyse einer Gruppe von Photolithographiemasken
|
JP4484909B2
(ja)
*
|
2007-07-24 |
2010-06-16 |
キヤノン株式会社 |
原版データ作成方法、原版作成方法、露光方法および原版データ作成プログラム
|
JP2009071125A
(ja)
*
|
2007-09-14 |
2009-04-02 |
Canon Inc |
露光条件を決定する方法及びプログラム
|
US7831954B2
(en)
*
|
2007-09-25 |
2010-11-09 |
Synopsys, Inc. |
Flash-based updating techniques for high-accuracy high efficiency mask synthesis
|
JP4402145B2
(ja)
*
|
2007-10-03 |
2010-01-20 |
キヤノン株式会社 |
算出方法、生成方法、プログラム、露光方法及び原版作成方法
|
NL1036189A1
(nl)
*
|
2007-12-05 |
2009-06-08 |
Brion Tech Inc |
Methods and System for Lithography Process Window Simulation.
|
JP2009192811A
(ja)
*
|
2008-02-14 |
2009-08-27 |
Toshiba Corp |
リソグラフィーシミュレーション方法およびプログラム
|
US8230369B2
(en)
|
2008-02-27 |
2012-07-24 |
Kabushiki Kaisha Toshiba |
Simulation method and simulation program
|
JP2009204823A
(ja)
*
|
2008-02-27 |
2009-09-10 |
Toshiba Corp |
シミュレーション方法及びシミュレーション用のプログラム
|
JP5086926B2
(ja)
*
|
2008-07-15 |
2012-11-28 |
キヤノン株式会社 |
算出方法、プログラム及び露光方法
|
JP5159501B2
(ja)
*
|
2008-08-06 |
2013-03-06 |
キヤノン株式会社 |
原版データ作成プログラム、原版データ作成方法、原版作成方法、露光方法及びデバイス製造方法
|
NL2003654A
(en)
|
2008-11-06 |
2010-05-10 |
Brion Tech Inc |
Methods and system for lithography calibration.
|
NL2003718A
(en)
|
2008-11-10 |
2010-05-11 |
Brion Tech Inc |
Methods and system for model-based generic matching and tuning.
|
NL2003716A
(en)
|
2008-11-24 |
2010-05-26 |
Brion Tech Inc |
Harmonic resist model for use in a lithographic apparatus and a device manufacturing method.
|
JP4826637B2
(ja)
*
|
2009-01-29 |
2011-11-30 |
ブラザー工業株式会社 |
画像処理装置およびプログラム
|
JP2010178047A
(ja)
|
2009-01-29 |
2010-08-12 |
Brother Ind Ltd |
画像処理装置およびプログラム
|
WO2010117626A2
(en)
*
|
2009-03-31 |
2010-10-14 |
Christophe Pierrat |
Lithography modelling and applications
|
DE102010045135B4
(de)
*
|
2010-09-10 |
2021-03-18 |
Carl Zeiss Meditec Ag |
Verfahren zur Ermittlung eines Platzierungsfehlers eines Strukturelements auf einer Maske, Verfahren zur Simulation eines Luftbildes aus Struktur-Vorgaben einer Maske und Positionsmessvorrichtung
|
US20120212722A1
(en)
|
2011-02-21 |
2012-08-23 |
Nikon Corporation |
Fast Illumination Simulator Based on a Calibrated Flexible Point Spread Function
|
US8699003B2
(en)
*
|
2011-06-07 |
2014-04-15 |
Nanya Technology Corp. |
Method for determining illumination source with optimized depth of focus
|
JP5835968B2
(ja)
*
|
2011-07-05 |
2015-12-24 |
キヤノン株式会社 |
決定方法、プログラム及び露光方法
|
NL2009056A
(en)
*
|
2011-08-09 |
2013-02-12 |
Asml Netherlands Bv |
A lithographic model for 3d topographic wafers.
|
JP6238687B2
(ja)
*
|
2013-11-12 |
2017-11-29 |
キヤノン株式会社 |
マスクパターン作成方法、光学像の計算方法
|
US9262820B2
(en)
*
|
2014-05-19 |
2016-02-16 |
United Microelectronics Corporation |
Method and apparatus for integrated circuit design
|
US10001698B2
(en)
*
|
2015-12-15 |
2018-06-19 |
Taiwan Semiconductor Manufacturing Company, Ltd |
Layout hierachical structure defined in polar coordinate
|
US10671786B2
(en)
|
2016-11-29 |
2020-06-02 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
Method of modeling a mask by taking into account of mask pattern edge interaction
|
US10466586B2
(en)
|
2016-11-29 |
2019-11-05 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
Method of modeling a mask having patterns with arbitrary angles
|
CN109164683B
(zh)
*
|
2018-09-30 |
2020-09-01 |
墨研计算科学(南京)有限公司 |
基于掩模版图形处理的光强分布快速确定方法及装置
|
DE102019215800A1
(de)
*
|
2019-10-15 |
2021-04-15 |
Carl Zeiss Smt Gmbh |
Verfahren zur Bestimmung einer optischen Phasendifferenz von Messlicht einer Messlichtwellenlänge über eine Fläche eines strukturierten Objektes
|
CN113589643B
(zh)
*
|
2021-07-09 |
2024-05-17 |
中国科学院上海光学精密机械研究所 |
基于调制区块叠加合成掩模图形的曲线型逆向光刻方法
|