DE60034642D1 - Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren - Google Patents

Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren

Info

Publication number
DE60034642D1
DE60034642D1 DE60034642T DE60034642T DE60034642D1 DE 60034642 D1 DE60034642 D1 DE 60034642D1 DE 60034642 T DE60034642 T DE 60034642T DE 60034642 T DE60034642 T DE 60034642T DE 60034642 D1 DE60034642 D1 DE 60034642D1
Authority
DE
Germany
Prior art keywords
piezoelectric
manufacturing
electrostrictive device
electrostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60034642T
Other languages
English (en)
Other versions
DE60034642T2 (de
Inventor
Yukihisa Takeuchi
Tsutomu Nanataki
Koji Ikeda
Koji Kimura
Kazuyoshi Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE60034642D1 publication Critical patent/DE60034642D1/de
Publication of DE60034642T2 publication Critical patent/DE60034642T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
DE60034642T 1999-10-01 2000-09-29 Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren Expired - Lifetime DE60034642T2 (de)

Applications Claiming Priority (14)

Application Number Priority Date Filing Date Title
JP28152299 1999-10-01
JP28152299 1999-10-01
JP30784499 1999-10-28
JP30784499 1999-10-28
JP32619599 1999-11-16
JP32619599 1999-11-16
JP37196799 1999-12-27
JP37196799 1999-12-27
JP2000013576 2000-01-21
JP2000013576 2000-01-21
JP2000015123 2000-01-24
JP2000015123 2000-01-24
JP2000056434 2000-03-01
JP2000056434 2000-03-01

Publications (2)

Publication Number Publication Date
DE60034642D1 true DE60034642D1 (de) 2007-06-14
DE60034642T2 DE60034642T2 (de) 2008-01-31

Family

ID=27566809

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60034642T Expired - Lifetime DE60034642T2 (de) 1999-10-01 2000-09-29 Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren

Country Status (3)

Country Link
US (2) US6498419B1 (de)
EP (1) EP1091424B1 (de)
DE (1) DE60034642T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6329740B1 (en) 1998-12-28 2001-12-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and production method thereof
JP3436735B2 (ja) * 1999-10-01 2003-08-18 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
JP4058223B2 (ja) * 1999-10-01 2008-03-05 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
JP4015820B2 (ja) 2001-04-11 2007-11-28 日本碍子株式会社 配線基板及びその製造方法
JP4033643B2 (ja) 2001-06-18 2008-01-16 日本碍子株式会社 圧電／電歪デバイスおよびその製造方法
JP2003046154A (ja) * 2001-07-30 2003-02-14 Ngk Insulators Ltd 圧電／電歪素子、圧電／電歪デバイスおよびそれらの製造方法
US20030020377A1 (en) 2001-07-30 2003-01-30 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element and piezoelectric/electrostrictive device and production method thereof
US6807030B1 (en) * 2001-12-18 2004-10-19 Western Digital (Fremont), Inc. Enclosed piezoelectric microactuators coupled between head and suspension
WO2003105131A1 (en) * 2002-06-05 2003-12-18 Sae Magnetics (H.K.) Ltd. A system and method for preventing operational and manufacturing imperfections in piezoelectric micro-actuators
JP2004363489A (ja) * 2003-06-06 2004-12-24 Ngk Insulators Ltd 圧電／電歪素子、圧電／電歪素子の製造方法、圧電／電歪デバイス及び圧電／電歪デバイスの製造方法
WO2005104257A1 (en) * 2004-04-23 2005-11-03 Agency For Science, Technology And Research Micro-electromechanical device
DE112005002645T5 (de) * 2004-10-26 2009-03-05 Koichi Hirama Komplexer Resonanzkreis und Schwingkreis, der denselben Verwendet
JP2007228782A (ja) * 2006-01-24 2007-09-06 Ngk Insulators Ltd 圧電／電歪デバイス
US8578761B2 (en) * 2008-03-26 2013-11-12 Denso Corporation Concentration sensor device and concentration detecting method
US8085508B2 (en) 2008-03-28 2011-12-27 Hitachi Global Storage Technologies Netherlands B.V. System, method and apparatus for flexure-integrated microactuator
US8418934B2 (en) 2008-08-26 2013-04-16 General Electric Company System and method for miniaturization of synthetic jets
CN106461393B (zh) * 2014-06-27 2020-01-03 索尼公司 陀螺仪传感器和电子装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB789336A (en) * 1954-12-27 1958-01-22 Erie Resistor Corp Method of making thin flat electroded ceramic elements
DE3332949A1 (de) 1983-09-13 1985-04-04 Finnigan MAT GmbH, 2800 Bremen Vorrichtung zur einstellung von spaltweiten bei spektrometern
DE3424005A1 (de) * 1984-06-29 1986-01-02 Robert Bosch Gmbh, 7000 Stuttgart Ausloesevorrichtung fuer rueckhaltsysteme in kraftfahrzeugen
JPS6364640A (ja) 1986-09-06 1988-03-23 Olympus Optical Co Ltd アクチユエ−タ
US5166571A (en) * 1987-08-28 1992-11-24 Nec Home Electronics, Ltd. Vibration gyro having an H-shaped vibrator
DE69223096T2 (de) 1991-07-18 1998-05-28 Ngk Insulators Ltd Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid
US5500777A (en) 1993-05-19 1996-03-19 Matsushita Electric Industrial Co., Ltd. Magnetic head drive which uses independently controlled piezo-electric elements
JP3162584B2 (ja) * 1994-02-14 2001-05-08 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
US6049158A (en) * 1994-02-14 2000-04-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same
US5708320A (en) * 1994-10-28 1998-01-13 Alps Electric Co., Ltd Vibratory gyroscope
JP3512968B2 (ja) * 1996-04-11 2004-03-31 株式会社日本自動車部品総合研究所 半導体装置の製造方法
CN1145957C (zh) 1996-10-31 2004-04-14 Tdk株式会社 读/写头、读/写头定位机构和读/写系统
JPH10136665A (ja) 1996-10-31 1998-05-22 Tdk Corp 圧電アクチュエータ
US6018212A (en) 1996-11-26 2000-01-25 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
JPH10221084A (ja) * 1997-02-06 1998-08-21 Aisin Seiki Co Ltd 振動式角速度センサ
JPH1126834A (ja) * 1997-07-04 1999-01-29 Toshio Fukuda Ｐｚｔ薄膜バイモルフ形の平行平板構造体、及びその製造方法
JPH11344341A (ja) * 1998-05-29 1999-12-14 Tokai Rika Co Ltd 平行平板型振動ジャイロ及び平行平板型振動ジャイロ装置
JP2000002539A (ja) * 1998-06-15 2000-01-07 Tokai Rika Co Ltd 平行平板型振動ジャイロ及び平行平板型振動ジャイロ装置

Also Published As

Publication number Publication date
US6566789B2 (en) 2003-05-20
EP1091424A3 (de) 2004-10-06
DE60034642T2 (de) 2008-01-31
US20030001455A1 (en) 2003-01-02
EP1091424A2 (de) 2001-04-11
EP1091424B1 (de) 2007-05-02
US6498419B1 (en) 2002-12-24

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