DE60226549D1 - Trapezförmiges piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren - Google Patents

Trapezförmiges piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren

Info

Publication number
DE60226549D1
DE60226549D1 DE60226549T DE60226549T DE60226549D1 DE 60226549 D1 DE60226549 D1 DE 60226549D1 DE 60226549 T DE60226549 T DE 60226549T DE 60226549 T DE60226549 T DE 60226549T DE 60226549 D1 DE60226549 D1 DE 60226549D1
Authority
DE
Germany
Prior art keywords
manufacturing
electrostrictive device
trapezoidal piezoelectric
trapezoidal
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60226549T
Other languages
English (en)
Inventor
Masahiko Namerikawa
Kazuyoshi Shibata
Masaki Iwamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE60226549D1 publication Critical patent/DE60226549D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/501—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane parallel to the stacking direction, e.g. polygonal or trapezoidal in side view
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
DE60226549T 2001-07-30 2002-07-30 Trapezförmiges piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren Expired - Fee Related DE60226549D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001229870A JP2003046154A (ja) 2001-07-30 2001-07-30 圧電／電歪素子、圧電／電歪デバイスおよびそれらの製造方法

Publications (1)

Publication Number Publication Date
DE60226549D1 true DE60226549D1 (de) 2008-06-26

Family

ID=19062164

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60226549T Expired - Fee Related DE60226549D1 (de) 2001-07-30 2002-07-30 Trapezförmiges piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren

Country Status (3)

Country Link
EP (1) EP1283553B1 (de)
JP (1) JP2003046154A (de)
DE (1) DE60226549D1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4878133B2 (ja) * 2004-09-13 2012-02-15 株式会社デンソー 圧電アクチュエータ
JP4795748B2 (ja) * 2004-09-13 2011-10-19 株式会社デンソー 圧電アクチュエータ
US7332851B2 (en) 2004-09-29 2008-02-19 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film type device and method of manufacturing the same
EP1796183A4 (de) * 2004-09-29 2010-12-08 Ngk Insulators Ltd Piezoelektrizitäts-/elektrostriktionsfilmelement und herstellungsverfahren dafür
JP2006210423A (ja) * 2005-01-25 2006-08-10 Denso Corp 積層型圧電素子及びその製造方法
JP5319195B2 (ja) * 2008-07-29 2013-10-16 京セラ株式会社 振動体
JP5409198B2 (ja) * 2008-09-25 2014-02-05 京セラ株式会社 振動体
JP5361635B2 (ja) * 2008-09-25 2013-12-04 京セラ株式会社 振動体
JP2010171360A (ja) * 2008-12-24 2010-08-05 Kyocera Corp 積層型圧電素子およびその製法ならびに振動体
JP2010199272A (ja) * 2009-02-25 2010-09-09 Kyocera Corp 積層型圧電素子およびその製法ならびに振動体
KR101601748B1 (ko) * 2012-05-14 2016-03-09 쿄세라 코포레이션 압전 액추에이터, 압전 진동 장치 및 휴대 단말
CN106576208B (zh) * 2014-07-30 2019-06-11 京瓷株式会社 压电元件、音响产生器、音响产生装置、电子设备
JP6418962B2 (ja) * 2015-01-28 2018-11-07 京セラ株式会社 積層型圧電素子、音響発生器、音響発生装置及び電子機器
JP6464049B2 (ja) * 2015-06-30 2019-02-06 富士フイルム株式会社 積層構造体、圧電素子および圧電素子の製造方法
CN113140668B (zh) * 2020-01-19 2024-05-28 北京小米移动软件有限公司 压电组件及制作方法、屏幕部件和移动终端
CN113140669B (zh) * 2020-01-19 2024-05-24 北京小米移动软件有限公司 压电组件及制作方法、屏幕部件和移动终端

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4632856A (en) * 1985-02-06 1986-12-30 Marcus Michael A Multilayer thin film electrical devices free of adhesive
JPS61182284A (ja) * 1985-02-08 1986-08-14 Nec Corp 電歪効果素子
JPH066374B2 (ja) * 1987-05-27 1994-01-26 株式会社トーキン 積層形圧電変位素子
DE19732571A1 (de) * 1996-12-13 1998-07-02 Rolf Hopf Verjüngte Piezoaktorvorrichtung
US6498419B1 (en) * 1999-10-01 2002-12-24 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device having mutually opposing end surfaces and method of manufacturing the same

Also Published As

Publication number Publication date
EP1283553A2 (de) 2003-02-12
EP1283553B1 (de) 2008-05-14
JP2003046154A (ja) 2003-02-14
EP1283553A3 (de) 2005-06-01

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee