DE60035009D1 - Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren - Google Patents

Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren

Info

Publication number
DE60035009D1
DE60035009D1 DE60035009T DE60035009T DE60035009D1 DE 60035009 D1 DE60035009 D1 DE 60035009D1 DE 60035009 T DE60035009 T DE 60035009T DE 60035009 T DE60035009 T DE 60035009T DE 60035009 D1 DE60035009 D1 DE 60035009D1
Authority
DE
Germany
Prior art keywords
piezoelectric
manufacturing
electrostrictive device
electrostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60035009T
Other languages
English (en)
Inventor
Yukihisa Takeuchi
Tsutomu Nanataki
Koji Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000067781A external-priority patent/JP3851485B2/ja
Priority claimed from JP2000089957A external-priority patent/JP3436725B2/ja
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE60035009D1 publication Critical patent/DE60035009D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/501—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane parallel to the stacking direction, e.g. polygonal or trapezoidal in side view
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
DE60035009T 1999-10-01 2000-09-29 Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren Expired - Lifetime DE60035009D1 (de)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP28152299 1999-10-01
JP30784499 1999-10-28
JP32619599 1999-11-16
JP37196799 1999-12-27
JP2000013576 2000-01-21
JP2000015123 2000-01-24
JP2000056434 2000-03-01
JP2000067781A JP3851485B2 (ja) 1999-10-01 2000-03-10 圧電／電歪デバイス及びその製造方法
JP2000089957A JP3436725B2 (ja) 1999-10-01 2000-03-28 圧電／電歪デバイス及びその製造方法

Publications (1)

Publication Number Publication Date
DE60035009D1 true DE60035009D1 (de) 2007-07-12

Family

ID=27577720

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60035009T Expired - Lifetime DE60035009D1 (de) 1999-10-01 2000-09-29 Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren

Country Status (3)

Country Link
US (2) US6404109B1 (de)
EP (1) EP1089349B1 (de)
DE (1) DE60035009D1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6329740B1 (en) 1998-12-28 2001-12-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and production method thereof
US6915547B2 (en) 1999-10-01 2005-07-12 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of manufacturing same
JP4058223B2 (ja) * 1999-10-01 2008-03-05 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
EP1089357B1 (de) * 1999-10-01 2007-08-15 Ngk Insulators, Ltd. Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
US7164221B1 (en) * 1999-10-01 2007-01-16 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of manufacturing same
JP3436735B2 (ja) 1999-10-01 2003-08-18 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
DE60103445T2 (de) * 2000-03-29 2005-06-02 Nec Tokin Ceramics Corp. Vielschicht-Piezoaktor mit Elektroden mit verstärkter Leitfähigkeit
US7345406B2 (en) * 2001-01-18 2008-03-18 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device
JP4007767B2 (ja) * 2001-01-18 2007-11-14 日本碍子株式会社 圧電／電歪デバイスおよびその製造方法
JP4258126B2 (ja) * 2001-02-27 2009-04-30 Ｔｄｋ株式会社 微小位置決め用アクチュエータ付きヘッドスライダ及び該スライダの製造方法
JP4015820B2 (ja) 2001-04-11 2007-11-28 日本碍子株式会社 配線基板及びその製造方法
US6794723B2 (en) * 2001-09-12 2004-09-21 Ngk Insulators, Ltd. Matrix type piezoelectric/electrostrictive device and manufacturing method thereof
US7596841B2 (en) * 2004-04-23 2009-10-06 Agency For Science Technology And Research Micro-electromechanical devices and methods of fabricating thereof
JP4963159B2 (ja) * 2004-11-19 2012-06-27 日本碍子株式会社 圧電／電歪デバイス
US8085508B2 (en) * 2008-03-28 2011-12-27 Hitachi Global Storage Technologies Netherlands B.V. System, method and apparatus for flexure-integrated microactuator
US8348200B2 (en) * 2009-12-23 2013-01-08 Lockheed Martin Corporation Synthetic jet actuator system and related methods
US10607642B2 (en) 2013-03-18 2020-03-31 Magnecomp Corporation Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension
US11205449B2 (en) 2013-03-18 2021-12-21 Magnecomp Corporation Multi-layer PZT microacuator with active PZT constraining layers for a DSA suspension
US9117468B1 (en) 2013-03-18 2015-08-25 Magnecomp Corporation Hard drive suspension microactuator with restraining layer for control of bending
US9741376B1 (en) 2013-03-18 2017-08-22 Magnecomp Corporation Multi-layer PZT microactuator having a poled but inactive PZT constraining layer
US9330698B1 (en) 2013-03-18 2016-05-03 Magnecomp Corporation DSA suspension having multi-layer PZT microactuator with active PZT constraining layers
US10128431B1 (en) 2015-06-20 2018-11-13 Magnecomp Corporation Method of manufacturing a multi-layer PZT microactuator using wafer-level processing

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GB2050671B (en) * 1979-06-09 1983-08-17 Sony Corp Rotary transducer head assemblies
DE3424005A1 (de) * 1984-06-29 1986-01-02 Robert Bosch Gmbh, 7000 Stuttgart Ausloesevorrichtung fuer rueckhaltsysteme in kraftfahrzeugen
JPS6364640A (ja) 1986-09-06 1988-03-23 Olympus Optical Co Ltd アクチユエ−タ
DE3805631A1 (de) 1988-02-24 1989-09-07 Teldix Gmbh Drehschwingungsantrieb
JPH02119278A (ja) 1988-10-28 1990-05-07 Ricoh Co Ltd バイモルフ型圧電アクチユエータ
EP0526048B1 (de) 1991-07-18 1997-11-12 Ngk Insulators, Ltd. Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid
JP3162584B2 (ja) * 1994-02-14 2001-05-08 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
US6049158A (en) 1994-02-14 2000-04-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same
US5708320A (en) 1994-10-28 1998-01-13 Alps Electric Co., Ltd Vibratory gyroscope
US5693997A (en) 1996-02-09 1997-12-02 Lucent Technologies Inc. Non-tilting plate actuator for use in a micropositioning device
JPH10136665A (ja) 1996-10-31 1998-05-22 Tdk Corp 圧電アクチュエータ
JPH10221084A (ja) 1997-02-06 1998-08-21 Aisin Seiki Co Ltd 振動式角速度センサ
US6111967A (en) * 1997-05-09 2000-08-29 Face, Jr.; Samuel A Multi-segmented high deformation piezoelectric array
JPH1126834A (ja) * 1997-07-04 1999-01-29 Toshio Fukuda Ｐｚｔ薄膜バイモルフ形の平行平板構造体、及びその製造方法
JPH1151959A (ja) 1997-08-06 1999-02-26 Murata Mfg Co Ltd 圧電振動子
JPH11344341A (ja) 1998-05-29 1999-12-14 Tokai Rika Co Ltd 平行平板型振動ジャイロ及び平行平板型振動ジャイロ装置
JP2000002539A (ja) * 1998-06-15 2000-01-07 Tokai Rika Co Ltd 平行平板型振動ジャイロ及び平行平板型振動ジャイロ装置
US6329740B1 (en) 1998-12-28 2001-12-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and production method thereof
US6715192B2 (en) 1998-12-28 2004-04-06 Ngk Insulators, Ltd. Method for manufacturing a piezoelectric/electrostrictive device
US6335586B1 (en) 1998-12-28 2002-01-01 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and production method thereof
US6342751B1 (en) 1998-12-28 2002-01-29 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and production method thereof
JP3845544B2 (ja) 1999-10-01 2006-11-15 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
JP3436727B2 (ja) 1999-10-01 2003-08-18 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
JP3466550B2 (ja) 1999-10-01 2003-11-10 日本碍子株式会社 圧電／電歪デバイス
US6333681B1 (en) 1999-10-01 2001-12-25 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device
JP3436735B2 (ja) 1999-10-01 2003-08-18 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
US6323582B1 (en) 1999-10-01 2001-11-27 Ngk Insulators, Ltd. Piezoelectric/Electrostrictive device
JP3845543B2 (ja) 1999-10-01 2006-11-15 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
US6351056B1 (en) 1999-10-01 2002-02-26 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device having mutually opposing thin plate portions
JP4058223B2 (ja) 1999-10-01 2008-03-05 日本碍子株式会社 圧電／電歪デバイス及びその製造方法

Also Published As

Publication number Publication date
EP1089349A2 (de) 2001-04-04
EP1089349A3 (de) 2004-09-29
EP1089349B1 (de) 2007-05-30
US6404109B1 (en) 2002-06-11
US6472799B2 (en) 2002-10-29
US20020101136A1 (en) 2002-08-01

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8332 No legal effect for de