DE60027821D1 - Pendelschieber - Google Patents

Pendelschieber

Info

Publication number
DE60027821D1
DE60027821D1 DE60027821T DE60027821T DE60027821D1 DE 60027821 D1 DE60027821 D1 DE 60027821D1 DE 60027821 T DE60027821 T DE 60027821T DE 60027821 T DE60027821 T DE 60027821T DE 60027821 D1 DE60027821 D1 DE 60027821D1
Authority
DE
Germany
Prior art keywords
pendulum slide
pendulum
slide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60027821T
Other languages
English (en)
Other versions
DE60027821T2 (de
Inventor
Richard W Olmsted
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Application granted granted Critical
Publication of DE60027821D1 publication Critical patent/DE60027821D1/de
Publication of DE60027821T2 publication Critical patent/DE60027821T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/53—Mechanical actuating means with toothed gearing
    • F16K31/535—Mechanical actuating means with toothed gearing for rotating valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/041—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves
    • F16K31/043—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanically-Actuated Valves (AREA)
  • Sliding Valves (AREA)
DE60027821T 1999-06-23 2000-06-15 Pendelschieber Expired - Lifetime DE60027821T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/339,084 US6089537A (en) 1999-06-23 1999-06-23 Pendulum valve assembly
US339084 1999-06-23

Publications (2)

Publication Number Publication Date
DE60027821D1 true DE60027821D1 (de) 2006-06-14
DE60027821T2 DE60027821T2 (de) 2006-12-21

Family

ID=23327424

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60027821T Expired - Lifetime DE60027821T2 (de) 1999-06-23 2000-06-15 Pendelschieber

Country Status (3)

Country Link
US (1) US6089537A (de)
EP (1) EP1063457B1 (de)
DE (1) DE60027821T2 (de)

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* Cited by examiner, † Cited by third party
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JP4225647B2 (ja) * 1999-09-08 2009-02-18 キヤノンアネルバ株式会社 ゲートバルブ
JP2001165334A (ja) * 1999-12-06 2001-06-22 Smc Corp スイングドアーゲートバルブ
US6260490B1 (en) * 2000-02-16 2001-07-17 Sure Alloy Steel Corporation Burner isolation valve for pulverized fuel systems
US6328051B1 (en) * 2000-06-28 2001-12-11 Mks Instruments, Inc. Dual pendulum valve assembly
US6409149B1 (en) * 2000-06-28 2002-06-25 Mks Instruments, Inc. Dual pendulum valve assembly with valve seat cover
JP3588637B2 (ja) 2001-03-28 2004-11-17 株式会社ブイテックス 流量制御バルブ
US7004453B1 (en) * 2001-04-25 2006-02-28 Mykrolis Corporation Pendulum valve with a full range of position control
EP1470351B1 (de) * 2002-01-31 2007-02-28 Dupont Dow Elastomers L.L.C. Dichtungsanordnung für ein schieberventil
DE10204030A1 (de) * 2002-01-31 2003-08-14 Georg Fischer Wavin Ag Subinge Drehschieber
KR100482980B1 (ko) * 2002-09-13 2005-04-19 가부시키가이샤 브이텍스 게이트 밸브
US7146677B2 (en) * 2002-11-19 2006-12-12 Ivan Litomisky Energy saving vacuum system for particle, mist, and fume collection
US6776394B2 (en) * 2002-12-30 2004-08-17 Mks Instruments, Inc. Pendulum valve assembly
US6863256B2 (en) * 2003-02-20 2005-03-08 Mks Instruments, Inc. Seal ring for pendulum valve assembly
JP3837391B2 (ja) * 2003-03-24 2006-10-25 Ｓｍｃ株式会社 ゲートバルブ
US7270311B1 (en) * 2003-07-14 2007-09-18 Brenes Arthur J Pendulum gate valve
US7032882B2 (en) 2003-09-29 2006-04-25 Mks Instruments, Inc. Valve assembly having novel flow characteristics
US7422653B2 (en) * 2004-07-13 2008-09-09 Applied Materials, Inc. Single-sided inflatable vertical slit valve
US7140847B2 (en) * 2004-08-11 2006-11-28 The Boc Group, Inc. Integrated high vacuum pumping system
US7278444B2 (en) * 2005-02-22 2007-10-09 Mks Instruments, Inc. Valve assembly having improved pump-down performance
JP4079157B2 (ja) 2005-04-12 2008-04-23 東京エレクトロン株式会社 ゲートバルブ装置及び処理システム
US7281700B2 (en) 2005-04-12 2007-10-16 Tokyo Electron Limited Gate valve apparatus for vacuum processing system
US7644930B2 (en) * 2005-04-20 2010-01-12 Black & Decker Inc. Mechanism for providing residual thrust load on chuck actuating screw
US7396001B2 (en) * 2005-12-20 2008-07-08 Vat Holding Ag Valve for essentially gastight closing a flow path
US7802772B2 (en) * 2005-12-20 2010-09-28 Vat Holding Ag Pendulum and slide gate vacuum valve
US7500649B2 (en) * 2006-05-05 2009-03-10 Vat Holding Ag Vacuum valve drive
JP5171137B2 (ja) * 2006-07-18 2013-03-27 ヴィ・エイ・ティー ホールディング アクチェンゲゼルシャフト シャトルバルブ
DE102007030006B4 (de) 2006-07-19 2009-12-17 Vat Holding Ag Vakuumventil
US8043430B2 (en) * 2006-12-20 2011-10-25 Lam Research Corporation Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamber
KR100795124B1 (ko) 2007-01-04 2008-01-21 김재곤 쓰레기일괄처리시스템의 공기흡입장치
FR2915550B1 (fr) * 2007-04-27 2012-05-11 Snecma Vanne a clapet pour un systeme de refroidissement dans une turbomachine
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JP5324827B2 (ja) * 2007-06-08 2013-10-23 ヴィ・エイ・ティー ホールディング アクチェンゲゼルシャフト 脚部要素を有する真空ゲートバルブ
US7762526B2 (en) * 2007-08-27 2010-07-27 Nor-Cal Products, Inc. Pendulum valve having independently and rapidly controllable theta-and z-axis motion
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US20090218535A1 (en) * 2008-02-27 2009-09-03 Andres Pasko Flow controllers for fluid circuits
FR2933127B1 (fr) * 2008-06-25 2015-04-24 Snecma Dispositif de prelevement d'air de refroidissement dans une turbomachine
FR2933128B1 (fr) * 2008-06-25 2010-09-17 Snecma Dispositif de prelevement d'air de refroidissement dans une turbomachine
EP2146122A1 (de) * 2008-07-18 2010-01-20 VAT Holding AG Vakuumventil und Verschlussteller für ein Vakuumventil
US8727311B2 (en) * 2008-09-05 2014-05-20 Vat Holding Ag Vacuum valve with gas-tight shaft penetration
FR2937679B1 (fr) * 2008-10-24 2010-12-03 Snecma Dispositif de prelevement d'air de refroidissement dans une turbomachine
EP2224153A1 (de) 2009-02-25 2010-09-01 VAT Holding AG Vakuumdoppelschieberventil
US20110006236A1 (en) * 2009-07-08 2011-01-13 Confluence Solar, Incorporated Retractable and expandable water cooled valve gate useful for sealing a hot processing chamber
US8434511B2 (en) * 2009-07-08 2013-05-07 Gt Advanced Cz Llc Retractable and expandable water cooled valve gate useful for sealing a hot processing chamber
US20110006235A1 (en) * 2009-07-08 2011-01-13 Confluence Solar, Inc. Retractable and expandable valve gate
EP2287501A1 (de) 2009-08-19 2011-02-23 VAT Holding AG Ventil zum im Wesentlichen gasdichten Unterbrechen eines Fliesswegs
CN101691891B (zh) * 2009-10-01 2011-04-06 梁敬喜 防盗速旋阀
CN101956861B (zh) * 2010-05-06 2012-02-29 东莞宏威数码机械有限公司 密封腔体阀板驱动机构
EP2420709A1 (de) 2010-08-16 2012-02-22 VAT Holding AG Vakuumventil und Verschlussglied zum gasdichten Schliessen eines Fliesswegs mittels einer Linearbewegung
US9348339B2 (en) * 2010-09-29 2016-05-24 Mks Instruments, Inc. Method and apparatus for multiple-channel pulse gas delivery system
US8997686B2 (en) 2010-09-29 2015-04-07 Mks Instruments, Inc. System for and method of fast pulse gas delivery
US10126760B2 (en) 2011-02-25 2018-11-13 Mks Instruments, Inc. System for and method of fast pulse gas delivery
US10031531B2 (en) 2011-02-25 2018-07-24 Mks Instruments, Inc. System for and method of multiple channel fast pulse gas delivery
US10353408B2 (en) 2011-02-25 2019-07-16 Mks Instruments, Inc. System for and method of fast pulse gas delivery
JP5337185B2 (ja) * 2011-03-11 2013-11-06 株式会社東芝 圧力制御装置
CH704728A2 (de) 2011-03-18 2012-09-28 Vat Holding Ag Vakuumventil zum gasdichten Schliessen eines Fliesswegs mittels einer Linearbewegung eines Verschlussglieds.
US8833383B2 (en) 2011-07-20 2014-09-16 Ferrotec (Usa) Corporation Multi-vane throttle valve
EP2551564A1 (de) 2011-07-28 2013-01-30 VAT Holding AG Ventil zum im Wesentlichen gasdichten Unterbrechen eines Fliesswegs
EP2551565A1 (de) 2011-07-28 2013-01-30 VAT Holding AG Vakuumventil und Verschlussglied zum gasdichten Schliessen eines Fliesswegs mittels einer Linearbewegung
KR101358801B1 (ko) * 2011-10-24 2014-02-07 프리시스 주식회사 게이트 밸브
US9267605B2 (en) 2011-11-07 2016-02-23 Lam Research Corporation Pressure control valve assembly of plasma processing chamber and rapid alternating process
WO2014046987A1 (en) * 2012-09-20 2014-03-27 Zodiac Pool Systems, Inc. A pool-water heater manifold, a pool-water heater and a method of operating a|pool-water heating system
JP2014126183A (ja) * 2012-12-27 2014-07-07 Canon Anelva Corp コンダクタンスバルブ
EP2749798B1 (de) 2012-12-27 2016-03-02 VAT Holding AG Vakuumschieberventil
US9133960B2 (en) 2013-01-29 2015-09-15 Mks Instruments, Inc. Fluid control valves
EP2781813A1 (de) 2013-03-21 2014-09-24 VAT Holding AG Vakuumventil
US9835330B2 (en) * 2013-05-30 2017-12-05 Field Controls Llc Linear slide damper system
FR3014868B1 (fr) * 2013-12-12 2017-12-08 Veolia Proprete Tambour de pre-compostage
EP2913573A1 (de) 2014-02-26 2015-09-02 VAT Holding AG Vakuumventil
JP6507516B2 (ja) * 2014-08-06 2019-05-08 株式会社島津製作所 真空バルブ
EP2985497B1 (de) 2014-08-11 2017-10-11 VAT Holding AG Verschlusselement für ein Vakuumventil mit abgepresster, aufvulkanisierter Dichtung
US9638335B2 (en) 2015-01-08 2017-05-02 King Lai Hygienic Materials Co., Ltd. Double sealing valve
TWI551798B (zh) * 2015-02-06 2016-10-01 新萊應材科技有限公司 具有鎖定功能之閘閥
KR102504622B1 (ko) * 2015-03-27 2023-02-27 배트 홀딩 아게 진공밸브
EP3106728A1 (de) 2015-06-16 2016-12-21 VAT Holding AG Vakuumventil mit linearer führungseinheit und ventilsystem mit ebensolchem ventil und antrieb
EP3150322A1 (de) 2015-10-02 2017-04-05 VAT Holding AG Verschlusselement für eine vakuumdichtung mit einer reibrührschweissverbindung
EP3211281A1 (de) 2016-02-24 2017-08-30 VAT Holding AG Vakuumventil zum schliessen eines fliesswegs mit zweiteiligem ventilteller
EP3239567A1 (de) 2016-04-27 2017-11-01 VAT Holding AG Torventil mit kurvenführung
EP3258149A1 (de) 2016-06-14 2017-12-20 VAT Holding AG Vakuumventil zur regelung eines flusses und zur unterbrechung eines fliessweges
TWI666401B (zh) * 2016-10-04 2019-07-21 日商愛發科股份有限公司 閘閥
EP3318787A1 (de) 2016-11-03 2018-05-09 VAT Holding AG Vakuumventilsystem zum geregelten betrieb eines vakuumprozesses
JP6760092B2 (ja) * 2017-01-12 2020-09-23 株式会社島津製作所 真空バルブ
EP3348885B1 (de) 2017-01-16 2019-12-11 VAT Holding AG Dichtung eines vakuumventils und diesbezügliches herstellungsverfahren
US10559451B2 (en) * 2017-02-15 2020-02-11 Applied Materials, Inc. Apparatus with concentric pumping for multiple pressure regimes
EP3372881A1 (de) 2017-03-07 2018-09-12 VAT Holding AG Optimierte druckregelung für und mit einem vakuumventil
EP3372883B1 (de) 2017-03-09 2019-12-11 VAT Holding AG Vakuumventil mit optischem sensor
EP3392541A1 (de) 2017-04-19 2018-10-24 VAT Holding AG Vakuumventil mit kraftsensor
EP3421849A1 (de) 2017-06-30 2019-01-02 VAT Holding AG Vakuumventil mit temperatursensor
EP3421850A1 (de) 2017-06-30 2019-01-02 VAT Holding AG Vakuumventil mit positionssensor
EP3421851A1 (de) 2017-06-30 2019-01-02 VAT Holding AG Vakuumventil mit drucksensor
EP3421852A1 (de) 2017-06-30 2019-01-02 VAT Holding AG Vakuumventil mit inertialsensor
EP3421853A1 (de) 2017-06-30 2019-01-02 VAT Holding AG Vakuumventil mit akustischem sensor
EP3450809A1 (de) 2017-08-31 2019-03-06 VAT Holding AG Verstellvorrichtung mit spannzangenkupplung für den vakuumbereich
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EP3477173A1 (de) 2017-10-30 2019-05-01 VAT Holding AG Erweiterte vakuumprozesssteuerung
CN108869772A (zh) * 2018-08-07 2018-11-23 陕西瑞莱自控设备有限公司 一种煤化工专用硬密封锁斗盘阀
WO2020033378A1 (en) 2018-08-07 2020-02-13 Persimmon Technologies Corp. Direct-drive flexure-mechanism vacuum control valve
DE102019001115A1 (de) 2019-02-15 2020-08-20 Vat Holding Ag Torventil mit Kulissenführung
US10981734B2 (en) * 2019-04-11 2021-04-20 Drew P. HENRY Conduit access
CN110375082A (zh) * 2019-07-29 2019-10-25 德淮半导体有限公司 摆动闸阀
MX2022003625A (es) * 2019-09-25 2022-04-20 Shibaura Machine Co Ltd Valvula de ajuste de velocidad de flujo, unidad de bomba y dispositivo de tratamiento de superficie.
DE102020001179A1 (de) 2020-02-24 2021-08-26 Vat Holding Ag Vakuumventil zur Bereitstellung eines symmetrischen Fluidflusses
DE102021000787A1 (de) 2021-02-17 2022-08-18 Vat Holding Ag Ventil mit Funkanordnung
DE102021002577A1 (de) 2021-05-18 2022-11-24 Vat Holding Ag Hochfrequenz-Erdungsvorrichtung und Vakuumventil mit Hochfrequenz-Erdungsvorrichtung
DE102021005995A1 (de) 2021-12-02 2023-06-07 Vat Holding Ag Pendelventil mit Kalibriervorrichtung
WO2024062088A1 (de) 2022-09-23 2024-03-28 Vat Holding Ag Verschlussanordnung für ein vakuumventil

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Also Published As

Publication number Publication date
DE60027821T2 (de) 2006-12-21
EP1063457B1 (de) 2006-05-10
EP1063457A2 (de) 2000-12-27
EP1063457A3 (de) 2002-01-30
US6089537A (en) 2000-07-18

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Legal Events

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