DE60003566D1 - Röntgenstrahlfluoreszenz-sensor zur blechdickenmessung - Google Patents

Röntgenstrahlfluoreszenz-sensor zur blechdickenmessung

Info

Publication number
DE60003566D1
DE60003566D1 DE60003566T DE60003566T DE60003566D1 DE 60003566 D1 DE60003566 D1 DE 60003566D1 DE 60003566 T DE60003566 T DE 60003566T DE 60003566 T DE60003566 T DE 60003566T DE 60003566 D1 DE60003566 D1 DE 60003566D1
Authority
DE
Germany
Prior art keywords
rays
fluorescent
primary
ray fluorescence
chemical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60003566T
Other languages
English (en)
Other versions
DE60003566T2 (de
Inventor
Johann Haszler
Hormoz Ghaziary
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Novelis Koblenz GmbH
Original Assignee
Corus Aluminium Walzprodukte GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corus Aluminium Walzprodukte GmbH filed Critical Corus Aluminium Walzprodukte GmbH
Application granted granted Critical
Publication of DE60003566D1 publication Critical patent/DE60003566D1/de
Publication of DE60003566T2 publication Critical patent/DE60003566T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
DE60003566T 1999-08-10 2000-08-10 Röntgenstrahlfluoreszenz-sensor zur blechdickenmessung Expired - Lifetime DE60003566T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP99202608 1999-08-10
EP99202608A EP1076222A1 (de) 1999-08-10 1999-08-10 Röntgenfluoreszenz-Messung der Dicke von Aluminiumblech
PCT/EP2000/007898 WO2001011316A1 (en) 1999-08-10 2000-08-10 X-ray fluorescence sensor for measurement of metal sheet thickness

Publications (2)

Publication Number Publication Date
DE60003566D1 true DE60003566D1 (de) 2003-07-31
DE60003566T2 DE60003566T2 (de) 2004-05-13

Family

ID=8240533

Family Applications (2)

Application Number Title Priority Date Filing Date
DE60003566T Expired - Lifetime DE60003566T2 (de) 1999-08-10 2000-08-10 Röntgenstrahlfluoreszenz-sensor zur blechdickenmessung
DE60003695T Expired - Lifetime DE60003695T2 (de) 1999-08-10 2000-08-10 Röntgenfluoreszenzanalyse von mehrschichtigen proben

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE60003695T Expired - Lifetime DE60003695T2 (de) 1999-08-10 2000-08-10 Röntgenfluoreszenzanalyse von mehrschichtigen proben

Country Status (9)

Country Link
US (2) US6512810B1 (de)
EP (3) EP1076222A1 (de)
JP (2) JP2003506701A (de)
AT (2) ATE244396T1 (de)
AU (2) AU6441600A (de)
CA (2) CA2393885C (de)
DE (2) DE60003566T2 (de)
ES (1) ES2200907T3 (de)
WO (2) WO2001011315A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
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EP1076222A1 (de) * 1999-08-10 2001-02-14 Corus Aluminium Walzprodukte GmbH Röntgenfluoreszenz-Messung der Dicke von Aluminiumblech
JP3811089B2 (ja) * 2002-04-15 2006-08-16 株式会社東芝 摩耗量測定方法
DE10307356A1 (de) 2003-02-21 2004-09-16 Sikora Ag Verfahren und Vorrichtung zur Bestimmung der Dicke der Isolation eines Flachkabels in Bereichen der metallischen Leiterbahnen
EP1609155A4 (de) * 2003-04-01 2009-09-23 Keymaster Technologies Inc Ausnahmequelle für eine röntgen-fluoreszenzeinrichtung
US7203276B2 (en) 2004-08-27 2007-04-10 University Of New Brunswick X-ray scatter image reconstruction by balancing of discrepancies between detector responses, and apparatus therefor
DE102005048644A1 (de) * 2005-05-03 2006-11-16 Mahlo Gmbh & Co. Kg Verfahren zur Bestimmung eines Flächengewichtes und/oder einer chemischen Zusammensetzung einer geförderten Materialprobe
JP2008210784A (ja) * 2007-02-01 2008-09-11 Matsushita Electric Ind Co Ltd 非水電解質二次電池とその負極の検査方法、製造方法、負極の検査装置、製造装置
JP2008210783A (ja) * 2007-02-01 2008-09-11 Matsushita Electric Ind Co Ltd 電池とその負極の製造方法、負極の製造装置
JP5266662B2 (ja) * 2007-04-19 2013-08-21 横河電機株式会社 シート物理量測定装置
HUE052503T2 (hu) * 2007-09-12 2021-05-28 Flisom Ag Berendezés kompozit film gyártására
CN101226921B (zh) * 2008-02-15 2010-12-01 日月光半导体制造股份有限公司 可检测接点厚度的基板及其检测方法
US20100080351A1 (en) * 2008-09-26 2010-04-01 i-Nalysis LLC Handheld spectrometer
DE102009057119A1 (de) * 2009-12-08 2011-06-09 Titech Gmbh Vorrichtung und Verfahren zur Abtrennung von schweren, mit unerwünschten Zusammensetzungen anfallenden Brocken
CN103884727B (zh) * 2012-12-20 2016-06-22 上海华虹宏力半导体制造有限公司 一种检测掺磷二氧化硅中磷浓度的方法
US10203202B2 (en) * 2014-04-07 2019-02-12 John Weber Schultz Non-contact determination of coating thickness
EP3161462B1 (de) 2014-06-24 2021-04-14 Nova Measuring Instruments, Inc. Vorwärtsschub von mehrschicht- und multiprozessinformationen mit xps- und xrf-technologien
US10012603B2 (en) * 2014-06-25 2018-07-03 Sciaps, Inc. Combined handheld XRF and OES systems and methods
US9851313B2 (en) * 2015-03-03 2017-12-26 Panalytical B.V. Quantitative X-ray analysis—ratio correction
US11169100B2 (en) 2018-04-02 2021-11-09 Sciaps, Inc. Portable, hand held aluminum alloy XRF analyzer and method
AU2019268796A1 (en) * 2018-05-18 2020-12-17 Enersoft Inc. Systems, devices, and methods for analysis of geological samples
WO2021118966A1 (en) * 2019-12-13 2021-06-17 Schlumberger Technology Corporation Measurement of thickness of scale or corrosion
CN111024009B (zh) * 2019-12-31 2022-06-07 北京君融创新科技有限公司 一种测量云母片厚度的系统及方法

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US2711480A (en) * 1948-06-29 1955-06-21 Friedman Herbert Method of measuring thickness of thin layers
US2926257A (en) * 1955-05-16 1960-02-23 Friedman Herbert Method of measuring the thickness of thin coatings
US3919548A (en) * 1974-07-24 1975-11-11 David E Porter X-Ray energy spectrometer system
JPS585364B2 (ja) * 1976-05-18 1983-01-31 セイコーインスツルメンツ株式会社 放射線厚み測定装置
FI68321C (fi) * 1982-12-01 1985-08-12 Valtion Teknillinen Foerfarande foer att medelst straolning utsaend av ett roentgenroer utan att foerstoera provet maeta foerdelningen av fyll- och/eller belaeggningsmedel i tjockleksriktningen av papper kartong eller liknande och halten av dessa medel anordningar foer tillaempande av foerfarandet samt anvaendningar av foerfarandet och anordningarna
JPS59105547A (ja) * 1982-12-08 1984-06-18 Kawasaki Steel Corp 螢光ｘ線分光装置
JPH0660879B2 (ja) * 1984-05-10 1994-08-10 理学電機工業株式会社 被膜の厚みと組成の同時分析法
DE3583436D1 (de) * 1984-10-05 1991-08-14 Kawasaki Steel Co Verfahren zur bestimmung der dicke und der zusammensetzung eines legierungsfilms.
JPS61195335A (ja) * 1985-02-25 1986-08-29 Shimadzu Corp 薄層の定量分析方法
JPS61250509A (ja) * 1985-04-30 1986-11-07 Seiko Instr & Electronics Ltd 高分子膜上の磁性体膜厚測定方法
JPS62137552A (ja) * 1985-12-11 1987-06-20 Seiko Instr & Electronics Ltd 合金メツキ付着量計
JPS6453144A (en) * 1987-08-24 1989-03-01 Oki Electric Ind Co Ltd Method for evaluating thin film by fluorescent x-ray analysis
GB8811459D0 (en) * 1988-05-13 1988-06-15 Dmc Boyle Ltd Method & apparatus for measuring thickness of coating on substrate
US5081658A (en) * 1989-03-30 1992-01-14 Nkk Corporation Method of measuring plating amount and plating film composition of plated steel plate and apparatus therefor
JP2926857B2 (ja) * 1990-03-31 1999-07-28 株式会社島津製作所 Ｘ線による定性分析装置
JPH04118510A (ja) * 1990-09-07 1992-04-20 Seiko Instr Inc ケイ光ｘ線膜厚計
JP2955025B2 (ja) * 1990-12-25 1999-10-04 富士通株式会社 多層膜の膜厚測定方法
GB9113990D0 (en) * 1991-06-28 1991-08-14 Data Measurement Corp Means of calibrating x-ray gauging systems
GB2260403B (en) * 1991-09-19 1995-10-11 Rigaku Ind Corp Method of and apparatus for the quantitative measurement of paint coating
JP2706601B2 (ja) * 1991-10-18 1998-01-28 理学電機工業株式会社 蛍光ｘ線分析方法および装置
JPH05240808A (ja) * 1992-02-29 1993-09-21 Horiba Ltd 蛍光ｘ線定量方法
GB9223592D0 (en) * 1992-11-11 1992-12-23 Fisons Plc X-ray analysis apparatus
US5325416A (en) * 1993-10-25 1994-06-28 Nisshin Steel Co., Ltd. Method for measuring Fe coating weight of Fe-coated stainless steel sheet
JPH10221047A (ja) * 1997-02-03 1998-08-21 Jeol Ltd 蛍光ｘ線膜厚分析装置及び方法
DE19710420C2 (de) * 1997-03-13 2001-07-12 Helmut Fischer Gmbh & Co Verfahren und Vorrichtung zum Messen der Dicken dünner Schichten mittels Röntgenfluoreszenz
JPH1114336A (ja) * 1997-06-18 1999-01-22 Futec Inc 厚さ及び厚さ換算単重測定方法
JP3820049B2 (ja) * 1998-07-16 2006-09-13 パナリティカル ビー ヴィ 薄膜の蛍光ｘ線分析方法及び装置
EP1076222A1 (de) * 1999-08-10 2001-02-14 Corus Aluminium Walzprodukte GmbH Röntgenfluoreszenz-Messung der Dicke von Aluminiumblech
US6381303B1 (en) * 1999-09-29 2002-04-30 Jordan Valley Applied Radiation Ltd. X-ray microanalyzer for thin films

Also Published As

Publication number Publication date
CA2393885C (en) 2006-01-31
EP1076222A1 (de) 2001-02-14
CA2381398A1 (en) 2001-02-15
ATE244396T1 (de) 2003-07-15
CA2393885A1 (en) 2001-02-15
DE60003695D1 (de) 2003-08-07
CA2381398C (en) 2006-01-24
EP1206679B1 (de) 2003-07-02
ES2200907T3 (es) 2004-03-16
DE60003695T2 (de) 2004-06-03
DE60003566T2 (de) 2004-05-13
JP2003506700A (ja) 2003-02-18
WO2001011316A1 (en) 2001-02-15
JP2003506701A (ja) 2003-02-18
EP1208353A1 (de) 2002-05-29
US6631177B1 (en) 2003-10-07
US6512810B1 (en) 2003-01-28
EP1206679A1 (de) 2002-05-22
AU6441600A (en) 2001-03-05
ATE243840T1 (de) 2003-07-15
EP1208353B1 (de) 2003-06-25
WO2001011315A1 (en) 2001-02-15
AU6281800A (en) 2001-03-05

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Legal Events

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