DE60042990D1 - Datenverarbeitungseinrichtung für Röntgenfluoreszenzspektroskopie, welche die Empfindlichkeit des Messgerätes für die chemischen Elemente unabhängig von Messbedingungen berücksichtigt - Google Patents

Datenverarbeitungseinrichtung für Röntgenfluoreszenzspektroskopie, welche die Empfindlichkeit des Messgerätes für die chemischen Elemente unabhängig von Messbedingungen berücksichtigt

Info

Publication number
DE60042990D1
DE60042990D1 DE60042990T DE60042990T DE60042990D1 DE 60042990 D1 DE60042990 D1 DE 60042990D1 DE 60042990 T DE60042990 T DE 60042990T DE 60042990 T DE60042990 T DE 60042990T DE 60042990 D1 DE60042990 D1 DE 60042990D1
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DE
Germany
Prior art keywords
ray
account
sample
sensitivity
intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60042990T
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English (en)
Inventor
Tadahiro Shiota
Makoto Nishino
Shoji Kuwabara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Application granted granted Critical
Publication of DE60042990D1 publication Critical patent/DE60042990D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/07Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076X-ray fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE60042990T 1999-05-20 2000-05-17 Datenverarbeitungseinrichtung für Röntgenfluoreszenzspektroskopie, welche die Empfindlichkeit des Messgerätes für die chemischen Elemente unabhängig von Messbedingungen berücksichtigt Expired - Lifetime DE60042990D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP14041399A JP3921872B2 (ja) 1999-05-20 1999-05-20 蛍光x線分析用データ処理装置
US09/521,243 US6314158B1 (en) 1999-05-20 2000-03-08 Data processor for fluorescent x-ray spectroscopy

Publications (1)

Publication Number Publication Date
DE60042990D1 true DE60042990D1 (de) 2009-11-05

Family

ID=15268161

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60042990T Expired - Lifetime DE60042990D1 (de) 1999-05-20 2000-05-17 Datenverarbeitungseinrichtung für Röntgenfluoreszenzspektroskopie, welche die Empfindlichkeit des Messgerätes für die chemischen Elemente unabhängig von Messbedingungen berücksichtigt

Country Status (5)

Country Link
US (1) US6314158B1 (de)
EP (1) EP1054254B1 (de)
JP (1) JP3921872B2 (de)
AT (1) ATE443858T1 (de)
DE (1) DE60042990D1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4646418B2 (ja) * 2000-04-06 2011-03-09 エスアイアイ・ナノテクノロジー株式会社 蛍光x線分析装置
CN100464182C (zh) * 2003-03-28 2009-02-25 理学电机工业株式会社 荧光x射线分析装置
GB0321039D0 (en) * 2003-09-09 2003-10-08 Council Cent Lab Res Councils Ionising particle analyser
FI20031753A (fi) 2003-12-01 2005-06-02 Metorex Internat Oy Parannettu mittausjärjestely röntgenfluoresenssianalyysiä varten
DE102004019030A1 (de) * 2004-04-17 2005-11-03 Katz, Elisabeth Vorrichtung für die Elementanalyse
US7233643B2 (en) * 2005-05-20 2007-06-19 Oxford Instruments Analytical Oy Measurement apparatus and method for determining the material composition of a sample by combined X-ray fluorescence analysis and laser-induced breakdown spectroscopy
JP4247559B2 (ja) * 2005-06-07 2009-04-02 株式会社リガク 蛍光x線分析装置およびそれに用いるプログラム
US7409037B2 (en) * 2006-05-05 2008-08-05 Oxford Instruments Analytical Oy X-ray fluorescence analyzer having means for producing lowered pressure, and an X-ray fluorescence measurement method using lowered pressure
EP2064088B1 (de) * 2006-10-23 2011-03-23 Intier Automotive Inc. Schienenantriebsanordnung für sitz mit motorischer verstellung
US8064570B2 (en) * 2006-12-20 2011-11-22 Innov-X-Systems, Inc. Hand-held XRF analyzer
JP2012163489A (ja) * 2011-02-08 2012-08-30 Shimadzu Corp 蛍光x線分析装置
CN103901066B (zh) * 2012-12-26 2016-04-13 中国建材检验认证集团股份有限公司 一种获得标准稀释比下x射线荧光强度的方法
CN103969272B (zh) * 2013-01-30 2016-05-11 中国建材检验认证集团股份有限公司 X射线荧光分析测定水泥成分的方法及系统
ES2795988T3 (es) * 2013-05-27 2020-11-25 Shimadzu Corp Analizador de fluorescencia de rayos X
DE102015221323B3 (de) 2015-10-30 2016-08-04 Airbus Defence and Space GmbH Verfahren zum Nachweis von Oberflächenverunreinigungen mittels Röntgenfluoreszenzanalyse
KR101908807B1 (ko) * 2016-12-22 2018-10-16 주식회사 포스코 금속 시료의 성분 측정 장치 및 방법
JP6614740B2 (ja) * 2017-03-15 2019-12-04 株式会社リガク 蛍光x線分析方法、蛍光x線分析プログラムおよび蛍光x線分析装置
WO2019218051A1 (en) * 2018-05-18 2019-11-21 Enersoft Inc. Systems, devices, and methods for analysis of geological samples
JP7302504B2 (ja) * 2020-02-27 2023-07-04 株式会社島津製作所 蛍光x線分析装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2853261B2 (ja) * 1989-05-16 1999-02-03 三菱マテリアル株式会社 金属分析方法および分析装置
JPH05240808A (ja) * 1992-02-29 1993-09-21 Horiba Ltd 蛍光x線定量方法
GB9519771D0 (en) * 1995-09-28 1995-11-29 Oxford Analytical Instr Ltd X-ray fluorescence inspection apparatus and method
JP3511826B2 (ja) * 1997-01-23 2004-03-29 株式会社島津製作所 蛍光x線分析装置
US6173036B1 (en) * 1997-08-01 2001-01-09 Advanced Micro Devices, Inc. Depth profile metrology using grazing incidence X-ray fluorescence

Also Published As

Publication number Publication date
JP3921872B2 (ja) 2007-05-30
EP1054254A2 (de) 2000-11-22
ATE443858T1 (de) 2009-10-15
US6314158B1 (en) 2001-11-06
EP1054254A3 (de) 2004-02-04
EP1054254B1 (de) 2009-09-23
JP2000329712A (ja) 2000-11-30

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