DE59810569D1 - Konfokales Mikroskop mit einem motorischen Scanningtisch - Google Patents

Konfokales Mikroskop mit einem motorischen Scanningtisch

Info

Publication number
DE59810569D1
DE59810569D1 DE59810569T DE59810569T DE59810569D1 DE 59810569 D1 DE59810569 D1 DE 59810569D1 DE 59810569 T DE59810569 T DE 59810569T DE 59810569 T DE59810569 T DE 59810569T DE 59810569 D1 DE59810569 D1 DE 59810569D1
Authority
DE
Germany
Prior art keywords
confocal microscope
scanning table
motorized scanning
motorized
confocal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59810569T
Other languages
English (en)
Inventor
Eberhard Derndinger
Peter Ott
Norbert Czarnetzki
Dr Scheruebl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Application granted granted Critical
Publication of DE59810569D1 publication Critical patent/DE59810569D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0068—Optical details of the image generation arrangements using polarisation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G02B21/004—Scanning details, e.g. scanning stages fixed arrays, e.g. switchable aperture arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0056—Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0072—Optical details of the image generation details concerning resolution or correction, including general design of CSOM objectives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Engineering & Computer Science (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE59810569T 1997-04-07 1998-03-31 Konfokales Mikroskop mit einem motorischen Scanningtisch Expired - Lifetime DE59810569D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19714221A DE19714221A1 (de) 1997-04-07 1997-04-07 Konfokales Mikroskop mit einem motorischen Scanningtisch

Publications (1)

Publication Number Publication Date
DE59810569D1 true DE59810569D1 (de) 2004-02-19

Family

ID=7825633

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19714221A Withdrawn DE19714221A1 (de) 1997-04-07 1997-04-07 Konfokales Mikroskop mit einem motorischen Scanningtisch
DE59810569T Expired - Lifetime DE59810569D1 (de) 1997-04-07 1998-03-31 Konfokales Mikroskop mit einem motorischen Scanningtisch

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19714221A Withdrawn DE19714221A1 (de) 1997-04-07 1997-04-07 Konfokales Mikroskop mit einem motorischen Scanningtisch

Country Status (4)

Country Link
US (1) US6429897B2 (de)
EP (1) EP0871052B1 (de)
JP (1) JP3970998B2 (de)
DE (2) DE19714221A1 (de)

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Also Published As

Publication number Publication date
US20010012069A1 (en) 2001-08-09
EP0871052B1 (de) 2004-01-14
DE19714221A1 (de) 1998-10-08
EP0871052A1 (de) 1998-10-14
US6429897B2 (en) 2002-08-06
JPH10326587A (ja) 1998-12-08
JP3970998B2 (ja) 2007-09-05

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: CARL ZEISS SMT AG, 73447 OBERKOCHEN, DE

8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: CARL ZEISS SMT GMBH, 73447 OBERKOCHEN, DE