DE69010318T2 - Abtastanordnung zum Abtasten einer Oberfläche entlang einer Linie mittels optischer Strahlung. - Google Patents

Abtastanordnung zum Abtasten einer Oberfläche entlang einer Linie mittels optischer Strahlung.

Info

Publication number
DE69010318T2
DE69010318T2 DE69010318T DE69010318T DE69010318T2 DE 69010318 T2 DE69010318 T2 DE 69010318T2 DE 69010318 T DE69010318 T DE 69010318T DE 69010318 T DE69010318 T DE 69010318T DE 69010318 T2 DE69010318 T2 DE 69010318T2
Authority
DE
Germany
Prior art keywords
scanning
line
surface along
optical radiation
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69010318T
Other languages
English (en)
Other versions
DE69010318D1 (de
Inventor
Amstel Willem Dirk Van
Joseph Louis Horijon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of DE69010318D1 publication Critical patent/DE69010318D1/de
Application granted granted Critical
Publication of DE69010318T2 publication Critical patent/DE69010318T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0031—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration for scanning purposes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N2021/8905—Directional selective optics, e.g. slits, spatial filters
    • G01N2021/8907—Cylindrical optics

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Textile Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Lenses (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Noodles (AREA)
  • Epoxy Compounds (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Light Guides In General And Applications Therefor (AREA)
  • Facsimile Scanning Arrangements (AREA)
DE69010318T 1990-01-16 1990-12-18 Abtastanordnung zum Abtasten einer Oberfläche entlang einer Linie mittels optischer Strahlung. Expired - Fee Related DE69010318T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL9000100 1990-01-16

Publications (2)

Publication Number Publication Date
DE69010318D1 DE69010318D1 (de) 1994-08-04
DE69010318T2 true DE69010318T2 (de) 1995-01-26

Family

ID=19856420

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69010318T Expired - Fee Related DE69010318T2 (de) 1990-01-16 1990-12-18 Abtastanordnung zum Abtasten einer Oberfläche entlang einer Linie mittels optischer Strahlung.

Country Status (11)

Country Link
US (1) US5170037A (de)
EP (1) EP0437883B1 (de)
JP (1) JP2995238B2 (de)
KR (1) KR0170783B1 (de)
AT (1) ATE108029T1 (de)
CA (1) CA2034017C (de)
DE (1) DE69010318T2 (de)
DK (1) DK0437883T3 (de)
ES (1) ES2058766T3 (de)
FI (1) FI104297B1 (de)
IL (1) IL96947A (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5512760A (en) * 1993-05-06 1996-04-30 U.S. Philips Corporation Optical height detector with coaxial irradiation and image axes and plural detectors spaced along the image axis
DE19528519A1 (de) * 1995-08-03 1997-02-06 Tzn Forschung & Entwicklung Vorrichtung zur Detektion streifenförmiger Oberflächenfehler
DE19714221A1 (de) * 1997-04-07 1998-10-08 Zeiss Carl Fa Konfokales Mikroskop mit einem motorischen Scanningtisch
WO2003023455A1 (en) * 2001-09-13 2003-03-20 Anzpac Systems Limited Method and apparatus for article inspection
US8441694B2 (en) * 2003-09-30 2013-05-14 Hewlett-Packard Development Company, L.P. Method and an apparatus for adjusting a scanning target area of an image reproduction device
KR100816078B1 (ko) * 2006-06-19 2008-03-24 광운대학교 산학협력단 공간영상 투영장치 및 그 방법
WO2009061458A1 (en) * 2007-11-07 2009-05-14 Amfit, Inc. Impression foam digital scanner

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH539892A (de) * 1971-03-22 1973-07-31 Zellweger Uster Ag Abtastvorrichtung für optisch erkennbare Zeichen
US3995110A (en) * 1973-12-20 1976-11-30 Xerox Corporation Flying spot scanner with plural lens correction
DE2550814C3 (de) * 1975-11-12 1979-08-09 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Zeilentastvorrichtung für Materialbahnen zur Fehlstellenermittlung
DE2827705C3 (de) * 1978-06-23 1981-07-30 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Gerät zur Feststellung von Fehlern an Bahnmaterial
DE3431540A1 (de) * 1984-07-02 1986-03-06 Elektro Optik Gmbh & Co Kg Verfahren zur korrektur der sphaerischen aberration und des astigmatismus eines ausmittigen lichtbuendels in einer spiegeloptik
US4872757A (en) * 1988-04-20 1989-10-10 Ball Corporation Optical convex surface profiling and gauging apparatus and method therefor

Also Published As

Publication number Publication date
IL96947A (en) 1993-07-08
DE69010318D1 (de) 1994-08-04
IL96947A0 (en) 1992-03-29
JPH04212120A (ja) 1992-08-03
EP0437883B1 (de) 1994-06-29
FI910150A0 (fi) 1991-01-11
ES2058766T3 (es) 1994-11-01
DK0437883T3 (da) 1994-10-03
FI104297B (fi) 1999-12-15
EP0437883A1 (de) 1991-07-24
JP2995238B2 (ja) 1999-12-27
ATE108029T1 (de) 1994-07-15
CA2034017A1 (en) 1991-07-17
CA2034017C (en) 2001-08-21
FI104297B1 (fi) 1999-12-15
US5170037A (en) 1992-12-08
FI910150A (fi) 1991-07-17
KR0170783B1 (ko) 1999-05-01

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL

8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N

8339 Ceased/non-payment of the annual fee