DE69211171T2 - Anordnung zum optischen Messen der Höhe einer Oberfläche - Google Patents

Anordnung zum optischen Messen der Höhe einer Oberfläche

Info

Publication number
DE69211171T2
DE69211171T2 DE69211171T DE69211171T DE69211171T2 DE 69211171 T2 DE69211171 T2 DE 69211171T2 DE 69211171 T DE69211171 T DE 69211171T DE 69211171 T DE69211171 T DE 69211171T DE 69211171 T2 DE69211171 T2 DE 69211171T2
Authority
DE
Germany
Prior art keywords
height
arrangement
optically measuring
optically
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69211171T
Other languages
English (en)
Other versions
DE69211171D1 (de
Inventor
Joseph Louis Horijon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics NV filed Critical Philips Electronics NV
Publication of DE69211171D1 publication Critical patent/DE69211171D1/de
Application granted granted Critical
Publication of DE69211171T2 publication Critical patent/DE69211171T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
DE69211171T 1991-02-06 1992-01-29 Anordnung zum optischen Messen der Höhe einer Oberfläche Expired - Fee Related DE69211171T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL9100205A NL9100205A (nl) 1991-02-06 1991-02-06 Inrichting voor het optisch meten van de hoogte van een oppervlak.

Publications (2)

Publication Number Publication Date
DE69211171D1 DE69211171D1 (de) 1996-07-11
DE69211171T2 true DE69211171T2 (de) 1996-12-05

Family

ID=19858833

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69211171T Expired - Fee Related DE69211171T2 (de) 1991-02-06 1992-01-29 Anordnung zum optischen Messen der Höhe einer Oberfläche

Country Status (5)

Country Link
US (1) US5329358A (de)
EP (1) EP0498495B1 (de)
JP (1) JPH04319615A (de)
DE (1) DE69211171T2 (de)
NL (1) NL9100205A (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5991040A (en) * 1995-06-30 1999-11-23 Siemens Aktiengesellschaft Optical distance sensor
US5760891A (en) * 1995-08-25 1998-06-02 Eastman Kodak Company Wound web roll sidewall quality measurement
US6034764A (en) * 1996-03-20 2000-03-07 Carter; Robert J. Portable electronic distance and vertical angle instrument
DE19816271C1 (de) * 1998-04-11 2000-01-13 Werth Messtechnik Gmbh Verfahren und Vorrichtung zur Profilbestimmung einer Materialoberfläche
US6731383B2 (en) * 2000-09-12 2004-05-04 August Technology Corp. Confocal 3D inspection system and process
US6870609B2 (en) * 2001-02-09 2005-03-22 August Technology Corp. Confocal 3D inspection system and process
US20020145734A1 (en) * 2001-02-09 2002-10-10 Cory Watkins Confocal 3D inspection system and process
US20020148984A1 (en) * 2001-02-09 2002-10-17 Cory Watkins Confocal 3D inspection system and process
US6970287B1 (en) 2001-07-16 2005-11-29 August Technology Corp. Confocal 3D inspection system and process
US6882415B1 (en) 2001-07-16 2005-04-19 August Technology Corp. Confocal 3D inspection system and process
US20030025918A1 (en) * 2001-07-16 2003-02-06 August Technology Corp. Confocal 3D inspection system and process
TWI398745B (zh) * 2009-03-06 2013-06-11 Ind Tech Res Inst 基於光線強度的定位方法及系統
US9405000B2 (en) 2009-03-06 2016-08-02 Industrial Technology Research Institute Positioning method and positioning system based on light intensity
JP5381613B2 (ja) * 2009-10-23 2014-01-08 富士通株式会社 光走査装置および光走査方法
FI127908B (en) * 2015-09-22 2019-05-15 Teknologian Tutkimuskeskus Vtt Oy Method and apparatus for measuring surface height

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0137772A1 (de) * 1983-02-14 1985-04-24 The Coe Manufacturing Company Gerät und verfahren zur optischen ortsbestimmung mittels lichtstrahlabtastung
JPS60194301A (ja) * 1984-03-15 1985-10-02 Matsushita Electric Works Ltd 距離検出装置
US4681450A (en) * 1985-06-21 1987-07-21 Research Corporation Photodetector arrangement for measuring the state of polarization of light
JPH0619244B2 (ja) * 1985-09-30 1994-03-16 横河電機株式会社 変位変換器
NL8503182A (nl) * 1985-11-19 1987-06-16 Philips Nv Inrichting voor het langs optische weg meten van een oppervlakteprofiel.
JPS6473214A (en) * 1987-09-14 1989-03-17 Mitutoyo Corp Non-contact displacement meter

Also Published As

Publication number Publication date
EP0498495B1 (de) 1996-06-05
EP0498495A1 (de) 1992-08-12
NL9100205A (nl) 1992-09-01
US5329358A (en) 1994-07-12
JPH04319615A (ja) 1992-11-10
DE69211171D1 (de) 1996-07-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N

8339 Ceased/non-payment of the annual fee