DE69210275D1 - Verfahren zum Messen des Durchmessers einer Einkristallstange - Google Patents

Verfahren zum Messen des Durchmessers einer Einkristallstange

Info

Publication number
DE69210275D1
DE69210275D1 DE69210275T DE69210275T DE69210275D1 DE 69210275 D1 DE69210275 D1 DE 69210275D1 DE 69210275 T DE69210275 T DE 69210275T DE 69210275 T DE69210275 T DE 69210275T DE 69210275 D1 DE69210275 D1 DE 69210275D1
Authority
DE
Germany
Prior art keywords
measuring
diameter
single crystal
crystal rod
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69210275T
Other languages
English (en)
Other versions
DE69210275T2 (de
Inventor
Nobuo Katsuoka
Yoshihiro Hirano
Atsushi Ozaki
Masahiko Baba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Publication of DE69210275D1 publication Critical patent/DE69210275D1/de
Application granted granted Critical
Publication of DE69210275T2 publication Critical patent/DE69210275T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G9/00—Methods of, or apparatus for, the determination of weight, not provided for in groups G01G1/00 - G01G7/00
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/10—Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving
    • G01B11/105—Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving using photoelectric detection means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE69210275T 1991-02-08 1992-02-06 Verfahren zum Messen des Durchmessers einer Einkristallstange Expired - Fee Related DE69210275T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3037894A JPH0785489B2 (ja) 1991-02-08 1991-02-08 単結晶の直径計測方法

Publications (2)

Publication Number Publication Date
DE69210275D1 true DE69210275D1 (de) 1996-06-05
DE69210275T2 DE69210275T2 (de) 1997-01-23

Family

ID=12510251

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69210275T Expired - Fee Related DE69210275T2 (de) 1991-02-08 1992-02-06 Verfahren zum Messen des Durchmessers einer Einkristallstange

Country Status (4)

Country Link
US (1) US5584930A (de)
EP (1) EP0498653B1 (de)
JP (1) JPH0785489B2 (de)
DE (1) DE69210275T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2979462B2 (ja) * 1995-09-29 1999-11-15 住友金属工業株式会社 単結晶引き上げ方法
US6030451A (en) * 1998-01-12 2000-02-29 Seh America, Inc. Two camera diameter control system with diameter tracking for silicon ingot growth
US6106612A (en) * 1998-06-04 2000-08-22 Seh America Inc. Level detector and method for detecting a surface level of a material in a container
JP4496723B2 (ja) * 2003-06-27 2010-07-07 信越半導体株式会社 単結晶の製造方法及び単結晶製造装置
US20050087126A1 (en) * 2003-10-22 2005-04-28 Pratt Daniel F. Non-contact orbit control system for Czochralski crystal growth
US8641704B2 (en) 2007-05-11 2014-02-04 Medtronic Ablation Frontiers Llc Ablation therapy system and method for treating continuous atrial fibrillation
JP5104129B2 (ja) * 2007-08-31 2012-12-19 信越半導体株式会社 単結晶直径の検出方法および単結晶引上げ装置
DE102009024473B4 (de) * 2009-06-10 2015-11-26 Siltronic Ag Verfahren zum Ziehen eines Einkristalls aus Silizium und danach hergestellter Einkristall
KR101275377B1 (ko) * 2010-03-02 2013-06-14 주식회사 엘지실트론 잉곳 성장 제어시스템 및 이를 포함하는 잉곳 성장장치
KR101379800B1 (ko) * 2012-07-18 2014-04-01 주식회사 엘지실트론 실리콘 단결정 성장 장치 및 그 제조 방법
EP2886519B1 (de) * 2013-12-18 2016-05-25 Heraeus Quarzglas GmbH & Co. KG Vertikal-tiegelziehverfahren zur herstellung eines glaskörpers mit hohem kieselsäuregehalt
DE102016201778A1 (de) 2016-02-05 2017-08-10 Siltronic Ag Verfahren zum Ermitteln und Regeln eines Durchmessers eines Einkristalls beim Ziehen des Einkristalls
CN106637389A (zh) * 2016-12-07 2017-05-10 内蒙古中环光伏材料有限公司 一种直拉单晶产业化直径生长自控的工艺方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3493770A (en) * 1966-03-01 1970-02-03 Ibm Radiation sensitive control system for crystal growing apparatus
US3692499A (en) * 1970-08-31 1972-09-19 Texas Instruments Inc Crystal pulling system
JPS57123892A (en) * 1981-01-17 1982-08-02 Toshiba Corp Preparation and apparatus of single crystal
US4565598A (en) * 1982-01-04 1986-01-21 The Commonwealth Of Australia Method and apparatus for controlling diameter in Czochralski crystal growth by measuring crystal weight and crystal-melt interface temperature
JPS59102896A (ja) * 1982-11-30 1984-06-14 Toshiba Corp 単結晶の形状制御方法
JPS61286296A (ja) * 1985-06-07 1986-12-16 Sumitomo Electric Ind Ltd 半導体単結晶の成長方法および装置
JPS62278190A (ja) * 1986-05-23 1987-12-03 Sumitomo Electric Ind Ltd 単結晶製造方法
JPS63242991A (ja) * 1987-03-31 1988-10-07 Shin Etsu Handotai Co Ltd 結晶径制御方法
JPS6424089A (en) * 1987-07-21 1989-01-26 Shinetsu Handotai Kk Device for adjusting initial position of melt surface
JPS6447914A (en) * 1987-08-18 1989-02-22 Shinetsu Handotai Kk Apparatus for measuring crystal-rod lifting load
JPS6483595A (en) * 1987-09-25 1989-03-29 Shinetsu Handotai Kk Device for measuring crystal diameter
US5074953A (en) * 1988-08-19 1991-12-24 Mitsubishi Materials Corporation Method for monocrystalline growth of dissociative compound semiconductors

Also Published As

Publication number Publication date
EP0498653B1 (de) 1996-05-01
US5584930A (en) 1996-12-17
EP0498653A2 (de) 1992-08-12
EP0498653A3 (en) 1993-09-01
DE69210275T2 (de) 1997-01-23
JPH04257241A (ja) 1992-09-11
JPH0785489B2 (ja) 1995-09-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee