DE69125149D1 - Apparat zum messen der form einer oberfläche - Google Patents

Apparat zum messen der form einer oberfläche

Info

Publication number
DE69125149D1
DE69125149D1 DE69125149T DE69125149T DE69125149D1 DE 69125149 D1 DE69125149 D1 DE 69125149D1 DE 69125149 T DE69125149 T DE 69125149T DE 69125149 T DE69125149 T DE 69125149T DE 69125149 D1 DE69125149 D1 DE 69125149D1
Authority
DE
Germany
Prior art keywords
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69125149T
Other languages
English (en)
Inventor
Andrew John Barker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sira Ltd
Original Assignee
Sira Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sira Ltd filed Critical Sira Ltd
Application granted granted Critical
Publication of DE69125149D1 publication Critical patent/DE69125149D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02071—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by measuring path difference independently from interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
    • G01B9/02065—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry using a second interferometer before or after measuring interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/35—Mechanical variable delay line
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE69125149T 1990-12-07 1991-12-06 Apparat zum messen der form einer oberfläche Expired - Lifetime DE69125149D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB909026622A GB9026622D0 (en) 1990-12-07 1990-12-07 Apparatus for the measurement of surface shape
PCT/GB1991/002175 WO1992010719A1 (en) 1990-12-07 1991-12-06 Apparatus for the measurement of surface shape

Publications (1)

Publication Number Publication Date
DE69125149D1 true DE69125149D1 (de) 1997-04-17

Family

ID=10686632

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69125149T Expired - Lifetime DE69125149D1 (de) 1990-12-07 1991-12-06 Apparat zum messen der form einer oberfläche

Country Status (6)

Country Link
US (1) US5260761A (de)
EP (1) EP0513305B1 (de)
JP (1) JPH05503787A (de)
DE (1) DE69125149D1 (de)
GB (1) GB9026622D0 (de)
WO (1) WO1992010719A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5419631A (en) * 1994-01-12 1995-05-30 Nearfield Systems Incorporated Three-axis motion tracking interferometer for measurement and correction of positional errors between an article under test and a measurement probe
US5685939A (en) * 1995-03-10 1997-11-11 Minnesota Mining And Manufacturing Company Process for making a Z-axis adhesive and establishing electrical interconnection therewith
DE19522263C2 (de) * 1995-06-20 1998-07-09 Zeiss Carl Jena Gmbh Referenzinterferometer (RI) mit variabler Wellenlänge
US5737069A (en) * 1996-06-03 1998-04-07 Okuma Corporation Position detecting apparatus of optical interferometry
US5978089A (en) * 1997-04-15 1999-11-02 Nextel Ltd. Non-contact method for measuring the shape of an object
DE19808273A1 (de) * 1998-02-27 1999-09-09 Bosch Gmbh Robert Interferometrische Meßeinrichtung zum Erfassen der Form oder des Abstandes insbesondere rauher Oberflächen
US6473186B2 (en) * 2000-05-22 2002-10-29 Mitutoyo Corporation Scanning wide-area surface shape analyzer
US6611379B2 (en) 2001-01-25 2003-08-26 Brookhaven Science Associates Llc Beam splitter and method for generating equal optical path length beams
US7133137B2 (en) * 2002-06-27 2006-11-07 Visx, Incorporated Integrated scanning and ocular tomography system and method
US7321359B2 (en) * 2003-07-30 2008-01-22 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Method and device for optical navigation
US20040227954A1 (en) * 2003-05-16 2004-11-18 Tong Xie Interferometer based navigation device
US6934037B2 (en) * 2003-10-06 2005-08-23 Agilent Technologies, Inc. System and method for optical navigation using a projected fringe technique
JP4843272B2 (ja) * 2004-07-31 2011-12-21 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ投影露光装置の光学システム
US7399954B2 (en) * 2005-08-16 2008-07-15 Avago Technologies Ecbu Ip Pte Ltd System and method for an optical navigation device configured to generate navigation information through an optically transparent layer and to have skating functionality
US7312879B2 (en) * 2005-08-23 2007-12-25 University Of Washington Distance determination in a scanned beam image capture device
US7835011B2 (en) * 2006-01-20 2010-11-16 General Electric Company Systems and methods for determining a position of a support
US7570366B2 (en) * 2007-02-21 2009-08-04 Corning Incorporated Apparatus for measuring defects in a glass sheet
DE102007023826A1 (de) * 2007-05-21 2008-11-27 Polytec Gmbh Verfahren und Vorrichtung zur berührungslosen Schwingungsmessung
US11098999B2 (en) * 2017-12-22 2021-08-24 University Of Rochester Cascade Fourier domain optical coherence tomography

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH411370A (de) * 1960-10-17 1966-04-15 Zeiss Jena Veb Carl Vorrichtung zur interferentiellen Messwertbildung für Mess- und Steuereinrichtungen und Verfahren zum Betrieb der Vorrichtung
FR2082618A5 (de) * 1970-03-20 1971-12-10 Thomson Csf
US4309109A (en) * 1972-05-25 1982-01-05 The United States Of America As Represented By The Secretary Of The Navy Pulsed interferometric remote gauge
CH676289A5 (de) * 1987-03-24 1990-12-28 Wild Leitz Ag
US4884697A (en) * 1988-06-21 1989-12-05 Takacs Peter Z Surface profiling interferometer
GB8903725D0 (en) * 1989-02-18 1989-04-05 Cambridge Consultants Coherent tracking sensor
US5067817A (en) * 1990-02-08 1991-11-26 Bauer Associates, Inc. Method and device for noncontacting self-referencing measurement of surface curvature and profile

Also Published As

Publication number Publication date
JPH05503787A (ja) 1993-06-17
US5260761A (en) 1993-11-09
WO1992010719A1 (en) 1992-06-25
EP0513305A1 (de) 1992-11-19
EP0513305B1 (de) 1997-03-12
GB9026622D0 (en) 1991-01-23

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Legal Events

Date Code Title Description
8332 No legal effect for de