DE50302736D1 - Kanalfunkenquelle zur erzeugung eines stabil gebündelten elektronenstrahls - Google Patents

Kanalfunkenquelle zur erzeugung eines stabil gebündelten elektronenstrahls

Info

Publication number
DE50302736D1
DE50302736D1 DE50302736T DE50302736T DE50302736D1 DE 50302736 D1 DE50302736 D1 DE 50302736D1 DE 50302736 T DE50302736 T DE 50302736T DE 50302736 T DE50302736 T DE 50302736T DE 50302736 D1 DE50302736 D1 DE 50302736D1
Authority
DE
Germany
Prior art keywords
hollow cathode
dielectric tube
cathode
electron beam
stable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE50302736T
Other languages
English (en)
Inventor
Christoph Schulteiss
Lothar-Heinz-Otto Buth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Karlsruhe GmbH
Original Assignee
Forschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Karlsruhe GmbH filed Critical Forschungszentrum Karlsruhe GmbH
Priority to DE50302736T priority Critical patent/DE50302736D1/de
Application granted granted Critical
Publication of DE50302736D1 publication Critical patent/DE50302736D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/025—Electron guns using a discharge in a gas or a vapour as electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/025—Hollow cathodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/52—Generating plasma using exploding wires or spark gaps

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Particle Accelerators (AREA)
  • Radiation-Therapy Devices (AREA)
  • Physical Vapour Deposition (AREA)
DE50302736T 2002-02-25 2003-01-24 Kanalfunkenquelle zur erzeugung eines stabil gebündelten elektronenstrahls Expired - Fee Related DE50302736D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE50302736T DE50302736D1 (de) 2002-02-25 2003-01-24 Kanalfunkenquelle zur erzeugung eines stabil gebündelten elektronenstrahls

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10207835A DE10207835C1 (de) 2002-02-25 2002-02-25 Kanalfunkenquelle zur Erzeugung eines stabil gebündelten Elektronenstrahls
PCT/EP2003/000719 WO2003071577A2 (de) 2002-02-25 2003-01-24 Kanalfunkenquelle zur erzeugung eines stabil gebündelten elektronenstrahls
DE50302736T DE50302736D1 (de) 2002-02-25 2003-01-24 Kanalfunkenquelle zur erzeugung eines stabil gebündelten elektronenstrahls

Publications (1)

Publication Number Publication Date
DE50302736D1 true DE50302736D1 (de) 2006-05-11

Family

ID=7713927

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10207835A Expired - Fee Related DE10207835C1 (de) 2002-02-25 2002-02-25 Kanalfunkenquelle zur Erzeugung eines stabil gebündelten Elektronenstrahls
DE50302736T Expired - Fee Related DE50302736D1 (de) 2002-02-25 2003-01-24 Kanalfunkenquelle zur erzeugung eines stabil gebündelten elektronenstrahls

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE10207835A Expired - Fee Related DE10207835C1 (de) 2002-02-25 2002-02-25 Kanalfunkenquelle zur Erzeugung eines stabil gebündelten Elektronenstrahls

Country Status (6)

Country Link
US (1) US7183564B2 (de)
EP (1) EP1479090B1 (de)
JP (1) JP3906207B2 (de)
AT (1) ATE321354T1 (de)
DE (2) DE10207835C1 (de)
WO (1) WO2003071577A2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITMI20040008A1 (it) * 2004-01-08 2004-04-08 Valentin Dediu Processo per la produzione di nanotubi di carbonio a singola parete
ITMI20050585A1 (it) * 2005-04-07 2006-10-08 Francesco Cino Matacotta Apparato e processo per la generazione accelerazione e propagazione di fasci di elettroni e plasma
JP2009267203A (ja) * 2008-04-28 2009-11-12 Panasonic Corp プラズマドーピング装置
IT1395701B1 (it) * 2009-03-23 2012-10-19 Organic Spintronics S R L Dispositivo per la generazione di plasma e per dirigere un flusso di elettroni verso un bersaglio
DE102009017648A1 (de) * 2009-04-16 2010-10-21 Siemens Aktiengesellschaft Gasinjektionssystem und Verfahren zum Betrieb eines Gasinjektionssystems, insbesondere für eine Partikeltherapieanlage
IT1401417B1 (it) * 2010-08-23 2013-07-26 Organic Spintronics S R L Dispositivo per la generazione di plasma e per dirigere un flusso di elettroni verso un bersaglio
JP5681030B2 (ja) * 2011-04-15 2015-03-04 清水電設工業株式会社 プラズマ・電子ビーム発生装置、薄膜製造装置及び薄膜の製造方法
US10225919B2 (en) * 2011-06-30 2019-03-05 Aes Global Holdings, Pte. Ltd Projected plasma source
US9028289B2 (en) * 2011-12-13 2015-05-12 Federal-Mogul Ignition Company Electron beam welded electrode for industrial spark plugs
ITBO20120320A1 (it) 2012-06-11 2013-12-12 Libuse Skocdopolova Un apparato ed un metodo per la grenerazione di elettroni e di plasma da un getto di gas
GB2528141B (en) * 2014-09-18 2016-10-05 Plasma App Ltd Virtual cathode deposition (VCD) for thin film manufacturing
IT201600115342A1 (it) * 2016-11-15 2018-05-15 Consorzio Di Ricerca Hypatia Macchina per la deposizione di film sottili
CN107633986B (zh) * 2017-08-25 2023-09-05 金华职业技术学院 一种产生电子束的方法
US11812540B1 (en) * 2019-09-30 2023-11-07 Board Of Trustees Of The University Of Alabama, For And On Behalf Of The University Of Alabama In Huntsville Continuous large area cold atmospheric pressure plasma sheet source
CN111145623B (zh) * 2019-12-31 2021-12-10 河海大学常州校区 不同参数的正负电晕与物质作用实验研究装置及方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3864640A (en) * 1972-11-13 1975-02-04 Willard H Bennett Concentration and guidance of intense relativistic electron beams
US4363774A (en) * 1978-01-24 1982-12-14 Bennett Willard H Production and utilization of ion cluster acceleration
US4201921A (en) * 1978-07-24 1980-05-06 International Business Machines Corporation Electron beam-capillary plasma flash x-ray device
DE3014151C2 (de) * 1980-04-12 1982-11-18 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Generator für gepulste Elektronenstrahlen
US4748378A (en) * 1986-03-31 1988-05-31 The United States Of America As Represented By The Department Of Energy Ionized channel generation of an intense-relativistic electron beam
DE3844814A1 (de) * 1988-03-19 1992-02-27 Kernforschungsz Karlsruhe Teilchenbeschleuniger zur erzeugung einer durchstimmbaren punktfoermigen hochleistungs-pseudofunken-roentgenquelle
JP2819420B2 (ja) * 1989-11-20 1998-10-30 東京エレクトロン株式会社 イオン源
DE4208764C2 (de) * 1992-03-19 1994-02-24 Kernforschungsz Karlsruhe Gasgefüllter Teilchenbeschleuniger
DE19813589C2 (de) * 1998-03-27 2002-06-20 Karlsruhe Forschzent Verfahren zum Erzeugen eines gepulsten Elektronenstrahls und Elektronenstrahlquelle zur Durchführung des Verfahrens
DE19849894C1 (de) * 1998-10-29 2000-06-29 Karlsruhe Forschzent Gepulste Plasmaquelle für einen gasgefüllten Teilchenbeschleuniger
US7122949B2 (en) * 2004-06-21 2006-10-17 Neocera, Inc. Cylindrical electron beam generating/triggering device and method for generation of electrons

Also Published As

Publication number Publication date
US20050012441A1 (en) 2005-01-20
JP2005518637A (ja) 2005-06-23
WO2003071577A2 (de) 2003-08-28
US7183564B2 (en) 2007-02-27
EP1479090B1 (de) 2006-03-22
EP1479090A2 (de) 2004-11-24
WO2003071577A3 (de) 2003-12-24
ATE321354T1 (de) 2006-04-15
JP3906207B2 (ja) 2007-04-18
DE10207835C1 (de) 2003-06-12

Similar Documents

Publication Publication Date Title
DE50302736D1 (de) Kanalfunkenquelle zur erzeugung eines stabil gebündelten elektronenstrahls
MXPA05009982A (es) Generador de empuje de nave espacial.
US7589474B2 (en) Ion source with upstream inner magnetic pole piece
WO2000058996A3 (de) Gaseinlass zur erzeugung eines gerichteten und gekühlten gasstrahls
WO2006105955A3 (en) Apparatus and process for generating, accelerating and propagating beams of electrons and plasma
SE0102134D0 (sv) Method and apparatus for plasma generation
ATE515930T1 (de) Plasmastrahl unter atmosphärischem druck
JPH04229996A (ja) 閉電子ドリフトを持つプラズマ加速器
UA81616C2 (ru) Плазменный ускоритель с закрытым дрейфом электронов
US20180350564A1 (en) Plasma Device with an External RF Hollow Cathode for Plasma Cleaning of High Vacuum Systems
WO2018229308A3 (de) Elektroden für gas- und flüssigkeitsgekühlte plasmabrenner, anordnung aus einer elektrode und einem kühlrohr, gasführung, plasmabrenner, verfahren zur gasführung in einem plasmabrenner und verfahren zum betreiben eines plasmabrenners
WO2005008707A3 (en) Improved tip for nanoscanning electron microscope
JP5449166B2 (ja) 高電圧絶縁装置および、当該高電圧絶縁装置を備えたイオン加速装置
US9251991B2 (en) Laser ion source
CN108198743B (zh) 一种用于气体检测的真空电离非连续性进样方法
ATE479196T1 (de) Hochfrequenz-elektronenquelle, insbesondere neutralisator
CN105762053A (zh) 电子和离子的等离子体源
WO2002069364A3 (en) Magnetic field for small closed-drift thruster
CN106158573B (zh) 一种用于质谱仪器的进样离子化系统
CN109698112A (zh) 筒状阴极非平衡磁控等离子体气体聚集团簇源及其使用方法
CN109872940B (zh) 一种利用介质阻挡放电辅助离子化的离子源装置
Franklin Comment on “on the consistency of the collisionless sheath model”[phys. plasmas 9, 4427 (2002)]
CN103835905B (zh) 多级会切磁场等离子体推动器的变截面通道
JP2008051504A (ja) 試料ガスの大気圧下イオン化方法および装置
RU2008112458A (ru) Устройство для генерации импульсных пучков быстрых электронов в воздушном промежутке атмосферного давления

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee