ATE479196T1 - Hochfrequenz-elektronenquelle, insbesondere neutralisator - Google Patents

Hochfrequenz-elektronenquelle, insbesondere neutralisator

Info

Publication number
ATE479196T1
ATE479196T1 AT03007602T AT03007602T ATE479196T1 AT E479196 T1 ATE479196 T1 AT E479196T1 AT 03007602 T AT03007602 T AT 03007602T AT 03007602 T AT03007602 T AT 03007602T AT E479196 T1 ATE479196 T1 AT E479196T1
Authority
AT
Austria
Prior art keywords
high frequency
electron source
neutralizer
frequency electron
discharge chamber
Prior art date
Application number
AT03007602T
Other languages
English (en)
Inventor
Karl-Heinz Schartner
Horst Loeb
Hans Juergen Leiter
Hans-Peter Harmann
Original Assignee
Astrium Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Astrium Gmbh filed Critical Astrium Gmbh
Application granted granted Critical
Publication of ATE479196T1 publication Critical patent/ATE479196T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/025—Electron guns using a discharge in a gas or a vapour as electron source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)
  • Discharge Lamp (AREA)
  • Particle Accelerators (AREA)
  • Ignition Installations For Internal Combustion Engines (AREA)
AT03007602T 2002-04-09 2003-04-02 Hochfrequenz-elektronenquelle, insbesondere neutralisator ATE479196T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10215660A DE10215660B4 (de) 2002-04-09 2002-04-09 Hochfrequenz-Elektronenquelle, insbesondere Neutralisator

Publications (1)

Publication Number Publication Date
ATE479196T1 true ATE479196T1 (de) 2010-09-15

Family

ID=28051229

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03007602T ATE479196T1 (de) 2002-04-09 2003-04-02 Hochfrequenz-elektronenquelle, insbesondere neutralisator

Country Status (7)

Country Link
US (1) US6870321B2 (de)
EP (1) EP1353352B1 (de)
JP (1) JP4409846B2 (de)
KR (1) KR100876052B1 (de)
AT (1) ATE479196T1 (de)
DE (2) DE10215660B4 (de)
RU (1) RU2270491C2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7498592B2 (en) * 2006-06-28 2009-03-03 Wisconsin Alumni Research Foundation Non-ambipolar radio-frequency plasma electron source and systems and methods for generating electron beams
DE102007036592B4 (de) * 2007-08-02 2014-07-10 Astrium Gmbh Hochfrequenzgenerator für Ionen- und Elektronenquellen
JP4925132B2 (ja) * 2007-09-13 2012-04-25 公立大学法人首都大学東京 荷電粒子放出装置およびイオンエンジン
DE102007044070A1 (de) * 2007-09-14 2009-04-02 Thales Electron Devices Gmbh Ionenbeschleunigeranordnung und dafür geeignete Hochspannungsisolatoranordnung
RU2410567C1 (ru) * 2009-10-05 2011-01-27 Федеральное государственное унитарное предприятие "Опытное конструкторское бюро "Факел" Блочный катод-компенсатор
CN102767497B (zh) * 2012-05-22 2014-06-18 北京卫星环境工程研究所 基于空间原子氧的无燃料航天器推进系统及推进方法
CN102797656B (zh) * 2012-08-03 2014-08-13 北京卫星环境工程研究所 吸气式螺旋波电推进装置
CN106672267B (zh) * 2015-11-10 2018-11-27 北京卫星环境工程研究所 基于空间原子氧与物质相互作用的推进系统与方法
CN106941066B (zh) * 2017-03-22 2018-07-06 中山市博顿光电科技有限公司 一种电离效果稳定的射频离子源中和器
GB2573570A (en) * 2018-05-11 2019-11-13 Univ Southampton Hollow cathode apparatus
CN108882495B (zh) * 2018-06-08 2021-02-19 鲍铭 一种高频交流电场约束等离子体产生中子的方法
CN111734593B (zh) * 2020-06-24 2023-01-31 电子科技大学 一种基于冷阴极的离子中和器
CN114302548B (zh) * 2021-12-31 2023-07-25 中山市博顿光电科技有限公司 射频电离装置、射频中和器及其控制方法
CN119946973B (zh) * 2025-01-06 2025-12-09 南京荟智环境科技合伙企业(有限合伙) 射频线性等离子体装置及其在钒钛磁铁矿冶炼中的应用

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2633778C3 (de) * 1976-07-28 1981-12-24 Messerschmitt-Bölkow-Blohm GmbH, 8000 München Ionentriebwerk
DE2804393C2 (de) * 1978-02-02 1987-01-02 Jens Prof. Dr. 8520 Buckenhof Christiansen Verfahren zum Erzeugen und Beschleunigen von Elektronen bzw. Ionen in einem Entladungsgefäß, sowie dazugehöriger Teilchenbeschleuniger und ferner dazugehörige Anwendungen des Verfahrens
FR2480552A1 (fr) * 1980-04-10 1981-10-16 Anvar Generateur de plasmaŸ
US4684848A (en) * 1983-09-26 1987-08-04 Kaufman & Robinson, Inc. Broad-beam electron source
JP2531134B2 (ja) * 1986-02-12 1996-09-04 株式会社日立製作所 プラズマ処理装置
US4954751A (en) * 1986-03-12 1990-09-04 Kaufman Harold R Radio frequency hollow cathode
GB8905073D0 (en) * 1989-03-06 1989-04-19 Nordiko Ltd Ion gun
US5003226A (en) * 1989-11-16 1991-03-26 Avco Research Laboratories Plasma cathode
EP1006557B1 (de) * 1996-02-09 2007-01-31 Ulvac, Inc. Vorrichtung zur Erzeugung eines Plasmas mit Entladung entlang einer magnetisch-neutralen Linie
JP3967050B2 (ja) * 1999-10-25 2007-08-29 三菱電機株式会社 プラズマ発生装置
US6291940B1 (en) * 2000-06-09 2001-09-18 Applied Materials, Inc. Blanker array for a multipixel electron source

Also Published As

Publication number Publication date
JP2003301768A (ja) 2003-10-24
DE50313006D1 (de) 2010-10-07
US6870321B2 (en) 2005-03-22
KR20030081060A (ko) 2003-10-17
RU2270491C2 (ru) 2006-02-20
KR100876052B1 (ko) 2008-12-26
EP1353352A1 (de) 2003-10-15
US20030209961A1 (en) 2003-11-13
JP4409846B2 (ja) 2010-02-03
EP1353352B1 (de) 2010-08-25
DE10215660B4 (de) 2008-01-17
DE10215660A1 (de) 2003-11-06

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