ATE479196T1 - Hochfrequenz-elektronenquelle, insbesondere neutralisator - Google Patents
Hochfrequenz-elektronenquelle, insbesondere neutralisatorInfo
- Publication number
- ATE479196T1 ATE479196T1 AT03007602T AT03007602T ATE479196T1 AT E479196 T1 ATE479196 T1 AT E479196T1 AT 03007602 T AT03007602 T AT 03007602T AT 03007602 T AT03007602 T AT 03007602T AT E479196 T1 ATE479196 T1 AT E479196T1
- Authority
- AT
- Austria
- Prior art keywords
- high frequency
- electron source
- neutralizer
- frequency electron
- discharge chamber
- Prior art date
Links
- 238000000605 extraction Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/025—Electron guns using a discharge in a gas or a vapour as electron source
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10215660A DE10215660B4 (de) | 2002-04-09 | 2002-04-09 | Hochfrequenz-Elektronenquelle, insbesondere Neutralisator |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE479196T1 true ATE479196T1 (de) | 2010-09-15 |
Family
ID=28051229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT03007602T ATE479196T1 (de) | 2002-04-09 | 2003-04-02 | Hochfrequenz-elektronenquelle, insbesondere neutralisator |
Country Status (7)
Country | Link |
---|---|
US (1) | US6870321B2 (de) |
EP (1) | EP1353352B1 (de) |
JP (1) | JP4409846B2 (de) |
KR (1) | KR100876052B1 (de) |
AT (1) | ATE479196T1 (de) |
DE (2) | DE10215660B4 (de) |
RU (1) | RU2270491C2 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7498592B2 (en) * | 2006-06-28 | 2009-03-03 | Wisconsin Alumni Research Foundation | Non-ambipolar radio-frequency plasma electron source and systems and methods for generating electron beams |
DE102007036592B4 (de) * | 2007-08-02 | 2014-07-10 | Astrium Gmbh | Hochfrequenzgenerator für Ionen- und Elektronenquellen |
JP4925132B2 (ja) * | 2007-09-13 | 2012-04-25 | 公立大学法人首都大学東京 | 荷電粒子放出装置およびイオンエンジン |
DE102007044070A1 (de) * | 2007-09-14 | 2009-04-02 | Thales Electron Devices Gmbh | Ionenbeschleunigeranordnung und dafür geeignete Hochspannungsisolatoranordnung |
CN102767497B (zh) * | 2012-05-22 | 2014-06-18 | 北京卫星环境工程研究所 | 基于空间原子氧的无燃料航天器推进系统及推进方法 |
CN102797656B (zh) * | 2012-08-03 | 2014-08-13 | 北京卫星环境工程研究所 | 吸气式螺旋波电推进装置 |
CN106672267B (zh) * | 2015-11-10 | 2018-11-27 | 北京卫星环境工程研究所 | 基于空间原子氧与物质相互作用的推进系统与方法 |
CN106941066B (zh) * | 2017-03-22 | 2018-07-06 | 中山市博顿光电科技有限公司 | 一种电离效果稳定的射频离子源中和器 |
GB2573570A (en) * | 2018-05-11 | 2019-11-13 | Univ Southampton | Hollow cathode apparatus |
CN108882495B (zh) * | 2018-06-08 | 2021-02-19 | 鲍铭 | 一种高频交流电场约束等离子体产生中子的方法 |
CN111734593B (zh) * | 2020-06-24 | 2023-01-31 | 电子科技大学 | 一种基于冷阴极的离子中和器 |
CN114302548B (zh) * | 2021-12-31 | 2023-07-25 | 中山市博顿光电科技有限公司 | 射频电离装置、射频中和器及其控制方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2633778C3 (de) * | 1976-07-28 | 1981-12-24 | Messerschmitt-Bölkow-Blohm GmbH, 8000 München | Ionentriebwerk |
DE2804393A1 (de) * | 1978-02-02 | 1979-08-09 | Christiansen Jens | Verfahren zur erzeugung hoher gepulster ionen- und elektronenstroeme |
FR2480552A1 (fr) * | 1980-04-10 | 1981-10-16 | Anvar | Generateur de plasma |
US4684848A (en) * | 1983-09-26 | 1987-08-04 | Kaufman & Robinson, Inc. | Broad-beam electron source |
JP2531134B2 (ja) * | 1986-02-12 | 1996-09-04 | 株式会社日立製作所 | プラズマ処理装置 |
US4954751A (en) * | 1986-03-12 | 1990-09-04 | Kaufman Harold R | Radio frequency hollow cathode |
GB8905073D0 (en) * | 1989-03-06 | 1989-04-19 | Nordiko Ltd | Ion gun |
US5003226A (en) * | 1989-11-16 | 1991-03-26 | Avco Research Laboratories | Plasma cathode |
EP1006557B1 (de) * | 1996-02-09 | 2007-01-31 | Ulvac, Inc. | Vorrichtung zur Erzeugung eines Plasmas mit Entladung entlang einer magnetisch-neutralen Linie |
JP3967050B2 (ja) * | 1999-10-25 | 2007-08-29 | 三菱電機株式会社 | プラズマ発生装置 |
US6291940B1 (en) * | 2000-06-09 | 2001-09-18 | Applied Materials, Inc. | Blanker array for a multipixel electron source |
-
2002
- 2002-04-09 DE DE10215660A patent/DE10215660B4/de not_active Expired - Fee Related
-
2003
- 2003-04-02 EP EP03007602A patent/EP1353352B1/de not_active Expired - Lifetime
- 2003-04-02 AT AT03007602T patent/ATE479196T1/de active
- 2003-04-02 DE DE50313006T patent/DE50313006D1/de not_active Expired - Lifetime
- 2003-04-07 JP JP2003103276A patent/JP4409846B2/ja not_active Expired - Fee Related
- 2003-04-08 KR KR1020030021789A patent/KR100876052B1/ko active IP Right Grant
- 2003-04-08 RU RU2003110016/28A patent/RU2270491C2/ru active
- 2003-04-09 US US10/410,674 patent/US6870321B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE10215660B4 (de) | 2008-01-17 |
US6870321B2 (en) | 2005-03-22 |
RU2270491C2 (ru) | 2006-02-20 |
KR100876052B1 (ko) | 2008-12-26 |
JP4409846B2 (ja) | 2010-02-03 |
US20030209961A1 (en) | 2003-11-13 |
EP1353352B1 (de) | 2010-08-25 |
JP2003301768A (ja) | 2003-10-24 |
KR20030081060A (ko) | 2003-10-17 |
DE50313006D1 (de) | 2010-10-07 |
EP1353352A1 (de) | 2003-10-15 |
DE10215660A1 (de) | 2003-11-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2004098743A3 (en) | Atmospheric pressure ion source | |
SE0102134D0 (sv) | Method and apparatus for plasma generation | |
ATE479196T1 (de) | Hochfrequenz-elektronenquelle, insbesondere neutralisator | |
SE0302045D0 (sv) | Work piece processing by pulsed electric discharges in solid-gas plasmas | |
WO1999063577A3 (en) | Metastable atom bombardment source | |
CA2278751A1 (en) | Atmospheric-pressure plasma jet | |
EP1383359A3 (de) | Verfahren und Vorrichtung zur Behandlung eines Substrats mit einem Glimmentladungsplasma unter Atmosphärendruck | |
WO2004030020A3 (en) | Upper electrode plate with deposition shield in a plasma processing system | |
WO2003015123A3 (en) | Dual frequency plasma etch reactor with independent plasma density/chemistry and ion energy control | |
DE602004018517D1 (de) | Abscheideverfahren mit einem thermischen plasma das mit einer ersetzbaren platte expandiert wird | |
ATE518409T1 (de) | Vorrichtung und prozess zum erzeugen, beschleunigen und ausbreiten von strahlen von elektronen und plasma | |
WO2004027825A3 (en) | Beam plasma source | |
WO2005104168A3 (en) | Improved source for energetic electrons | |
SE0501602L (sv) | Plasmaalstrande anordning, plasmakirurgisk anordning, användning av en plasmakirurgisk anordning och förfarande för att bilda ett plasma | |
TW200420199A (en) | Mechanism for minimizing ion bombardment energy in a plasma chamber | |
WO2006012179A3 (en) | Expanded thermal plasma apparatus | |
WO2006046968A3 (en) | Microfabricated radiation detector assemblies methods of making and using same and interface circuit for use therewith | |
JP2006294582A5 (de) | ||
ATE535008T1 (de) | Massenspektrometrie mit multipol ionen leitvorrichtung | |
AU2003277767A1 (en) | Gas analysis method and ionisation detector for carrying out said method | |
PL1794856T3 (pl) | Lampy wyładowań koronowych | |
WO2003071577A3 (de) | Kanalfunkenquelle zur erzeugung eines stabil gebündelten elektronenstrahls | |
WO2006002315A3 (en) | Electron beam enhanced nitriding system (ebens) | |
WO2008146333A1 (ja) | 質量分析装置 | |
WO2005083738A3 (en) | Collector arrangement |