DE3855110T2 - Photoresist-Zusammensetzungen, die Styryl-Verbindungen enthalten - Google Patents

Photoresist-Zusammensetzungen, die Styryl-Verbindungen enthalten

Info

Publication number
DE3855110T2
DE3855110T2 DE3855110T DE3855110T DE3855110T2 DE 3855110 T2 DE3855110 T2 DE 3855110T2 DE 3855110 T DE3855110 T DE 3855110T DE 3855110 T DE3855110 T DE 3855110T DE 3855110 T2 DE3855110 T2 DE 3855110T2
Authority
DE
Germany
Prior art keywords
compositions containing
photoresist compositions
styryl compounds
containing styryl
compounds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3855110T
Other languages
English (en)
Other versions
DE3855110D1 (de
Inventor
Takanori Yamamoto
Shinji Konishi
Ryotaro Hanawa
Akihiro Furuta
Takeshi Hioki
Jun Tomioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62332110A external-priority patent/JP2595598B2/ja
Priority claimed from JP63177752A external-priority patent/JP2819562B2/ja
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Application granted granted Critical
Publication of DE3855110D1 publication Critical patent/DE3855110D1/de
Publication of DE3855110T2 publication Critical patent/DE3855110T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C229/00—Compounds containing amino and carboxyl groups bound to the same carbon skeleton
    • C07C229/40—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino groups bound to carbon atoms of at least one six-membered aromatic ring and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton
    • C07C229/44—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino groups bound to carbon atoms of at least one six-membered aromatic ring and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton with carboxyl groups linked to the six-membered aromatic ring, or to the condensed ring system containing that ring, by unsaturated carbon chains
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C255/00—Carboxylic acid nitriles
    • C07C255/01—Carboxylic acid nitriles having cyano groups bound to acyclic carbon atoms
    • C07C255/32—Carboxylic acid nitriles having cyano groups bound to acyclic carbon atoms having cyano groups bound to acyclic carbon atoms of a carbon skeleton containing at least one six-membered aromatic ring
    • C07C255/34—Carboxylic acid nitriles having cyano groups bound to acyclic carbon atoms having cyano groups bound to acyclic carbon atoms of a carbon skeleton containing at least one six-membered aromatic ring with cyano groups linked to the six-membered aromatic ring, or to the condensed ring system containing that ring, by unsaturated carbon chains
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C255/00—Carboxylic acid nitriles
    • C07C255/01—Carboxylic acid nitriles having cyano groups bound to acyclic carbon atoms
    • C07C255/32—Carboxylic acid nitriles having cyano groups bound to acyclic carbon atoms having cyano groups bound to acyclic carbon atoms of a carbon skeleton containing at least one six-membered aromatic ring
    • C07C255/42—Carboxylic acid nitriles having cyano groups bound to acyclic carbon atoms having cyano groups bound to acyclic carbon atoms of a carbon skeleton containing at least one six-membered aromatic ring the carbon skeleton being further substituted by singly-bound nitrogen atoms, not being further bound to other hetero atoms
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
    • C07C309/01—Sulfonic acids
    • C07C309/02—Sulfonic acids having sulfo groups bound to acyclic carbon atoms
    • C07C309/03—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton
    • C07C309/13—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing nitrogen atoms, not being part of nitro or nitroso groups, bound to the carbon skeleton
    • C07C309/14—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing nitrogen atoms, not being part of nitro or nitroso groups, bound to the carbon skeleton containing amino groups bound to the carbon skeleton
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C311/00—Amides of sulfonic acids, i.e. compounds having singly-bound oxygen atoms of sulfo groups replaced by nitrogen atoms, not being part of nitro or nitroso groups
    • C07C311/01—Sulfonamides having sulfur atoms of sulfonamide groups bound to acyclic carbon atoms
    • C07C311/02—Sulfonamides having sulfur atoms of sulfonamide groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton
    • C07C311/03—Sulfonamides having sulfur atoms of sulfonamide groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton having the nitrogen atoms of the sulfonamide groups bound to hydrogen atoms or to acyclic carbon atoms
    • C07C311/05—Sulfonamides having sulfur atoms of sulfonamide groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton having the nitrogen atoms of the sulfonamide groups bound to hydrogen atoms or to acyclic carbon atoms to acyclic carbon atoms of hydrocarbon radicals substituted by nitrogen atoms, not being part of nitro or nitroso groups
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C317/00—Sulfones; Sulfoxides
    • C07C317/44—Sulfones; Sulfoxides having sulfone or sulfoxide groups and carboxyl groups bound to the same carbon skeleton
    • C07C317/48—Sulfones; Sulfoxides having sulfone or sulfoxide groups and carboxyl groups bound to the same carbon skeleton the carbon skeleton being further substituted by singly-bound nitrogen atoms, not being part of nitro or nitroso groups
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/18—Compounds having one or more C—Si linkages as well as one or more C—O—Si linkages
    • C07F7/1804—Compounds having Si-O-C linkages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/127—Spectral sensitizer containing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE3855110T 1987-12-28 1988-12-28 Photoresist-Zusammensetzungen, die Styryl-Verbindungen enthalten Expired - Fee Related DE3855110T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62332110A JP2595598B2 (ja) 1987-12-28 1987-12-28 フォトレジスト組成物
JP63177752A JP2819562B2 (ja) 1988-07-15 1988-07-15 スチリル系化合物及びその製法

Publications (2)

Publication Number Publication Date
DE3855110D1 DE3855110D1 (de) 1996-04-18
DE3855110T2 true DE3855110T2 (de) 1996-08-29

Family

ID=26498182

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3855110T Expired - Fee Related DE3855110T2 (de) 1987-12-28 1988-12-28 Photoresist-Zusammensetzungen, die Styryl-Verbindungen enthalten
DE88121773T Expired - Fee Related DE3883195T2 (de) 1987-12-28 1988-12-28 Styryl-Verbindungen, Verfahren zu ihrer Herstellung und diese enthaltenden Photoresist-Zusammensetzungen.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE88121773T Expired - Fee Related DE3883195T2 (de) 1987-12-28 1988-12-28 Styryl-Verbindungen, Verfahren zu ihrer Herstellung und diese enthaltenden Photoresist-Zusammensetzungen.

Country Status (7)

Country Link
US (2) US5218136A (de)
EP (2) EP0510726B1 (de)
KR (1) KR0139093B1 (de)
CA (1) CA1329599C (de)
DE (2) DE3855110T2 (de)
MX (1) MX169489B (de)
SG (1) SG77100A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5362598A (en) * 1989-04-10 1994-11-08 Sumitomo Chemical Co., Ltd. Quinone diazide photoresist composition containing alkali-soluble resin and an ultraviolet ray absorbing dye
JP2682126B2 (ja) * 1989-04-10 1997-11-26 住友化学工業株式会社 フォトレジスト組成物
FR2651239B1 (fr) * 1989-08-29 1996-08-02 Thomson Csf Colorants pour polymeres actifs en optique non lineaire.
DE4004613A1 (de) * 1990-02-15 1991-08-22 Basf Ag Bichromophore cyanogruppen aufweisende methinfarbstoffe und ein verfahren zu ihrer uebertragung
CA2080554A1 (en) * 1991-10-15 1993-04-16 Mitsubishi Chemical Corporation Styrene derivatives
JPH05301838A (ja) * 1991-10-15 1993-11-16 Mitsubishi Kasei Corp スチレン誘導体
KR0148598B1 (ko) * 1994-11-21 1998-10-15 정선종 두꺼운 초전도채널층을 구비한 고온초전도 전계효과 트랜지스터의 제조방법
US5756257A (en) * 1996-02-14 1998-05-26 Imation Corp. Color proofing article incorporating novel antihalation dye
US5763135A (en) * 1996-09-30 1998-06-09 Clariant Finance (Bvi) Limited Light sensitive composition containing an arylhydrazo dye
DE10009580A1 (de) * 2000-02-29 2001-08-30 Bayer Ag Verfahren zum Massefärben von Kunststoffen
US6774116B2 (en) * 2001-04-17 2004-08-10 Cryolife, Inc. Prodrugs via acylation with cinnamate
JP5955583B2 (ja) * 2012-02-24 2016-07-20 株式会社Adeka 新規化合物、染料及び着色感光性組成物
CN103408461B (zh) * 2013-07-19 2015-10-07 浙江工业大学 一种2-氰基-3-取代苯基丙烯酰胺衍生物、其制备及应用

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2798090A (en) * 1953-03-02 1957-07-02 Eastman Kodak Co Process for preparing benzalaniline-3-sulfonic acid compounds
US2850520A (en) * 1956-07-18 1958-09-02 Sandoz Ag New water-insoluble styryl dyestuffs
US3331687A (en) * 1962-09-24 1967-07-18 Render Belipa G M B H Fa Electrophotographic material
AU5303579A (en) * 1979-01-26 1980-07-31 Gaf Corporation (2-cyano-3,3-diphenylacryloxy) alkylene compounds
US4369310A (en) * 1979-11-19 1983-01-18 Ciba-Geigy Ltd. Bleachable dyes
DE3128159A1 (de) * 1981-07-16 1983-02-03 Bayer Ag, 5090 Leverkusen Verfahren zur herstellung von styrylfarbstoffen
US4420555A (en) * 1982-07-19 1983-12-13 Eastman Kodak Company Photographic materials containing yellow filter dyes
JPS6093445A (ja) * 1983-10-28 1985-05-25 Ricoh Co Ltd 電子写真用感光体
JPS6193445A (ja) * 1984-10-12 1986-05-12 Fuji Photo Film Co Ltd 新規なフオトレジスト組成物
JPS622250A (ja) * 1985-06-28 1987-01-08 Toshiba Corp 感光性樹脂
CA1287768C (en) * 1986-01-27 1991-08-20 Thap Dominh Antireflective photoresist composition
US4914190A (en) * 1987-03-19 1990-04-03 Ciba-Geigy Corporation Tricyanovinyl-N,N-disubstituted anilines as disperse dyes
JPS63286843A (ja) * 1987-05-19 1988-11-24 Nippon Zeon Co Ltd ポジ型フォトレジスト組成物
DE3735852A1 (de) * 1987-10-23 1989-05-03 Hoechst Ag Positiv arbeitendes lichtempfindliches gemisch, enthaltend einen farbstoff, und daraus hergestelltes positiv arbeitendes lichtempfindliches aufzeichnungsmaterial
US4958043A (en) * 1988-04-18 1990-09-18 Eastman Kodak Company Novel methine compounds, polymers containing them and formed articles therefrom
EP0351367A3 (de) * 1988-07-11 1991-09-18 Ciba-Geigy Ag Dispersionsfarbstoffe, enthaltend eine Tricyanovinylgruppierung

Also Published As

Publication number Publication date
KR890009852A (ko) 1989-08-04
DE3883195D1 (de) 1993-09-16
US5218136A (en) 1993-06-08
EP0323631B1 (de) 1993-08-11
EP0323631A2 (de) 1989-07-12
EP0323631A3 (en) 1989-12-13
US5354644A (en) 1994-10-11
DE3855110D1 (de) 1996-04-18
SG77100A1 (en) 2000-12-19
EP0510726A1 (de) 1992-10-28
CA1329599C (en) 1994-05-17
KR0139093B1 (ko) 1998-05-01
EP0510726B1 (de) 1996-03-13
DE3883195T2 (de) 1994-02-17
MX169489B (es) 1993-07-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee