DE3828344C1 - - Google Patents
Info
- Publication number
- DE3828344C1 DE3828344C1 DE3828344A DE3828344A DE3828344C1 DE 3828344 C1 DE3828344 C1 DE 3828344C1 DE 3828344 A DE3828344 A DE 3828344A DE 3828344 A DE3828344 A DE 3828344A DE 3828344 C1 DE3828344 C1 DE 3828344C1
- Authority
- DE
- Germany
- Prior art keywords
- reaction
- trichlorosilane
- silicon
- mol
- hydrogen chloride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims description 34
- 239000005052 trichlorosilane Substances 0.000 claims description 34
- 238000006243 chemical reaction Methods 0.000 claims description 26
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 20
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 20
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 18
- 229910052710 silicon Inorganic materials 0.000 claims description 17
- 239000010703 silicon Substances 0.000 claims description 17
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 claims description 15
- 239000005049 silicon tetrachloride Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 11
- 239000005046 Chlorosilane Substances 0.000 claims description 8
- 239000000460 chlorine Substances 0.000 claims description 8
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical class Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims description 8
- 239000011541 reaction mixture Substances 0.000 claims description 7
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 6
- 229910052801 chlorine Inorganic materials 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 5
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 7
- 239000007789 gas Substances 0.000 description 5
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical compound ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910000077 silane Inorganic materials 0.000 description 3
- 229940035339 tri-chlor Drugs 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- KPZGRMZPZLOPBS-UHFFFAOYSA-N 1,3-dichloro-2,2-bis(chloromethyl)propane Chemical compound ClCC(CCl)(CCl)CCl KPZGRMZPZLOPBS-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000005660 chlorination reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000003961 organosilicon compounds Chemical class 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 230000002940 repellent Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
- C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
- C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
- C01B33/10747—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of tetrachloride
- C01B33/10752—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of tetrachloride from silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3828344A DE3828344C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-08-20 | 1988-08-20 | |
| US07/364,246 US4980143A (en) | 1988-08-20 | 1989-06-09 | Process for increasing the percentage of silicon tetrachloride |
| DE8989114776T DE58902675D1 (de) | 1988-08-20 | 1989-08-10 | Verfahren zur steigerung des anteils an siliciumtetrachlorid. |
| EP89114776A EP0355593B1 (de) | 1988-08-20 | 1989-08-10 | Verfahren zur Steigerung des Anteils an Siliciumtetrachlorid |
| DD89331915A DD283982A5 (de) | 1988-08-20 | 1989-08-18 | Verfahren zur steigerung des anteils an siliciumtetrachlorid |
| JP1213127A JPH0297415A (ja) | 1988-08-20 | 1989-08-21 | 塩化水素又は塩化水素と塩素との混合物と金属珪素含有物質との反応の際に四塩化珪素の量を上昇させるための方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3828344A DE3828344C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-08-20 | 1988-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE3828344C1 true DE3828344C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-07-06 |
Family
ID=6361272
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3828344A Expired DE3828344C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-08-20 | 1988-08-20 | |
| DE8989114776T Expired - Lifetime DE58902675D1 (de) | 1988-08-20 | 1989-08-10 | Verfahren zur steigerung des anteils an siliciumtetrachlorid. |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE8989114776T Expired - Lifetime DE58902675D1 (de) | 1988-08-20 | 1989-08-10 | Verfahren zur steigerung des anteils an siliciumtetrachlorid. |
Country Status (5)
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100495988B1 (ko) * | 1996-09-03 | 2005-09-30 | 가부시키가이샤 도쿠야마 | 사염화규소의제조방법 |
| CN1114559C (zh) * | 1996-09-03 | 2003-07-16 | 株式会社德山 | 四氯化硅的制造方法 |
| WO2010103633A1 (ja) * | 2009-03-11 | 2010-09-16 | 電気化学工業株式会社 | クロロシラン回収装置およびそれを用いたクロロシラン回収方法 |
| DE102011003453A1 (de) | 2011-02-01 | 2012-08-02 | Wacker Chemie Ag | Verfahren zur destillativen Reinigung von Chlorsilanen |
| JP5876581B2 (ja) * | 2011-10-20 | 2016-03-02 | アールイーシー シリコン インコーポレイテッド | ヒドロクロロシラン生産における汚損低減 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2943918A (en) * | 1956-02-11 | 1960-07-05 | Pechiney Prod Chimiques Sa | Process for manufacturing dense, extra pure silicon |
| DE1219454B (de) * | 1961-01-05 | 1966-06-23 | British Titan Products | Verfahren zur Herstellung von Siliciumtetrahalogenid |
| DE2161641A1 (de) * | 1971-12-11 | 1973-06-28 | Degussa | Verfahren zur herstellung metallfreier chlorsilane bei der chlorierung oder hydrochlorierung von ferrosilicium |
| DE2630542B2 (de) * | 1976-07-07 | 1980-05-08 | Dynamit Nobel Ag, 5210 Troisdorf | Verfahren zur Herstellung von Trichlorsilan und Siliciumtetrachlorid |
| DE3230590A1 (de) * | 1981-08-17 | 1983-03-10 | Nippon Aerosil Co., Ltd., Tokyo | Verfahren zur herstellung von trichlorsilan und siliciumtetrachlorid aus silicium und chlorwasserstoff |
| DE3303903A1 (de) * | 1982-02-16 | 1983-08-25 | General Electric Co., Schenectady, N.Y. | Verfahren zum herstellen von trichlorsilan aus silizium |
| US4526769A (en) * | 1983-07-18 | 1985-07-02 | Motorola, Inc. | Trichlorosilane production process |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2365273C3 (de) * | 1973-12-31 | 1980-09-25 | Dynamit Nobel Ag, 5210 Troisdorf | Verfahren zur Hydrochlorierung von elementaren Silicium |
| JPS57156318A (en) * | 1981-03-16 | 1982-09-27 | Koujiyundo Silicon Kk | Production of trichlorosilane |
| DE3809784C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1988-03-23 | 1989-07-13 | Huels Ag, 4370 Marl, De |
-
1988
- 1988-08-20 DE DE3828344A patent/DE3828344C1/de not_active Expired
-
1989
- 1989-06-09 US US07/364,246 patent/US4980143A/en not_active Expired - Fee Related
- 1989-08-10 DE DE8989114776T patent/DE58902675D1/de not_active Expired - Lifetime
- 1989-08-10 EP EP89114776A patent/EP0355593B1/de not_active Expired - Lifetime
- 1989-08-18 DD DD89331915A patent/DD283982A5/de not_active IP Right Cessation
- 1989-08-21 JP JP1213127A patent/JPH0297415A/ja active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2943918A (en) * | 1956-02-11 | 1960-07-05 | Pechiney Prod Chimiques Sa | Process for manufacturing dense, extra pure silicon |
| DE1219454B (de) * | 1961-01-05 | 1966-06-23 | British Titan Products | Verfahren zur Herstellung von Siliciumtetrahalogenid |
| DE2161641A1 (de) * | 1971-12-11 | 1973-06-28 | Degussa | Verfahren zur herstellung metallfreier chlorsilane bei der chlorierung oder hydrochlorierung von ferrosilicium |
| DE2630542B2 (de) * | 1976-07-07 | 1980-05-08 | Dynamit Nobel Ag, 5210 Troisdorf | Verfahren zur Herstellung von Trichlorsilan und Siliciumtetrachlorid |
| DE3230590A1 (de) * | 1981-08-17 | 1983-03-10 | Nippon Aerosil Co., Ltd., Tokyo | Verfahren zur herstellung von trichlorsilan und siliciumtetrachlorid aus silicium und chlorwasserstoff |
| DE3230590C2 (de) * | 1981-08-17 | 1985-03-21 | Nippon Aerosil Co., Ltd., Tokio/Tokyo | Verfahren zur Herstellung von Trichlorsilan und Siliciumtetrachlorid aus Silicium und Chlorwasserstoff |
| DE3303903A1 (de) * | 1982-02-16 | 1983-08-25 | General Electric Co., Schenectady, N.Y. | Verfahren zum herstellen von trichlorsilan aus silizium |
| US4526769A (en) * | 1983-07-18 | 1985-07-02 | Motorola, Inc. | Trichlorosilane production process |
Non-Patent Citations (1)
| Title |
|---|
| Chemical Abstracts 1963(58), S. 4190g * |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0355593A3 (de) | 1991-04-10 |
| US4980143A (en) | 1990-12-25 |
| EP0355593A2 (de) | 1990-02-28 |
| EP0355593B1 (de) | 1992-11-11 |
| JPH0297415A (ja) | 1990-04-10 |
| DD283982A5 (de) | 1990-10-31 |
| DE58902675D1 (de) | 1992-12-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8100 | Publication of the examined application without publication of unexamined application | ||
| D1 | Grant (no unexamined application published) patent law 81 | ||
| 8363 | Opposition against the patent | ||
| 8331 | Complete revocation |