DE3762470D1 - Elektronzyklotronresonanz-ionenquelle. - Google Patents

Elektronzyklotronresonanz-ionenquelle.

Info

Publication number
DE3762470D1
DE3762470D1 DE8787401608T DE3762470T DE3762470D1 DE 3762470 D1 DE3762470 D1 DE 3762470D1 DE 8787401608 T DE8787401608 T DE 8787401608T DE 3762470 T DE3762470 T DE 3762470T DE 3762470 D1 DE3762470 D1 DE 3762470D1
Authority
DE
Germany
Prior art keywords
electron
ion source
resonance ion
cyclotronic resonance
cyclotronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787401608T
Other languages
English (en)
Inventor
Bernard Jacquot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE3762470D1 publication Critical patent/DE3762470D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
DE8787401608T 1986-07-10 1987-07-08 Elektronzyklotronresonanz-ionenquelle. Expired - Lifetime DE3762470D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8610066A FR2601498B1 (fr) 1986-07-10 1986-07-10 Source d'ions a resonance cyclotronique electronique

Publications (1)

Publication Number Publication Date
DE3762470D1 true DE3762470D1 (de) 1990-05-31

Family

ID=9337299

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787401608T Expired - Lifetime DE3762470D1 (de) 1986-07-10 1987-07-08 Elektronzyklotronresonanz-ionenquelle.

Country Status (3)

Country Link
EP (1) EP0252845B1 (de)
DE (1) DE3762470D1 (de)
FR (1) FR2601498B1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994003919A1 (de) * 1992-08-08 1994-02-17 Andrae Juergen Verfahren zur erzeugung von strahlen beliebiger, hochgeladener ionen niedriger kinetischer energie sowie vorrichtung zur durchführung des verfahrens
FR2701797B1 (fr) * 1993-02-18 1995-03-31 Commissariat Energie Atomique Coupleur de transfert d'une puissance micro-onde vers une nappe de plasma et source micro-onde linéaire pour le traitement de surfaces par plasma .
FR2705584B1 (fr) * 1993-05-26 1995-06-30 Commissariat Energie Atomique Dispositif de séparation isotopique par résonance cyclotronique ionique.
DE4419970A1 (de) * 1994-06-08 1995-12-21 Juergen Prof Dr Andrae Vorrichtung zur Erzeugung von Strahlen hochgeladener Ionen
FR2756097B1 (fr) * 1996-11-20 1998-12-11 Commissariat Energie Atomique Source a resonance cyclotronique electronique pour la production d'ions multicharges en milieu hostile
DE19933762C2 (de) * 1999-07-19 2002-10-17 Juergen Andrae Gepulste magnetische Öffnung von Elektronen-Zyklotron-Resonanz-Jonenquellen zur Erzeugung kurzer, stromstarker Pulse hoch geladener Ionen oder von Elektronen

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1158958A (fr) * 1956-10-03 1958-06-20 Csf Perfectionnements aux sources d'ions utilisant un champ de haute fréquence
US4529571A (en) * 1982-10-27 1985-07-16 The United States Of America As Represented By The United States Department Of Energy Single-ring magnetic cusp low gas pressure ion source
FR2548436B1 (fr) * 1983-06-30 1986-01-10 Commissariat Energie Atomique Procede de production d'ions lourds multicharges et sources d'ions en regime impulsionnel, permettant la mise en oeuvre du procede
FR2551302B1 (fr) * 1983-08-30 1986-03-14 Commissariat Energie Atomique Structure ferromagnetique d'une source d'ions creee par des aimants permanents et des solenoides
FR2556498B1 (fr) * 1983-12-07 1986-09-05 Commissariat Energie Atomique Source d'ions multicharges a plusieurs zones de resonance cyclotronique electronique
FR2592518B1 (fr) * 1985-12-26 1988-02-12 Commissariat Energie Atomique Sources d'ions a resonance cyclotronique electronique

Also Published As

Publication number Publication date
EP0252845B1 (de) 1990-04-25
FR2601498B1 (fr) 1988-10-07
EP0252845A1 (de) 1988-01-13
FR2601498A1 (fr) 1988-01-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee