FR2601498B1 - Source d'ions a resonance cyclotronique electronique - Google Patents

Source d'ions a resonance cyclotronique electronique

Info

Publication number
FR2601498B1
FR2601498B1 FR8610066A FR8610066A FR2601498B1 FR 2601498 B1 FR2601498 B1 FR 2601498B1 FR 8610066 A FR8610066 A FR 8610066A FR 8610066 A FR8610066 A FR 8610066A FR 2601498 B1 FR2601498 B1 FR 2601498B1
Authority
FR
France
Prior art keywords
ion source
cyclotronic resonance
electronic cyclotronic
electronic
resonance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8610066A
Other languages
English (en)
Other versions
FR2601498A1 (fr
Inventor
Bernard Jacquot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR8610066A priority Critical patent/FR2601498B1/fr
Priority to DE8787401608T priority patent/DE3762470D1/de
Priority to EP87401608A priority patent/EP0252845B1/fr
Publication of FR2601498A1 publication Critical patent/FR2601498A1/fr
Application granted granted Critical
Publication of FR2601498B1 publication Critical patent/FR2601498B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
FR8610066A 1986-07-10 1986-07-10 Source d'ions a resonance cyclotronique electronique Expired FR2601498B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR8610066A FR2601498B1 (fr) 1986-07-10 1986-07-10 Source d'ions a resonance cyclotronique electronique
DE8787401608T DE3762470D1 (de) 1986-07-10 1987-07-08 Elektronzyklotronresonanz-ionenquelle.
EP87401608A EP0252845B1 (fr) 1986-07-10 1987-07-08 Source d'ions à résonance cyclotronique électronique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8610066A FR2601498B1 (fr) 1986-07-10 1986-07-10 Source d'ions a resonance cyclotronique electronique

Publications (2)

Publication Number Publication Date
FR2601498A1 FR2601498A1 (fr) 1988-01-15
FR2601498B1 true FR2601498B1 (fr) 1988-10-07

Family

ID=9337299

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8610066A Expired FR2601498B1 (fr) 1986-07-10 1986-07-10 Source d'ions a resonance cyclotronique electronique

Country Status (3)

Country Link
EP (1) EP0252845B1 (fr)
DE (1) DE3762470D1 (fr)
FR (1) FR2601498B1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU4705593A (en) * 1992-08-08 1994-03-03 Jurgen Andra Process and device for generating beams of any highly charged ions having low kinetic energy
FR2701797B1 (fr) * 1993-02-18 1995-03-31 Commissariat Energie Atomique Coupleur de transfert d'une puissance micro-onde vers une nappe de plasma et source micro-onde linéaire pour le traitement de surfaces par plasma .
FR2705584B1 (fr) * 1993-05-26 1995-06-30 Commissariat Energie Atomique Dispositif de séparation isotopique par résonance cyclotronique ionique.
DE4419970A1 (de) * 1994-06-08 1995-12-21 Juergen Prof Dr Andrae Vorrichtung zur Erzeugung von Strahlen hochgeladener Ionen
FR2756097B1 (fr) * 1996-11-20 1998-12-11 Commissariat Energie Atomique Source a resonance cyclotronique electronique pour la production d'ions multicharges en milieu hostile
DE19933762C2 (de) * 1999-07-19 2002-10-17 Juergen Andrae Gepulste magnetische Öffnung von Elektronen-Zyklotron-Resonanz-Jonenquellen zur Erzeugung kurzer, stromstarker Pulse hoch geladener Ionen oder von Elektronen

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1158958A (fr) * 1956-10-03 1958-06-20 Csf Perfectionnements aux sources d'ions utilisant un champ de haute fréquence
US4529571A (en) * 1982-10-27 1985-07-16 The United States Of America As Represented By The United States Department Of Energy Single-ring magnetic cusp low gas pressure ion source
FR2548436B1 (fr) * 1983-06-30 1986-01-10 Commissariat Energie Atomique Procede de production d'ions lourds multicharges et sources d'ions en regime impulsionnel, permettant la mise en oeuvre du procede
FR2551302B1 (fr) * 1983-08-30 1986-03-14 Commissariat Energie Atomique Structure ferromagnetique d'une source d'ions creee par des aimants permanents et des solenoides
FR2556498B1 (fr) * 1983-12-07 1986-09-05 Commissariat Energie Atomique Source d'ions multicharges a plusieurs zones de resonance cyclotronique electronique
FR2592518B1 (fr) * 1985-12-26 1988-02-12 Commissariat Energie Atomique Sources d'ions a resonance cyclotronique electronique

Also Published As

Publication number Publication date
EP0252845B1 (fr) 1990-04-25
DE3762470D1 (de) 1990-05-31
FR2601498A1 (fr) 1988-01-15
EP0252845A1 (fr) 1988-01-13

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Legal Events

Date Code Title Description
ST Notification of lapse