FR2676593B1 - Source d'ions a resonance cyclotronique electronique. - Google Patents

Source d'ions a resonance cyclotronique electronique.

Info

Publication number
FR2676593B1
FR2676593B1 FR9105803A FR9105803A FR2676593B1 FR 2676593 B1 FR2676593 B1 FR 2676593B1 FR 9105803 A FR9105803 A FR 9105803A FR 9105803 A FR9105803 A FR 9105803A FR 2676593 B1 FR2676593 B1 FR 2676593B1
Authority
FR
France
Prior art keywords
ion source
cyclotronic resonance
electronic cyclotronic
electronic
resonance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9105803A
Other languages
English (en)
Other versions
FR2676593A1 (fr
Inventor
Bernard Jacquot
Marc Delaunay
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR9105803A priority Critical patent/FR2676593B1/fr
Priority to US07/877,544 priority patent/US5336961A/en
Priority to JP4145056A priority patent/JPH06103943A/ja
Priority to EP92401292A priority patent/EP0514255B1/fr
Priority to DE69207641T priority patent/DE69207641T2/de
Publication of FR2676593A1 publication Critical patent/FR2676593A1/fr
Application granted granted Critical
Publication of FR2676593B1 publication Critical patent/FR2676593B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field
FR9105803A 1991-05-14 1991-05-14 Source d'ions a resonance cyclotronique electronique. Expired - Fee Related FR2676593B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR9105803A FR2676593B1 (fr) 1991-05-14 1991-05-14 Source d'ions a resonance cyclotronique electronique.
US07/877,544 US5336961A (en) 1991-05-14 1992-05-01 Source of ions with electronic cyclotronic resonance
JP4145056A JPH06103943A (ja) 1991-05-14 1992-05-12 電子サイクロトロン共鳴によるイオン源
EP92401292A EP0514255B1 (fr) 1991-05-14 1992-05-12 Source d'ions à résonance cyclotronique électronique
DE69207641T DE69207641T2 (de) 1991-05-14 1992-05-12 Elektronzyklotronresonanz-Ionenquelle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9105803A FR2676593B1 (fr) 1991-05-14 1991-05-14 Source d'ions a resonance cyclotronique electronique.

Publications (2)

Publication Number Publication Date
FR2676593A1 FR2676593A1 (fr) 1992-11-20
FR2676593B1 true FR2676593B1 (fr) 1997-01-03

Family

ID=9412750

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9105803A Expired - Fee Related FR2676593B1 (fr) 1991-05-14 1991-05-14 Source d'ions a resonance cyclotronique electronique.

Country Status (5)

Country Link
US (1) US5336961A (fr)
EP (1) EP0514255B1 (fr)
JP (1) JPH06103943A (fr)
DE (1) DE69207641T2 (fr)
FR (1) FR2676593B1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2730858B1 (fr) * 1995-02-16 1997-03-21 Plasmion Dispositif a resonance cyclotron electronique pour creer un faisceau d'ions
JP4868330B2 (ja) * 2004-10-08 2012-02-01 独立行政法人科学技術振興機構 多価イオン発生源およびこの発生源を用いた荷電粒子ビーム装置
FR2933532B1 (fr) * 2008-07-02 2010-09-03 Commissariat Energie Atomique Dispositif generateur d'ions a resonance cyclotronique electronique

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2595868B1 (fr) * 1986-03-13 1988-05-13 Commissariat Energie Atomique Source d'ions a resonance cyclotronique electronique a injection coaxiale d'ondes electromagnetiques
US4788473A (en) * 1986-06-20 1988-11-29 Fujitsu Limited Plasma generating device with stepped waveguide transition
JP2515810B2 (ja) * 1987-07-10 1996-07-10 東京エレクトロン東北株式会社 プラズマ処理装置
US5132597A (en) * 1991-03-26 1992-07-21 Hughes Aircraft Company Hollow cathode plasma switch with magnetic field

Also Published As

Publication number Publication date
FR2676593A1 (fr) 1992-11-20
DE69207641D1 (de) 1996-02-29
EP0514255B1 (fr) 1996-01-17
EP0514255A1 (fr) 1992-11-19
US5336961A (en) 1994-08-09
JPH06103943A (ja) 1994-04-15
DE69207641T2 (de) 1996-09-05

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Legal Events

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ST Notification of lapse