FR2730858B1 - Dispositif a resonance cyclotron electronique pour creer un faisceau d'ions - Google Patents

Dispositif a resonance cyclotron electronique pour creer un faisceau d'ions

Info

Publication number
FR2730858B1
FR2730858B1 FR9501771A FR9501771A FR2730858B1 FR 2730858 B1 FR2730858 B1 FR 2730858B1 FR 9501771 A FR9501771 A FR 9501771A FR 9501771 A FR9501771 A FR 9501771A FR 2730858 B1 FR2730858 B1 FR 2730858B1
Authority
FR
France
Prior art keywords
creating
ion beam
cyclotron resonance
resonance device
electronic cyclotron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9501771A
Other languages
English (en)
Other versions
FR2730858A1 (fr
Inventor
Louis Wartski
Christian Schwebel
Jean Aubert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plasmion
Original Assignee
Plasmion
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plasmion filed Critical Plasmion
Priority to FR9501771A priority Critical patent/FR2730858B1/fr
Priority to PCT/FR1996/000259 priority patent/WO1996025755A1/fr
Priority to EP96904156A priority patent/EP0809855A1/fr
Priority to JP8524727A priority patent/JPH11500570A/ja
Publication of FR2730858A1 publication Critical patent/FR2730858A1/fr
Application granted granted Critical
Publication of FR2730858B1 publication Critical patent/FR2730858B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Particle Accelerators (AREA)
FR9501771A 1995-02-16 1995-02-16 Dispositif a resonance cyclotron electronique pour creer un faisceau d'ions Expired - Fee Related FR2730858B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR9501771A FR2730858B1 (fr) 1995-02-16 1995-02-16 Dispositif a resonance cyclotron electronique pour creer un faisceau d'ions
PCT/FR1996/000259 WO1996025755A1 (fr) 1995-02-16 1996-02-16 Dispositif a resonance cyclotron electronique pour creer un faisceau d'ions
EP96904156A EP0809855A1 (fr) 1995-02-16 1996-02-16 Dispositif a resonance cyclotron electronique pour creer un faisceau d'ions
JP8524727A JPH11500570A (ja) 1995-02-16 1996-02-16 イオンビームを生成するための電子サイクロトロン共鳴装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9501771A FR2730858B1 (fr) 1995-02-16 1995-02-16 Dispositif a resonance cyclotron electronique pour creer un faisceau d'ions

Publications (2)

Publication Number Publication Date
FR2730858A1 FR2730858A1 (fr) 1996-08-23
FR2730858B1 true FR2730858B1 (fr) 1997-03-21

Family

ID=9476188

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9501771A Expired - Fee Related FR2730858B1 (fr) 1995-02-16 1995-02-16 Dispositif a resonance cyclotron electronique pour creer un faisceau d'ions

Country Status (4)

Country Link
EP (1) EP0809855A1 (fr)
JP (1) JPH11500570A (fr)
FR (1) FR2730858B1 (fr)
WO (1) WO1996025755A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE530325C2 (sv) * 2006-09-29 2008-05-06 Scania Cv Ab Kylararrangemang
CN104134215B (zh) * 2014-07-29 2018-10-26 缪荣明 高仟伏dr对接pacs系统的图像减影方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR910016054A (ko) * 1990-02-23 1991-09-30 미다 가쓰시게 마이크로 전자 장치용 표면 처리 장치 및 그 방법
US5262610A (en) * 1991-03-29 1993-11-16 The United States Of America As Represented By The Air Force Low particulate reliability enhanced remote microwave plasma discharge device
FR2676593B1 (fr) * 1991-05-14 1997-01-03 Commissariat Energie Atomique Source d'ions a resonance cyclotronique electronique.
JPH05263223A (ja) * 1992-03-14 1993-10-12 Nitto Kohki Co Ltd 内側部を有する被コーティング体のコーティング方法及び装置

Also Published As

Publication number Publication date
JPH11500570A (ja) 1999-01-12
EP0809855A1 (fr) 1997-12-03
FR2730858A1 (fr) 1996-08-23
WO1996025755A1 (fr) 1996-08-22

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Legal Events

Date Code Title Description
ST Notification of lapse