DE69207641D1 - Elektronzyklotronresonanz-Ionenquelle - Google Patents

Elektronzyklotronresonanz-Ionenquelle

Info

Publication number
DE69207641D1
DE69207641D1 DE69207641T DE69207641T DE69207641D1 DE 69207641 D1 DE69207641 D1 DE 69207641D1 DE 69207641 T DE69207641 T DE 69207641T DE 69207641 T DE69207641 T DE 69207641T DE 69207641 D1 DE69207641 D1 DE 69207641D1
Authority
DE
Germany
Prior art keywords
ion source
cyclotron resonance
electron cyclotron
resonance ion
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69207641T
Other languages
English (en)
Other versions
DE69207641T2 (de
Inventor
Bernard Jacquot
Marc Delaunay
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69207641D1 publication Critical patent/DE69207641D1/de
Publication of DE69207641T2 publication Critical patent/DE69207641T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
DE69207641T 1991-05-14 1992-05-12 Elektronzyklotronresonanz-Ionenquelle Expired - Fee Related DE69207641T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9105803A FR2676593B1 (fr) 1991-05-14 1991-05-14 Source d'ions a resonance cyclotronique electronique.

Publications (2)

Publication Number Publication Date
DE69207641D1 true DE69207641D1 (de) 1996-02-29
DE69207641T2 DE69207641T2 (de) 1996-09-05

Family

ID=9412750

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69207641T Expired - Fee Related DE69207641T2 (de) 1991-05-14 1992-05-12 Elektronzyklotronresonanz-Ionenquelle

Country Status (5)

Country Link
US (1) US5336961A (de)
EP (1) EP0514255B1 (de)
JP (1) JPH06103943A (de)
DE (1) DE69207641T2 (de)
FR (1) FR2676593B1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2730858B1 (fr) * 1995-02-16 1997-03-21 Plasmion Dispositif a resonance cyclotron electronique pour creer un faisceau d'ions
JP4868330B2 (ja) * 2004-10-08 2012-02-01 独立行政法人科学技術振興機構 多価イオン発生源およびこの発生源を用いた荷電粒子ビーム装置
FR2933532B1 (fr) 2008-07-02 2010-09-03 Commissariat Energie Atomique Dispositif generateur d'ions a resonance cyclotronique electronique

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2595868B1 (fr) * 1986-03-13 1988-05-13 Commissariat Energie Atomique Source d'ions a resonance cyclotronique electronique a injection coaxiale d'ondes electromagnetiques
US4788473A (en) * 1986-06-20 1988-11-29 Fujitsu Limited Plasma generating device with stepped waveguide transition
JP2515810B2 (ja) * 1987-07-10 1996-07-10 東京エレクトロン東北株式会社 プラズマ処理装置
US5132597A (en) * 1991-03-26 1992-07-21 Hughes Aircraft Company Hollow cathode plasma switch with magnetic field

Also Published As

Publication number Publication date
EP0514255A1 (de) 1992-11-19
DE69207641T2 (de) 1996-09-05
FR2676593A1 (fr) 1992-11-20
FR2676593B1 (fr) 1997-01-03
EP0514255B1 (de) 1996-01-17
JPH06103943A (ja) 1994-04-15
US5336961A (en) 1994-08-09

Similar Documents

Publication Publication Date Title
DE68921370D1 (de) Electronzyklotronresonanz-Ionenquelle.
DE69207212T2 (de) Hochfrequenz-ionenquelle
DE59010044D1 (de) Ionen-Zyklotron-Resonanz-Spektrometer
DE69408017T2 (de) Ionen implantierer
DE69621411D1 (de) Ionenquelle mit geschlossener Elektronendrift
DE69219618D1 (de) Coronaentladung-ionenquelle
DE68926923D1 (de) Mikrowellenionenquelle
DE68925898D1 (de) Grossflächige uniforme elektronenquelle
DE4494105T1 (de) Miniatur Quadrupol-Anordnung
DE69525980T2 (de) Elektronenquelle
DE69732364D1 (de) Ionenquelle
DK0604528T3 (da) Ionmobilitetsspektrometriudstyr
DE3475244D1 (en) Multicharged ion source with several electron cyclotron resonance regions
EP0488371A3 (en) Mass spectrometer ion source
DE59107831D1 (de) Ionenquelle
DE3662576D1 (en) Electron cyclotron resonance negative ion source
KR900017084A (ko) 이온원
DE69516071D1 (de) Elektronenquelle
DE69207641D1 (de) Elektronzyklotronresonanz-Ionenquelle
DE3762470D1 (de) Elektronzyklotronresonanz-ionenquelle.
DE3669615D1 (de) Elektronen-zyklotron-resonanz-ionenquelle.
DE3874386D1 (de) Vakuum-lichtbogen-ionenquelle.
EP0481198A3 (en) Scanned electron cyclotron resonance plasma source
DE69525563T2 (de) Ionenimplantierungsgerät
DE69617417D1 (de) Einfach-Potential Ionenquelle

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee