DE3669615D1 - Elektronen-zyklotron-resonanz-ionenquelle. - Google Patents

Elektronen-zyklotron-resonanz-ionenquelle.

Info

Publication number
DE3669615D1
DE3669615D1 DE8686402874T DE3669615T DE3669615D1 DE 3669615 D1 DE3669615 D1 DE 3669615D1 DE 8686402874 T DE8686402874 T DE 8686402874T DE 3669615 T DE3669615 T DE 3669615T DE 3669615 D1 DE3669615 D1 DE 3669615D1
Authority
DE
Germany
Prior art keywords
ion source
cyclotron resonance
electron cyclotron
resonance ion
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686402874T
Other languages
English (en)
Inventor
Bernard Jacquot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE3669615D1 publication Critical patent/DE3669615D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
DE8686402874T 1985-12-26 1986-12-19 Elektronen-zyklotron-resonanz-ionenquelle. Expired - Lifetime DE3669615D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8519252A FR2592518B1 (fr) 1985-12-26 1985-12-26 Sources d'ions a resonance cyclotronique electronique

Publications (1)

Publication Number Publication Date
DE3669615D1 true DE3669615D1 (de) 1990-04-19

Family

ID=9326207

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686402874T Expired - Lifetime DE3669615D1 (de) 1985-12-26 1986-12-19 Elektronen-zyklotron-resonanz-ionenquelle.

Country Status (3)

Country Link
EP (1) EP0232651B1 (de)
DE (1) DE3669615D1 (de)
FR (1) FR2592518B1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2601498B1 (fr) * 1986-07-10 1988-10-07 Commissariat Energie Atomique Source d'ions a resonance cyclotronique electronique
DE3810197A1 (de) * 1987-03-27 1988-10-13 Mitsubishi Electric Corp Plasma-bearbeitungseinrichtung
JP2618001B2 (ja) * 1988-07-13 1997-06-11 三菱電機株式会社 プラズマ反応装置
DE4419970A1 (de) * 1994-06-08 1995-12-21 Juergen Prof Dr Andrae Vorrichtung zur Erzeugung von Strahlen hochgeladener Ionen

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2475798A1 (fr) * 1980-02-13 1981-08-14 Commissariat Energie Atomique Procede et dispositif de production d'ions lourds fortement charges et une application mettant en oeuvre le procede
FR2556498B1 (fr) * 1983-12-07 1986-09-05 Commissariat Energie Atomique Source d'ions multicharges a plusieurs zones de resonance cyclotronique electronique

Also Published As

Publication number Publication date
FR2592518B1 (fr) 1988-02-12
EP0232651A1 (de) 1987-08-19
FR2592518A1 (fr) 1987-07-03
EP0232651B1 (de) 1990-03-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee