FR2592518B1 - Sources d'ions a resonance cyclotronique electronique - Google Patents

Sources d'ions a resonance cyclotronique electronique

Info

Publication number
FR2592518B1
FR2592518B1 FR8519252A FR8519252A FR2592518B1 FR 2592518 B1 FR2592518 B1 FR 2592518B1 FR 8519252 A FR8519252 A FR 8519252A FR 8519252 A FR8519252 A FR 8519252A FR 2592518 B1 FR2592518 B1 FR 2592518B1
Authority
FR
France
Prior art keywords
ion sources
cyclotronic resonance
electronic cyclotronic
electronic
resonance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8519252A
Other languages
English (en)
Other versions
FR2592518A1 (fr
Inventor
Bernard Jacquot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR8519252A priority Critical patent/FR2592518B1/fr
Priority to DE8686402874T priority patent/DE3669615D1/de
Priority to EP19860402874 priority patent/EP0232651B1/fr
Publication of FR2592518A1 publication Critical patent/FR2592518A1/fr
Application granted granted Critical
Publication of FR2592518B1 publication Critical patent/FR2592518B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
FR8519252A 1985-12-26 1985-12-26 Sources d'ions a resonance cyclotronique electronique Expired FR2592518B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR8519252A FR2592518B1 (fr) 1985-12-26 1985-12-26 Sources d'ions a resonance cyclotronique electronique
DE8686402874T DE3669615D1 (de) 1985-12-26 1986-12-19 Elektronen-zyklotron-resonanz-ionenquelle.
EP19860402874 EP0232651B1 (fr) 1985-12-26 1986-12-19 Source d'ions à résonance cyclotronique électronique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8519252A FR2592518B1 (fr) 1985-12-26 1985-12-26 Sources d'ions a resonance cyclotronique electronique

Publications (2)

Publication Number Publication Date
FR2592518A1 FR2592518A1 (fr) 1987-07-03
FR2592518B1 true FR2592518B1 (fr) 1988-02-12

Family

ID=9326207

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8519252A Expired FR2592518B1 (fr) 1985-12-26 1985-12-26 Sources d'ions a resonance cyclotronique electronique

Country Status (3)

Country Link
EP (1) EP0232651B1 (fr)
DE (1) DE3669615D1 (fr)
FR (1) FR2592518B1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2601498B1 (fr) * 1986-07-10 1988-10-07 Commissariat Energie Atomique Source d'ions a resonance cyclotronique electronique
DE3810197A1 (de) * 1987-03-27 1988-10-13 Mitsubishi Electric Corp Plasma-bearbeitungseinrichtung
JP2618001B2 (ja) * 1988-07-13 1997-06-11 三菱電機株式会社 プラズマ反応装置
DE4419970A1 (de) * 1994-06-08 1995-12-21 Juergen Prof Dr Andrae Vorrichtung zur Erzeugung von Strahlen hochgeladener Ionen

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2475798A1 (fr) * 1980-02-13 1981-08-14 Commissariat Energie Atomique Procede et dispositif de production d'ions lourds fortement charges et une application mettant en oeuvre le procede
FR2556498B1 (fr) * 1983-12-07 1986-09-05 Commissariat Energie Atomique Source d'ions multicharges a plusieurs zones de resonance cyclotronique electronique

Also Published As

Publication number Publication date
DE3669615D1 (de) 1990-04-19
EP0232651B1 (fr) 1990-03-14
FR2592518A1 (fr) 1987-07-03
EP0232651A1 (fr) 1987-08-19

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Legal Events

Date Code Title Description
ST Notification of lapse