DE3881418D1 - Hohlkathoden-ionenquellen. - Google Patents
Hohlkathoden-ionenquellen.Info
- Publication number
- DE3881418D1 DE3881418D1 DE8888850086T DE3881418T DE3881418D1 DE 3881418 D1 DE3881418 D1 DE 3881418D1 DE 8888850086 T DE8888850086 T DE 8888850086T DE 3881418 T DE3881418 T DE 3881418T DE 3881418 D1 DE3881418 D1 DE 3881418D1
- Authority
- DE
- Germany
- Prior art keywords
- cave
- ion sources
- cathode ion
- cathode
- sources
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62054110A JP2519709B2 (ja) | 1987-03-11 | 1987-03-11 | ホロ−カソ−ド型イオン源 |
JP63022065A JP2720971B2 (ja) | 1988-02-03 | 1988-02-03 | ホローカソード型イオン源 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3881418D1 true DE3881418D1 (de) | 1993-07-08 |
DE3881418T2 DE3881418T2 (de) | 1993-11-04 |
Family
ID=26359224
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE88850086T Expired - Fee Related DE3881418T2 (de) | 1987-03-11 | 1988-03-10 | Hohlkathoden-ionenquellen. |
Country Status (3)
Country | Link |
---|---|
US (1) | US4894546A (de) |
EP (1) | EP0282467B1 (de) |
DE (1) | DE3881418T2 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2639756B1 (fr) * | 1988-11-30 | 1994-05-13 | Centre Nal Recherc Scientifique | Source de vapeurs et d'ions |
US5126163A (en) * | 1990-09-05 | 1992-06-30 | Northeastern University | Method for metal ion implantation using multiple pulsed arcs |
IT1246682B (it) * | 1991-03-04 | 1994-11-24 | Proel Tecnologie Spa | Dispositivo a catodo cavo non riscaldato per la generazione dinamica di plasma |
DE59202116D1 (de) * | 1991-04-23 | 1995-06-14 | Balzers Hochvakuum | Verfahren zur Abtragung von Material von einer Oberfläche in einer Vakuumkammer. |
IT1262897B (it) * | 1992-03-11 | 1996-07-22 | Proel Tecnologie Spa | Generatore di plasma perfezionato e relativo metodo di ionizzazione |
DE4208764C2 (de) * | 1992-03-19 | 1994-02-24 | Kernforschungsz Karlsruhe | Gasgefüllter Teilchenbeschleuniger |
FR2722213B1 (fr) * | 1994-07-05 | 1996-09-20 | Plasmion | Dispositif pour creer un faisceau d'ions d'energie ajustable notamment pour le traitement au defile et sous vide de surfaces de grandes dimensions |
US5604350A (en) * | 1995-11-16 | 1997-02-18 | Taiwan Semiconductor Manufacturing Company Ltd. | Fitting for an ion source assembly |
DE19744060C2 (de) * | 1997-10-06 | 1999-08-12 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung zur Oberflächenbehandlung von Substraten |
US6676288B1 (en) | 1998-09-14 | 2004-01-13 | The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration | Process for thermal imaging scanning of a swaged heater for an anode subassembly of a hollow cathode assembly |
US6064156A (en) | 1998-09-14 | 2000-05-16 | The United States Of America As Represented By The Administrator Of Nasa | Process for ignition of gaseous electrical discharge between electrodes of a hollow cathode assembly |
US6547979B1 (en) * | 2000-08-31 | 2003-04-15 | Micron Technology, Inc. | Methods of enhancing selectivity of etching silicon dioxide relative to one or more organic substances; and plasma reaction chambers |
DE10058326C1 (de) * | 2000-11-24 | 2002-06-13 | Astrium Gmbh | Induktiv gekoppelte Hochfrequenz-Elektronenquelle mit reduziertem Leistungsbedarf durch elektrostatischen Einschluss von Elektronen |
GB0131097D0 (en) | 2001-12-31 | 2002-02-13 | Applied Materials Inc | Ion sources |
DE10336273A1 (de) * | 2003-08-07 | 2005-03-10 | Fraunhofer Ges Forschung | Vorrichtung zur Erzeugung von EUV- und weicher Röntgenstrahlung |
KR100553716B1 (ko) * | 2004-08-02 | 2006-02-24 | 삼성전자주식회사 | 이온 주입 설비의 이온 소스부 |
DE102010011592A1 (de) * | 2010-03-16 | 2011-09-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Hohlkathoden-Plasmaquelle sowie Verwendung der Hohlkathoden-Plasmaquelle |
CN102497721B (zh) * | 2011-11-29 | 2014-04-30 | 北京大学 | 双空心阴极以及双空心阴极等离子体装置和应用 |
CN109628903B (zh) * | 2018-11-20 | 2020-01-21 | 深圳市华星光电技术有限公司 | 基板载具、溅镀装置及溅镀方法 |
RU2740146C1 (ru) * | 2019-10-10 | 2021-01-11 | Евгений Олегович Щербаков | Ионный источник (ионная пушка) |
CN113223921B (zh) * | 2021-03-31 | 2023-03-14 | 杭州谱育科技发展有限公司 | 多通道式离子源及其工作方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2501882A (en) * | 1948-03-18 | 1950-03-28 | Research Corp | High-voltage high-vacuum acceleration tube |
US2770755A (en) * | 1954-02-05 | 1956-11-13 | Myron L Good | Linear accelerator |
GB1488657A (en) * | 1973-09-24 | 1977-10-12 | Ion Tech Ltd | Ion sources |
DE3038575A1 (de) * | 1980-10-13 | 1982-04-22 | Sergej Ivanovič Tomsk Beljuk | Elektronen-ionenquelle |
US4475063A (en) * | 1981-06-22 | 1984-10-02 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Hollow cathode apparatus |
DD217082A1 (de) * | 1983-08-11 | 1985-01-02 | Karl Marx Stadt Tech Hochschul | Einstrahl-ionenquelle |
JPS60170141A (ja) * | 1984-02-13 | 1985-09-03 | Toshiba Corp | イオン源装置 |
KR900003310B1 (ko) * | 1986-05-27 | 1990-05-14 | 리가가구 겡큐소 | 이온 발생 장치 |
-
1988
- 1988-03-07 US US07/164,803 patent/US4894546A/en not_active Expired - Fee Related
- 1988-03-10 EP EP88850086A patent/EP0282467B1/de not_active Expired - Lifetime
- 1988-03-10 DE DE88850086T patent/DE3881418T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE3881418T2 (de) | 1993-11-04 |
EP0282467B1 (de) | 1993-06-02 |
EP0282467A1 (de) | 1988-09-14 |
US4894546A (en) | 1990-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |