DE4494105T1 - Miniatur Quadrupol-Anordnung - Google Patents

Miniatur Quadrupol-Anordnung

Info

Publication number
DE4494105T1
DE4494105T1 DE4494105T DE4494105T DE4494105T1 DE 4494105 T1 DE4494105 T1 DE 4494105T1 DE 4494105 T DE4494105 T DE 4494105T DE 4494105 T DE4494105 T DE 4494105T DE 4494105 T1 DE4494105 T1 DE 4494105T1
Authority
DE
Germany
Prior art keywords
quadrupole arrangement
miniature quadrupole
miniature
arrangement
quadrupole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE4494105T
Other languages
English (en)
Inventor
Robert J Ferran
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FERRAN SCIENT
Original Assignee
FERRAN SCIENT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FERRAN SCIENT filed Critical FERRAN SCIENT
Publication of DE4494105T1 publication Critical patent/DE4494105T1/de
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/34Dynamic spectrometers
    • H01J49/42Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205Device types
    • H01J49/421Mass filters, i.e. deviating unwanted ions without trapping
    • H01J49/4215Quadrupole mass filters
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/0013Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/004Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • H01J49/009Spectrometers having multiple channels, parallel analysis
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49007Indicating transducer
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49147Assembling terminal to base
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49169Assembling electrical component directly to terminal or elongated conductor
    • Y10T29/49171Assembling electrical component directly to terminal or elongated conductor with encapsulating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
DE4494105T 1993-06-14 1994-05-27 Miniatur Quadrupol-Anordnung Ceased DE4494105T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/076,161 US5401962A (en) 1993-06-14 1993-06-14 Residual gas sensor utilizing a miniature quadrupole array
PCT/US1994/006059 WO1994029006A1 (en) 1993-06-14 1994-05-27 Miniature quadrupole array

Publications (1)

Publication Number Publication Date
DE4494105T1 true DE4494105T1 (de) 1996-05-09

Family

ID=22130320

Family Applications (1)

Application Number Title Priority Date Filing Date
DE4494105T Ceased DE4494105T1 (de) 1993-06-14 1994-05-27 Miniatur Quadrupol-Anordnung

Country Status (4)

Country Link
US (3) US5401962A (de)
JP (1) JP2888984B2 (de)
DE (1) DE4494105T1 (de)
WO (1) WO1994029006A1 (de)

Families Citing this family (51)

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US5401962A (en) * 1993-06-14 1995-03-28 Ferran Scientific Residual gas sensor utilizing a miniature quadrupole array
DE19523859C2 (de) * 1995-06-30 2000-04-27 Bruker Daltonik Gmbh Vorrichtung für die Reflektion geladener Teilchen
GB9506972D0 (en) * 1995-04-04 1995-05-24 Univ Liverpool Improvements in and relating to quadrupole mass
US5596193A (en) * 1995-10-11 1997-01-21 California Institute Of Technology Miniature quadrupole mass spectrometer array
FR2762713A1 (fr) * 1997-04-25 1998-10-30 Commissariat Energie Atomique Microdispositif pour generer un champ multipolaire, en particulier pour filtrer ou devier ou focaliser des particules chargees
SE9702053D0 (sv) * 1997-05-29 1997-05-29 Staffan Jonsson Gasdetektor av kvadrupoltyp
WO1998056023A2 (en) 1997-06-03 1998-12-10 California Institute Of Technology Miniature micromachined quadrupole mass spectrometer array and method of making the same
US6157031A (en) * 1997-09-17 2000-12-05 California Institute Of Technology Quadropole mass analyzer with linear ion trap
US6239429B1 (en) 1998-10-26 2001-05-29 Mks Instruments, Inc. Quadrupole mass spectrometer assembly
US6867859B1 (en) 1999-08-03 2005-03-15 Lightwind Corporation Inductively coupled plasma spectrometer for process diagnostics and control
US6570152B1 (en) 2000-03-03 2003-05-27 Micromass Limited Time of flight mass spectrometer with selectable drift length
US6441370B1 (en) 2000-04-11 2002-08-27 Thermo Finnigan Llc Linear multipole rod assembly for mass spectrometers
US6538734B2 (en) * 2000-11-29 2003-03-25 Lightwind Corporation Method and device utilizing real-time gas sampling
US6791692B2 (en) * 2000-11-29 2004-09-14 Lightwind Corporation Method and device utilizing plasma source for real-time gas sampling
GB2384908B (en) * 2002-02-05 2005-05-04 Microsaic Systems Ltd Mass spectrometry
JP3866134B2 (ja) * 2002-03-29 2007-01-10 日本碍子株式会社 ガスセンサ取付構造体、及びガスセンサ取付方法
GB2391694B (en) * 2002-08-01 2006-03-01 Microsaic Systems Ltd Monolithic micro-engineered mass spectrometer
US7046116B2 (en) * 2002-11-12 2006-05-16 Heraeus Sensor Technology Gmbh Temperature probe and its use
US20050010317A1 (en) * 2003-07-11 2005-01-13 Ron Hadar Method and apparatus for automated bi-directional integration of peripheral data sources for a production tool
US7072028B2 (en) * 2003-07-25 2006-07-04 Lightwind Corporation Method and apparatus for chemical monitoring
GB2390222B (en) * 2003-07-31 2004-05-19 Reliance Gear Company Ltd Quadrupole mass filter
US20070131860A1 (en) * 2005-12-12 2007-06-14 Freeouf John L Quadrupole mass spectrometry chemical sensor technology
WO2007111110A1 (ja) * 2006-03-27 2007-10-04 Horiba Stec, Co., Ltd. 残留ガス分析計
US7381947B2 (en) * 2006-05-05 2008-06-03 Thermo Finnigan Llc Electrode networks for parallel ion traps
GB2446184B (en) * 2007-01-31 2011-07-27 Microsaic Systems Ltd High performance micro-fabricated quadrupole lens
DE102007046900C5 (de) * 2007-09-28 2018-07-26 Heraeus Sensor Technology Gmbh Hochtemperatursensor und ein Verfahren zu dessen Herstellung
WO2009144765A1 (ja) * 2008-05-26 2009-12-03 株式会社島津製作所 四重極型質量分析装置
GB2479191B (en) 2010-04-01 2014-03-19 Microsaic Systems Plc Microengineered multipole ion guide
GB2479190B (en) 2010-04-01 2014-03-19 Microsaic Systems Plc Microengineered multipole rod assembly
JP5422485B2 (ja) * 2010-05-27 2014-02-19 株式会社堀場エステック ガス分析計
JP2015511704A (ja) * 2012-03-16 2015-04-20 アナリティク イエナ アーゲーAnalytik Jena Ag 質量分析計装置のための改良されたインタフェース
US9093253B2 (en) * 2012-12-31 2015-07-28 908 Devices Inc. High pressure mass spectrometry systems and methods
CN107946166B (zh) * 2012-12-31 2020-02-18 九零八图案公司 质谱仪和使用质谱仪测量关于样品的信息的方法
US9099286B2 (en) 2012-12-31 2015-08-04 908 Devices Inc. Compact mass spectrometer
US8525111B1 (en) 2012-12-31 2013-09-03 908 Devices Inc. High pressure mass spectrometry systems and methods
US8878127B2 (en) 2013-03-15 2014-11-04 The University Of North Carolina Of Chapel Hill Miniature charged particle trap with elongated trapping region for mass spectrometry
US8957381B2 (en) * 2013-06-14 2015-02-17 Radiant Innovation Inc. Shockproof gas sensor
WO2015108969A1 (en) 2014-01-14 2015-07-23 908 Devices Inc. Sample collection in compact mass spectrometry systems
US8921774B1 (en) 2014-05-02 2014-12-30 908 Devices Inc. High pressure mass spectrometry systems and methods
US8816272B1 (en) 2014-05-02 2014-08-26 908 Devices Inc. High pressure mass spectrometry systems and methods
US9711341B2 (en) 2014-06-10 2017-07-18 The University Of North Carolina At Chapel Hill Mass spectrometry systems with convective flow of buffer gas for enhanced signals and related methods
KR20180033224A (ko) * 2015-07-22 2018-04-02 뷰레이 테크놀로지스 인크. 방사선 측정을 위한 이온 챔버
US9863914B2 (en) 2015-07-24 2018-01-09 Implant Sciences Corporation Miniature quadrupole arrays using electron multiplication detectors
US9932825B1 (en) 2016-10-05 2018-04-03 Schlumberger Technology Corporation Gas chromatograph mass spectrometer for downhole applications
US10253624B2 (en) 2016-10-05 2019-04-09 Schlumberger Technology Corporation Methods of applications for a mass spectrometer in combination with a gas chromatograph
JP6983423B2 (ja) * 2017-04-04 2021-12-17 アトナープ株式会社 質量分析装置
US10242857B2 (en) 2017-08-31 2019-03-26 The University Of North Carolina At Chapel Hill Ion traps with Y-directional ion manipulation for mass spectrometry and related mass spectrometry systems and methods
US11972937B2 (en) 2018-06-01 2024-04-30 Micromass Uk Limited Filament assembly
US11313833B2 (en) 2018-08-31 2022-04-26 Leidos Security Detection & Automation, Inc. Chemical trace detection system
GB201907211D0 (en) * 2019-05-22 2019-07-03 Thermo Fisher Scient Bremen Gmbh A mass spectrometer
US11658020B2 (en) 2020-11-24 2023-05-23 Inficon, Inc. Ion source assembly with multiple ionization volumes for use in a mass spectrometer

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2939952A (en) * 1953-12-24 1960-06-07 Paul Apparatus for separating charged particles of different specific charges
DE1270844B (de) * 1961-12-12 1968-06-20 Cons Electrodynamics Corp Randfeldregelvorrichtung fuer Massenfilter, insbesondere Quadrupolmassenfilter
GB1468138A (en) * 1974-06-18 1977-03-23 Montedison Spa Dyeing of synthetic polyamides
US4426576A (en) * 1981-09-08 1984-01-17 Atom Sciences, Inc. Method and apparatus for noble gas atom detection with isotopic selectivity
US4700069A (en) * 1984-06-01 1987-10-13 Anelva Corporation Mass spectrometer of a quadrupole electrode type comprising a divided electrode
EP0460255A1 (de) * 1990-06-06 1991-12-11 Leybold Aktiengesellschaft Messkopf für ein Quadrupolmassenspektrometer

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US3641340A (en) * 1969-09-22 1972-02-08 Gen Electric Multichannel readout mass spectrometer
US3819941A (en) * 1973-10-15 1974-06-25 Bendix Corp Mass dependent ion microscope having an array of small mass filters
US4328614A (en) * 1980-03-24 1982-05-11 Rca Corporation Method for the manufacture of porcelain coated metal boards having interconnections between the top and bottom surfaces
DE3035970C2 (de) * 1980-09-24 1982-11-04 Standard Elektrik Lorenz Ag, 7000 Stuttgart Verfahren zur Justierung der Elektrodenabstände in Strahlenerzeugungssystemen von Elektronenstrahlröhren
US4375719A (en) * 1981-01-26 1983-03-08 Western Electric Company, Inc. Apparatus for assembling apertured members onto an array of terminal pins
US4744140A (en) * 1982-11-26 1988-05-17 Amp Incorporated Alignment and insertion tool for connectors
US4885500A (en) * 1986-11-19 1989-12-05 Hewlett-Packard Company Quartz quadrupole for mass filter
US4985626A (en) * 1990-01-09 1991-01-15 The Perkin-Elmer Corporation Quadrupole mass filter for charged particles
US5286944A (en) * 1992-03-25 1994-02-15 Panasonic Technologies, Inc. Method of manufacturing a multiple microelectrode assembly
US5298745A (en) * 1992-12-02 1994-03-29 Hewlett-Packard Company Multilayer multipole
US5401962A (en) * 1993-06-14 1995-03-28 Ferran Scientific Residual gas sensor utilizing a miniature quadrupole array

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2939952A (en) * 1953-12-24 1960-06-07 Paul Apparatus for separating charged particles of different specific charges
DE1270844B (de) * 1961-12-12 1968-06-20 Cons Electrodynamics Corp Randfeldregelvorrichtung fuer Massenfilter, insbesondere Quadrupolmassenfilter
GB1468138A (en) * 1974-06-18 1977-03-23 Montedison Spa Dyeing of synthetic polyamides
US4426576A (en) * 1981-09-08 1984-01-17 Atom Sciences, Inc. Method and apparatus for noble gas atom detection with isotopic selectivity
US4700069A (en) * 1984-06-01 1987-10-13 Anelva Corporation Mass spectrometer of a quadrupole electrode type comprising a divided electrode
EP0460255A1 (de) * 1990-06-06 1991-12-11 Leybold Aktiengesellschaft Messkopf für ein Quadrupolmassenspektrometer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
"Int.J. of Mass Spectrum. and Ion Physics" 15 (1974) 116-119 *

Also Published As

Publication number Publication date
US5613294A (en) 1997-03-25
US5857890A (en) 1999-01-12
JP2888984B2 (ja) 1999-05-10
WO1994029006A1 (en) 1994-12-22
US5401962A (en) 1995-03-28
JPH08510084A (ja) 1996-10-22

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8131 Rejection