AU4705593A - Process and device for generating beams of any highly charged ions having low kinetic energy - Google Patents
Process and device for generating beams of any highly charged ions having low kinetic energyInfo
- Publication number
- AU4705593A AU4705593A AU47055/93A AU4705593A AU4705593A AU 4705593 A AU4705593 A AU 4705593A AU 47055/93 A AU47055/93 A AU 47055/93A AU 4705593 A AU4705593 A AU 4705593A AU 4705593 A AU4705593 A AU 4705593A
- Authority
- AU
- Australia
- Prior art keywords
- kinetic energy
- charged ions
- highly charged
- low kinetic
- generating beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
- H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4226299 | 1992-08-08 | ||
DE19924226299 DE4226299A1 (en) | 1992-08-08 | 1992-08-08 | Generating beams using electron cyclotron resonance source - producing electron beam concentric to ion beam axis for spatial charge compensation |
DE9308049 | 1993-05-28 | ||
DE9308049 | 1993-05-28 | ||
PCT/EP1993/002047 WO1994003919A1 (en) | 1992-08-08 | 1993-07-30 | Process and device for generating beams of any highly charged ions having low kinetic energy |
Publications (1)
Publication Number | Publication Date |
---|---|
AU4705593A true AU4705593A (en) | 1994-03-03 |
Family
ID=25917347
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU47055/93A Abandoned AU4705593A (en) | 1992-08-08 | 1993-07-30 | Process and device for generating beams of any highly charged ions having low kinetic energy |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU4705593A (en) |
WO (1) | WO1994003919A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATA4694A (en) * | 1994-01-13 | 1994-11-15 | Ims Ionen Mikrofab Syst | PROJECTION SYSTEM FOR CHARGED PARTICLES |
DE19933762C2 (en) * | 1999-07-19 | 2002-10-17 | Juergen Andrae | Pulsed magnetic opening of electron cyclotron resonance ion sources to generate short, powerful pulses of highly charged ions or electrons |
FR2883410A1 (en) * | 2005-03-21 | 2006-09-22 | Commissariat Energie Atomique | PHOTON SOURCE COMPRISING A MULTICHARGED ION PLASMA SOURCE WITH ELECTRONIC CYCLOTRON RESONANCE. |
CN102117727B (en) * | 2011-01-25 | 2013-07-10 | 北京大学 | Electron cyclotron resonance ion source |
ES2696227B2 (en) * | 2018-07-10 | 2019-06-12 | Centro De Investig Energeticas Medioambientales Y Tecnologicas Ciemat | INTERNAL ION SOURCE FOR LOW EROSION CYCLONES |
DE102019111908B4 (en) | 2019-05-08 | 2021-08-12 | Dreebit Gmbh | ECR ion source and method for operating an ECR ion source |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB892344A (en) * | 1959-03-18 | 1962-03-28 | Nat Res Dev | Ion source |
JPS60243953A (en) * | 1984-05-18 | 1985-12-03 | Hitachi Ltd | Coaxial microwave ion source |
FR2601498B1 (en) * | 1986-07-10 | 1988-10-07 | Commissariat Energie Atomique | ION SOURCE WITH ELECTRONIC CYCLOTRONIC RESONANCE |
FR2640411B1 (en) * | 1988-12-08 | 1994-04-29 | Commissariat Energie Atomique | METHOD AND DEVICE USING AN RCE SOURCE FOR THE PRODUCTION OF HIGHLY CHARGED HEAVY IONS |
-
1993
- 1993-07-30 WO PCT/EP1993/002047 patent/WO1994003919A1/en active Application Filing
- 1993-07-30 AU AU47055/93A patent/AU4705593A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO1994003919A1 (en) | 1994-02-17 |
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