AU4705593A - Process and device for generating beams of any highly charged ions having low kinetic energy - Google Patents

Process and device for generating beams of any highly charged ions having low kinetic energy

Info

Publication number
AU4705593A
AU4705593A AU47055/93A AU4705593A AU4705593A AU 4705593 A AU4705593 A AU 4705593A AU 47055/93 A AU47055/93 A AU 47055/93A AU 4705593 A AU4705593 A AU 4705593A AU 4705593 A AU4705593 A AU 4705593A
Authority
AU
Australia
Prior art keywords
kinetic energy
charged ions
highly charged
low kinetic
generating beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU47055/93A
Inventor
Jurgen Andra
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19924226299 external-priority patent/DE4226299A1/en
Application filed by Individual filed Critical Individual
Publication of AU4705593A publication Critical patent/AU4705593A/en
Abandoned legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns
    • H01J27/16Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
AU47055/93A 1992-08-08 1993-07-30 Process and device for generating beams of any highly charged ions having low kinetic energy Abandoned AU4705593A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE4226299 1992-08-08
DE19924226299 DE4226299A1 (en) 1992-08-08 1992-08-08 Generating beams using electron cyclotron resonance source - producing electron beam concentric to ion beam axis for spatial charge compensation
DE9308049 1993-05-28
DE9308049 1993-05-28
PCT/EP1993/002047 WO1994003919A1 (en) 1992-08-08 1993-07-30 Process and device for generating beams of any highly charged ions having low kinetic energy

Publications (1)

Publication Number Publication Date
AU4705593A true AU4705593A (en) 1994-03-03

Family

ID=25917347

Family Applications (1)

Application Number Title Priority Date Filing Date
AU47055/93A Abandoned AU4705593A (en) 1992-08-08 1993-07-30 Process and device for generating beams of any highly charged ions having low kinetic energy

Country Status (2)

Country Link
AU (1) AU4705593A (en)
WO (1) WO1994003919A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATA4694A (en) * 1994-01-13 1994-11-15 Ims Ionen Mikrofab Syst PROJECTION SYSTEM FOR CHARGED PARTICLES
DE19933762C2 (en) * 1999-07-19 2002-10-17 Juergen Andrae Pulsed magnetic opening of electron cyclotron resonance ion sources to generate short, powerful pulses of highly charged ions or electrons
FR2883410A1 (en) * 2005-03-21 2006-09-22 Commissariat Energie Atomique PHOTON SOURCE COMPRISING A MULTICHARGED ION PLASMA SOURCE WITH ELECTRONIC CYCLOTRON RESONANCE.
CN102117727B (en) * 2011-01-25 2013-07-10 北京大学 Electron cyclotron resonance ion source
ES2696227B2 (en) * 2018-07-10 2019-06-12 Centro De Investig Energeticas Medioambientales Y Tecnologicas Ciemat INTERNAL ION SOURCE FOR LOW EROSION CYCLONES
DE102019111908B4 (en) 2019-05-08 2021-08-12 Dreebit Gmbh ECR ion source and method for operating an ECR ion source

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB892344A (en) * 1959-03-18 1962-03-28 Nat Res Dev Ion source
JPS60243953A (en) * 1984-05-18 1985-12-03 Hitachi Ltd Coaxial microwave ion source
FR2601498B1 (en) * 1986-07-10 1988-10-07 Commissariat Energie Atomique ION SOURCE WITH ELECTRONIC CYCLOTRONIC RESONANCE
FR2640411B1 (en) * 1988-12-08 1994-04-29 Commissariat Energie Atomique METHOD AND DEVICE USING AN RCE SOURCE FOR THE PRODUCTION OF HIGHLY CHARGED HEAVY IONS

Also Published As

Publication number Publication date
WO1994003919A1 (en) 1994-02-17

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