GB2295485B - ion beam extraction and accelerator electrode structure - Google Patents

ion beam extraction and accelerator electrode structure

Info

Publication number
GB2295485B
GB2295485B GB9423442A GB9423442A GB2295485B GB 2295485 B GB2295485 B GB 2295485B GB 9423442 A GB9423442 A GB 9423442A GB 9423442 A GB9423442 A GB 9423442A GB 2295485 B GB2295485 B GB 2295485B
Authority
GB
United Kingdom
Prior art keywords
ion beam
electrode structure
beam extraction
accelerator electrode
accelerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB9423442A
Other versions
GB2295485A (en
GB9423442D0 (en
Inventor
Robert Alexander Bond
Paul Michael Latham
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Ricardo AEA Ltd
Original Assignee
AEA Technology PLC
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AEA Technology PLC, UK Atomic Energy Authority filed Critical AEA Technology PLC
Priority to GB9423442A priority Critical patent/GB2295485B/en
Publication of GB9423442D0 publication Critical patent/GB9423442D0/en
Publication of GB2295485A publication Critical patent/GB2295485A/en
Application granted granted Critical
Publication of GB2295485B publication Critical patent/GB2295485B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03H—PRODUCING A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03H1/00—Using plasma to produce a reactive propulsive thrust
    • F03H1/0037—Electrostatic ion thrusters
    • F03H1/0043—Electrostatic ion thrusters characterised by the acceleration grid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H01J27/024—Extraction optics, e.g. grids
GB9423442A 1994-11-19 1994-11-19 ion beam extraction and accelerator electrode structure Expired - Lifetime GB2295485B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9423442A GB2295485B (en) 1994-11-19 1994-11-19 ion beam extraction and accelerator electrode structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9423442A GB2295485B (en) 1994-11-19 1994-11-19 ion beam extraction and accelerator electrode structure

Publications (3)

Publication Number Publication Date
GB9423442D0 GB9423442D0 (en) 1995-01-11
GB2295485A GB2295485A (en) 1996-05-29
GB2295485B true GB2295485B (en) 1998-10-07

Family

ID=10764724

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9423442A Expired - Lifetime GB2295485B (en) 1994-11-19 1994-11-19 ion beam extraction and accelerator electrode structure

Country Status (1)

Country Link
GB (1) GB2295485B (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6515426B1 (en) * 1998-12-15 2003-02-04 Hitachi, Ltd. Ion beam processing apparatus and method of operating ion source therefor
US7013834B2 (en) 2002-04-19 2006-03-21 Nordson Corporation Plasma treatment system
CN1929070B (en) * 2005-09-09 2010-08-11 鸿富锦精密工业（深圳）有限公司 Electron source and surface light source employing same
CN1983504B (en) * 2005-12-14 2010-05-26 鸿富锦精密工业（深圳）有限公司 Ion source and mould polisher therewith
CN101490792B (en) 2006-07-20 2012-02-01 阿维扎技术有限公司 Ion deposition apparatus
EP2044610B1 (en) 2006-07-20 2012-11-28 SPP Process Technology Systems UK Limited Plasma sources
JP5675099B2 (en) 2006-07-20 2015-02-25 エスピーティーエス テクノロジーズ イーティー リミティド Ion source
DE102006059264A1 (en) 2006-12-15 2008-06-19 Thales Electron Devices Gmbh Plasma accelerator arrangement
CN104595140B (en) * 2015-01-23 2017-04-12 大连理工大学 RF (Radio frequency) ion propulsion device of stepped grid electrode
RU2649911C1 (en) * 2016-12-21 2018-04-05 Федеральное государственное бюджетное научное учреждение "Федеральный исследовательский центр Институт прикладной физики Российской академии наук" (ИПФ РАН) High-current source of ion beams based on of electron-cyclotron resonance discharge plasma held in open magnetic trap
RU2650876C1 (en) * 2016-12-21 2018-04-18 Федеральное государственное бюджетное научное учреждение "Федеральный исследовательский центр Институт прикладной физики Российской академии наук" (ИПФ РАН) Source of ion beam based on electron-cyclotron resonant discharge plasma, held in open magnetic trap
RU2725615C1 (en) * 2019-12-26 2020-07-03 Федеральное государственное бюджетное научное учреждение "Федеральный исследовательский центр Институт прикладной физики Российской академии наук" (ИПФ РАН) Source of high-current ion beams based on ecr discharge plasma, held in open magnetic trap

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3956666A (en) * 1975-01-27 1976-05-11 Ion Tech, Inc. Electron-bombardment ion sources
US4191888A (en) * 1978-11-17 1980-03-04 Communications Satellite Corporation Self-shielding small hole accel grid
US4873467A (en) * 1988-05-23 1989-10-10 Kaufman Harold R Ion source with particular grid assembly

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3956666A (en) * 1975-01-27 1976-05-11 Ion Tech, Inc. Electron-bombardment ion sources
US4191888A (en) * 1978-11-17 1980-03-04 Communications Satellite Corporation Self-shielding small hole accel grid
US4873467A (en) * 1988-05-23 1989-10-10 Kaufman Harold R Ion source with particular grid assembly

Also Published As

Publication number Publication date
GB2295485A (en) 1996-05-29
GB9423442D0 (en) 1995-01-11

Similar Documents

Publication Publication Date Title
GB2280305B (en) Quadrupole ion trap
PL312958A1 (en) Electrode making method and electrode made thereby
GB2343545B (en) An ion implanter with three electrode deceleration structure and upstream mass selection
IL109240A0 (en) Improved ion exchanger-membranes
EP0584794A3 (en) Electrobiochemical analytical method and electrodes.
GB2344214B (en) An ion implanter with improved beam definition
HK1015552A1 (en) Lithium ion cell
GB9611391D0 (en) Method and device for the introduction of ions into quadrupole ion traps
EP0871989A4 (en) Electrical and structural interconnector
GB9606153D0 (en) Connectors and assemblies
GB2295485B (en) ion beam extraction and accelerator electrode structure
GB2291534B (en) Collisionally induced decomposition of ions in nonlinear ion traps
GB2316224B (en) Ion implantation method
AU4783196A (en) Electrode arrangement and stimulation system
EP0921714A4 (en) Rfq accelerator and ion implanter
GB8905320D0 (en) Ion implanter system
TW301466U (en) Ion implanter
BG98449A (en) Activated cathode for electrolytic cells and method for its preparation
GB2308494B (en) Ion implanter and ion implanting method using the same
KR960014211A (en) Complex ion separator and preparation method thereof
IL124430A0 (en) An envelope and an envelope construction
GB9011969D0 (en) Low energy ion trap
GB2271359B (en) An electrode
GB2272862B (en) An envelope construction and method
GB2303939B (en) Connectors and assemblies

Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PE20 Patent expired after termination of 20 years

Expiry date: 20141118