FR1158958A - Perfectionnements aux sources d'ions utilisant un champ de haute fréquence - Google Patents

Perfectionnements aux sources d'ions utilisant un champ de haute fréquence

Info

Publication number
FR1158958A
FR1158958A FR1158958DA FR1158958A FR 1158958 A FR1158958 A FR 1158958A FR 1158958D A FR1158958D A FR 1158958DA FR 1158958 A FR1158958 A FR 1158958A
Authority
FR
France
Prior art keywords
high frequency
frequency field
ion sources
sources
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
CSF Compagnie Generale de Telegraphie sans Fil SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CSF Compagnie Generale de Telegraphie sans Fil SA filed Critical CSF Compagnie Generale de Telegraphie sans Fil SA
Application granted granted Critical
Publication of FR1158958A publication Critical patent/FR1158958A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Drying Of Semiconductors (AREA)
FR1158958D 1956-10-03 1956-10-03 Perfectionnements aux sources d'ions utilisant un champ de haute fréquence Expired FR1158958A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1084390X 1956-10-03

Publications (1)

Publication Number Publication Date
FR1158958A true FR1158958A (fr) 1958-06-20

Family

ID=9611610

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1158958D Expired FR1158958A (fr) 1956-10-03 1956-10-03 Perfectionnements aux sources d'ions utilisant un champ de haute fréquence

Country Status (4)

Country Link
US (1) US2946919A (fr)
DE (1) DE1084390B (fr)
FR (1) FR1158958A (fr)
GB (1) GB849565A (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5148097A (en) * 1974-10-23 1976-04-24 Osaka Koon Denki Kk Iongen
US4542321A (en) * 1982-07-12 1985-09-17 Denton Vacuum Inc Inverted magnetron ion source
FR2601498B1 (fr) * 1986-07-10 1988-10-07 Commissariat Energie Atomique Source d'ions a resonance cyclotronique electronique
US4859908A (en) * 1986-09-24 1989-08-22 Matsushita Electric Industrial Co., Ltd. Plasma processing apparatus for large area ion irradiation
US7973296B2 (en) * 2008-03-05 2011-07-05 Tetraheed Llc Electromagnetic systems with double-resonant spiral coil components
DE102009023551A1 (de) 2009-05-30 2010-12-02 Bayer Materialscience Ag Regeneration von sauren Ionenaustauschern

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2557961A (en) * 1947-10-21 1951-06-26 Int Standard Electric Corp Transmission system for highfrequency currents
US2633539A (en) * 1948-01-14 1953-03-31 Altar William Device for separating particles of different masses
US2670649A (en) * 1949-06-04 1954-03-02 Cons Eng Corp Spectroscopic analysis of a gas mixture excited by a high-frequency electric field
BE527952A (fr) * 1953-04-10
US2798181A (en) * 1954-03-26 1957-07-02 Jr John S Foster Pumping ion source
US2826708A (en) * 1955-06-02 1958-03-11 Jr John S Foster Plasma generator

Also Published As

Publication number Publication date
DE1084390B (de) 1960-06-30
US2946919A (en) 1960-07-26
GB849565A (en) 1960-09-28

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