EP0252845B1 - Elektronzyklotronresonanz-Ionenquelle - Google Patents

Elektronzyklotronresonanz-Ionenquelle Download PDF

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Publication number
EP0252845B1
EP0252845B1 EP87401608A EP87401608A EP0252845B1 EP 0252845 B1 EP0252845 B1 EP 0252845B1 EP 87401608 A EP87401608 A EP 87401608A EP 87401608 A EP87401608 A EP 87401608A EP 0252845 B1 EP0252845 B1 EP 0252845B1
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EP
European Patent Office
Prior art keywords
enclosure
iii
magnetic
longitudinal axis
ion source
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Expired - Lifetime
Application number
EP87401608A
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English (en)
French (fr)
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EP0252845A1 (de
Inventor
Bernard Jacquot
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Definitions

  • the present invention relates to an ion source with electronic cyclotron resonance allowing in particular the production of positive multi-charged heavy ions. It finds many applications, depending on the different values of the kinetic energy of the extracted ions, in the field of ion implantation, microgravure, and more particularly in the equipment of particle accelerators, used both in the scientific than medical.
  • the ions are obtained by ionizing, in a closed enclosure of the microwave cavity type having an axis of symmetry, a gaseous medium, consisting of one or more gases or metallic vapors. This ionization results from an interaction between the gaseous medium and a plasma of electrons strongly accelerated by electronic cyclotron resonance.
  • This resonance is obtained thanks to the combined action of a high frequency electromagnetic field, injected at a first end of the enclosure, and a magnetic field with axial symmetry prevailing in this same enclosure.
  • the ions thus created are extracted from the enclosure by a second end.
  • the axial magnetic field is generally created by solenoids or coils, surrounding the enclosure, traversed by currents flowing in the same direction.
  • the quantity of ions that can be produced results from the competition between two processes, on the one hand the formation of ions by electronic impact on neutral atoms constituting the gas to be ionized, and on the other hand the destruction of these same ions by recombination due to a collision of these ions with a neutral atom; this neutral atom can come from the gas not yet ionized or else be produced on the walls of the enclosure by the impact of an ion on said walls.
  • the problem in this type of source is therefore to minimize the destruction of the ions formed by avoiding any collision of these with a neutral atom.
  • the radial local fields are in particular generated by several magnetic bars, arranged symmetrically around the enclosure and going from one end to the other of the enclosure. They each consist of several elementary magnets, joined together.
  • Such a magnetic configuration is notably described in document EP-A 0 145 586 (FR-A-2 556 498) filed in the name of the applicant.
  • This magnetic configuration has local magnetic disturbances (or edge effects) at these two ends generating parasitic axial magnetic components which add to or subtract, depending on the polarity of the magnets, from the main magnetic field with axial symmetry.
  • magnets of ternary compositions in particular magnets based on iron, praseodymium and boron.
  • These rare earth magnets have the advantage of having a high magnetic rigidity, which, in addition to their high magnetic performance, allows the superposition of two opposing fields without risk of demagnetization of these magnets.
  • a high magnetic rigidity allows in particular the making of composite multipole structures where the axial and radial fields are composed algebraically.
  • the extraction orifice being in an area with an unoptimized magnetic field where the plasma of electrons and multicharged ions is moderately dense, the extraction of ions along the axis of the enclosure is not optimal.
  • the resonant caps are always harmful on the side of the injection of the high frequency since they take energy in the electromagnetic wave which should normally be used for the ionization of the gaseous medium contained in the enclosure.
  • a heat shield In order to avoid damage to the internal wall of the enclosure, a heat shield must be provided on said wall.
  • the magnetic field has symmetry of axial revolution and symmetry with respect to the center of the source.
  • the amplitude of the magnetic field increases in all directions of space from the center of the enclosure, until reaching a maximum near the coils, while passing by values defining closed equimagnetic surfaces on which the condition of electronic cyclotron resonance can be satisfied and whose dimensions increase from the center of the enclosure.
  • the magnetic field created by coils supplied in opposition has axial and radial components.
  • the subject of the present invention is precisely an ion source with electronic cyclotron resonance which makes it possible to remedy the various drawbacks above.
  • means for concentrating the magnetic force lines in the median plane of the enclosure constituting a unipolar structure makes it possible in particular to bring the elementary coils supplied in opposition closer together, the antagonistic influences of the coils being attenuated by the presence of these means of concentration.
  • these means of concentration allow a homogeneous distribution of the layers or equimagnetic surfaces inside the enclosure.
  • the radial leakage force lines all converge towards the median plane of the enclosure, which leads to a thermal impact of the leakage plasma in the entire median plane, on a circular band, and not on discrete generators of the enclosure as in the case of a multipolar system constituted by magnetic bars surrounding the enclosure according to the prior art. This considerably facilitates the thermal protection of the internal wall of the enclosure and therefore the local cooling of said wall.
  • the concentration means comprise a magnetic shield having the form of a ring surrounding the enclosure and arranged in the median plane.
  • the concentration means can be formed by a magnetic shield enclosing the two coils and having in section along a plane containing the longitudinal axis the shape of an E turned towards this longitudinal axis, the central leg of the E, located in the median plane, having a width twice that of the other legs of the E.
  • the central leg of the E plays the same role as the simple ring, provided above.
  • the magnetic shielding whether in the form of a simple ring or in the form of an E, seen in longitudinal section, is made of soft iron.
  • the concentration means consist of several identical permanent magnets, arranged around the enclosure and in the median plane, the poles of these magnets oriented towards the longitudinal axis being placed side by side and located at the same distance from the longitudinal axis and having the same polarity.
  • these permanent magnets are made of an alloy of samarium and cobalt of formula SmCo 5 .
  • the magnetic shielding having the shape of a simple ring or an E, in longitudinal section, and the permanent magnets.
  • This source comprises a containment vacuum enclosure 2 constituting a resonant cavity which can be excited by a microwave electromagnetic field, continuous or pulsed, having a frequency between 1 and 100 GHz.
  • This enclosure has a longitudinal axis 4 of symmetry, passing through the center 6 of the enclosure, which in the case of a cylindrical enclosure represents the axis of revolution; it further comprises two ends 8 and 10 situated in the extension of one another and oriented along the axis 6.
  • the electromagnetic wave produced by a source 12 such as a Klystron, is introduced into the resonant cavity 2, at the end 10 of the enclosure, by means of a waveguide 14 of circular or rectangular section.
  • a pipe 16, equipped with a valve 18 makes it possible to introduce a gas or a vapor of a material, inside the cavity 2, intended to form a plasma in said cavity.
  • This plasma can be a plasma of hydrogen, neon, xenon, oxygen, carbon, nitrogen, tungsten, titanium, molybdenum, zirconium, etc., at a pressure of the order of 1 m Pa (10-Smbar) for a 10 GHz electromagnetic wave.
  • Means not shown such as a vacuum pump can be mounted on the cavity 2.
  • Two coils 20 and 22 located respectively in the vicinity of the ends 8 and 10 of the enclosure make it possible mainly to create a magnetic field of axial symmetry.
  • these two coils 20 and 22 are traversed, continuously or pulsed, by currents of opposite direction of circulation. They generate a magnetic structure in which the magnetic field has the shape of a cusped magnetic bottle (called in English terminology cusp) whose lines of magnetic forces 24 are shown in FIG. 2.
  • the magnetic field created by these coils 20 and 22 has a symmetry of revolution along the axis 4 of the enclosure and a symmetry with respect to the center 6 of this enclosure. It is moreover zero at center 6, for reasons of symmetry; maximum and axial in the zones 25 of the enclosure situated inside each coil; maximum and radial in the zone 27 situated between the two coils and a certain distance from axis 4, and maximum but two components (axial and radial) in zones 29 of the enclosure near the turns of the coils.
  • the magnetic field notably defines an axial north pole at each end 8 and 10 of the enclosure.
  • the two coils supplied in opposition generate a magnetic structure in which the amplitude of the magnetic field increases in all directions of space from the center of the cavity until reaching a maximum near the coils, passing through values which can satisfy the condition of electronic cyclotron resonance.
  • the resonance condition is notably satisfied for an amplitude B r of 0.36T (3600 Gauss) and a frequency of the electromagnetic field of 10 GHz.
  • the highly charged ions formed can be extracted from the enclosure 2 by an extraction orifice 30 located on the side of the end 8 of the enclosure. This orifice is located on the longitudinal axis 4 and in the extension of the waveguide 14 used for the injection of the high frequency.
  • the ions from the enclosure can then be selected according to their degree of ionization using any known means using a magnetic field and / or an electric field.
  • a system for concentrating the lines of magnetic forces surrounding the enclosure 2 is provided in the median plane III-III of the enclosure 2, passing through the center 6 of the enclosure and perpendicular to the longitudinal axis 4 of the enclosure.
  • These means may consist of a magnetic shield 36 of soft iron, having the shape of a continuous annular strip.
  • This iron ring 36 is arranged in the median plane III-III of the enclosure and around it, and as close as possible to it.
  • the coils 20 and 22 are arranged on either side of this ring 36 and at equal distance from this ring.
  • the reluctance of the iron constituting the ring 36 then creates, as shown in FIG. 4, a concentration of the lines of magnetic forces 38 in the median plane III-III and in a radial direction thus allowing a homogeneous distribution of the equimagnetic surfaces 40 in the pregnant 2.
  • This soft iron ring 36 constitutes a southern unipolar magnetic structure for example.
  • the ring-shaped shield 36 can be replaced by a soft iron shield 42 as shown in FIG. 5.
  • This shielding 42 has in longitudinal section the shape of an E facing the longitudinal axis 4 of the enclosure 2.
  • the central leg 44 of the E is located in the median plane III-III of the enclosure and plays the same role than the soft iron ring 36.
  • This central leg 44 has a width L which is double the width 1 of the other legs respectively 46 and 48 of E.
  • a variant, represented in FIG. 6, consists in replacing the soft iron shielding 36 or 42 by permanent magnets 50 preferably made of samarium-cobalt (SmCos) distributed uniformly around the enclosure 2 and arranged in the median plane III-III of the enclosure. These magnets 50 are joined by their ends 52, oriented towards the longitudinal axis 4 of the enclosure; these ends 52 are located at an equal distance from the axis 4, as close as possible to the enclosure.
  • SmCos samarium-cobalt
  • the ends 52 of the permanent magnets 50 all have the same polarity, south for example.
  • This unipolar structure allows the strengthening of the radial field at the level of the median plane III-III of the enclosure 2 as shown in FIG. 7.
  • the lines of magnetic forces generated by the magnets 50 bear the reference 54.
  • the ring 36 by the shield 42 in the form of an E, along a longitudinal plane passing through the central axis 4 of the cavity.
  • the plasma of hot or energetic electrons and of multicharged ions is confined in the magnetic structure. Leaks of energetic plasma follow the lines of magnetic forces and preferentially escape where the magnetic field is weak (which corresponds to minimum work). Since the magnetic field has a minimum on the longitudinal axis 4 of the enclosure (it is maximum near the copper of the coils) (see Figures 4, 7 and 9) the densi The leakage plasma is therefore maximum on this axis where the ion extraction is located.
  • the source of the invention allows the extraction, along the longitudinal axis of the enclosure, of multi-charged ions with maximum density unlike the structures of the prior art using a multipolar structure to form the radial field. .
  • the enclosure can have a shape other than a cylindrical shape, and for example a rectangular or polygonal shape.
  • the ion source according to the invention is relatively compact. It makes it possible to obtain beams of ions of high density or intensity and in particular beams of ions several times charged with heavy materials up to uranium.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)

Claims (6)

1. Elektronenzyklotronresonanz-lonenquelle mit:
- einer geschlossenen Hülle (2), die eine longitudinale Symmetriachse (4) und ein erstes und ein zweites Ende (8, 10), die entlang dieser Achse orientiert sind, besitzt, wobei diese Hülle (2) ein Gas enthält, das bestimmt ist, durch Elektronenzyklotronresonanz ein in der Hülle eingeschlossenes Plasma zu bilden,
- einer Vorrichtung (12, 14) zum Injizieren eines elektromagnetischen Feldes hoher Frequenz in das erste Ende (8) der Hülle,
- einem System (30, 32) zum Extrahieren der erzeugten Ionen aus der Hülle, das sich am zweiten Ende der Hülle befindet und
- einer magnetischen Struktur, die um die Hülle (2) angeordnet ist und eine mit der Achse der Hülle zusammenfallende Symmetrieachse bildet, die lokale axiale und radiale magnetische Felder erzeugt und die wenigstens eine äquimagnetische Fläche (28) bildet, auf der die Bedingung für Elektronenzyklotronresonaz erfüllt ist, wobei die magnetische Struktur zum Bilden einer spitzen oder spitzigen magnetischen Flasche aufweist:
- eine erste und eine zweite Spule (20, 22), die auf der einen und der anderen Seite einer Mittelebene (III-III) mit gleichem Abstand senkrecht zur longitudinalen Achse (4) der Hülle angeordnet sind und durch die Mitte (6) des Hohlraums gehen, wobei diese beiden Spulen (20, 22) von Strömen entgegengesetzter Richtung durchflossen werden und
- und eine Vorrichtung (36, 42, 50) zur Bündelung magnetischer Kraftlinien (38), die die Hülle in der Mittelebene (III-III) umgibt und lokal auf der Höhe der Hülle die radialen magnetischen Felder dieser Ebene verstärkt.
2. lonenquelle nach Anspruch 1, dadurch gekennzeichnet, daß die Bündelungsvorrichtung eine magnetische Abschirmung aufweist, die die Form eines Ringes (36) besitzt, der die Hülle (2) umgibt und in der Mittelebene (III-III) angeordnet ist.
3. lonenquelle nach Anspruch 1, dadurch gekennzeichnet, daß die Bündelungsvorrichtung eine magnetische Abschirmung (42) aufweist, die die beiden Spulen (20, 22) einschließt und im Querschnitt entlang einer Ebene (Figur 5), die die longitudinale Achse (4) enthält, die Form eines gegen diese longitudinale Achse gewandten E aufweist, wobei das zentrale Bein (44) das E, das in der Mittelebene (III-III) angeordnet ist, eine Breite (L) der doppelten Ausdehnung wie die (I) der beiden anderen Beine (46, 48) des E aufweist.
4. lonenquelle nach Anspruch 2 oder 3, dadurch gekennzeichnet, daß die Abschirmung (36, 42) aus Weicheisen besteht.
5. lonenquelle nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß die Bündelungsvorrichung mehrere identische Permanentmagnete (50) aufweist, die um die Hülle (2) in der Mittelebene (111-111) angeordnet sind, wobei die Pole dieser Magnete, die gegen die longitudinale Achse (4) orientiert sind, aneinanderstoßen und mit gleichem Abstand von der longitudinalen Achse (4) so nah wie möglich an der Hülle mit der gleichen Polarität (S) angeordnet sind.
6. lonenquelle nach Anspruch 5, dadurch gekennzeichnet, daß die Permanentmagnete aus Sm-Co5 bestehen.
EP87401608A 1986-07-10 1987-07-08 Elektronzyklotronresonanz-Ionenquelle Expired - Lifetime EP0252845B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8610066 1986-07-10
FR8610066A FR2601498B1 (fr) 1986-07-10 1986-07-10 Source d'ions a resonance cyclotronique electronique

Publications (2)

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EP0252845A1 EP0252845A1 (de) 1988-01-13
EP0252845B1 true EP0252845B1 (de) 1990-04-25

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EP87401608A Expired - Lifetime EP0252845B1 (de) 1986-07-10 1987-07-08 Elektronzyklotronresonanz-Ionenquelle

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DE (1) DE3762470D1 (de)
FR (1) FR2601498B1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU4705593A (en) * 1992-08-08 1994-03-03 Jurgen Andra Process and device for generating beams of any highly charged ions having low kinetic energy
FR2701797B1 (fr) * 1993-02-18 1995-03-31 Commissariat Energie Atomique Coupleur de transfert d'une puissance micro-onde vers une nappe de plasma et source micro-onde linéaire pour le traitement de surfaces par plasma .
FR2705584B1 (fr) * 1993-05-26 1995-06-30 Commissariat Energie Atomique Dispositif de séparation isotopique par résonance cyclotronique ionique.
DE4419970A1 (de) * 1994-06-08 1995-12-21 Juergen Prof Dr Andrae Vorrichtung zur Erzeugung von Strahlen hochgeladener Ionen
FR2756097B1 (fr) * 1996-11-20 1998-12-11 Commissariat Energie Atomique Source a resonance cyclotronique electronique pour la production d'ions multicharges en milieu hostile
DE19933762C2 (de) * 1999-07-19 2002-10-17 Juergen Andrae Gepulste magnetische Öffnung von Elektronen-Zyklotron-Resonanz-Jonenquellen zur Erzeugung kurzer, stromstarker Pulse hoch geladener Ionen oder von Elektronen

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0130907A1 (de) * 1983-06-30 1985-01-09 Commissariat A L'energie Atomique Verfahren zur Erzeugung mehrfach geladener Ionen
EP0232651A1 (de) * 1985-12-26 1987-08-19 Commissariat A L'energie Atomique Elektronen-Zyklotron-Resonanz-Ionenquelle

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1158958A (fr) * 1956-10-03 1958-06-20 Csf Perfectionnements aux sources d'ions utilisant un champ de haute fréquence
US4529571A (en) * 1982-10-27 1985-07-16 The United States Of America As Represented By The United States Department Of Energy Single-ring magnetic cusp low gas pressure ion source
FR2551302B1 (fr) * 1983-08-30 1986-03-14 Commissariat Energie Atomique Structure ferromagnetique d'une source d'ions creee par des aimants permanents et des solenoides
FR2556498B1 (fr) * 1983-12-07 1986-09-05 Commissariat Energie Atomique Source d'ions multicharges a plusieurs zones de resonance cyclotronique electronique

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0130907A1 (de) * 1983-06-30 1985-01-09 Commissariat A L'energie Atomique Verfahren zur Erzeugung mehrfach geladener Ionen
EP0232651A1 (de) * 1985-12-26 1987-08-19 Commissariat A L'energie Atomique Elektronen-Zyklotron-Resonanz-Ionenquelle

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Publication number Publication date
FR2601498B1 (fr) 1988-10-07
EP0252845A1 (de) 1988-01-13
DE3762470D1 (de) 1990-05-31
FR2601498A1 (fr) 1988-01-15

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