EP0252845A1 - Elektronzyklotronresonanz-Ionenquelle - Google Patents

Elektronzyklotronresonanz-Ionenquelle Download PDF

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Publication number
EP0252845A1
EP0252845A1 EP87401608A EP87401608A EP0252845A1 EP 0252845 A1 EP0252845 A1 EP 0252845A1 EP 87401608 A EP87401608 A EP 87401608A EP 87401608 A EP87401608 A EP 87401608A EP 0252845 A1 EP0252845 A1 EP 0252845A1
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EP
European Patent Office
Prior art keywords
enclosure
iii
magnetic
longitudinal axis
ion source
Prior art date
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Granted
Application number
EP87401608A
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English (en)
French (fr)
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EP0252845B1 (de
Inventor
Bernard Jacquot
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Definitions

  • the present invention relates to an ion source with electronic cyclotron resonance allowing in particular the production of positive multi-charged heavy ions. It finds many applications, depending on the different values of the kinetic energy of the extracted ions, in the field of ion implantation, microgravure, and more particularly in the equipment of particle accelerators, used both in the scientific than medical.
  • the ions are obtained by ionizing, in a closed enclosure of the microwave cavity type having an axis of symmetry, a gaseous medium, consisting of one or more gases or metallic vapors. This ionization results from an interaction between the gaseous medium and a plasma of electrons strongly accelerated by electronic cyclotron resonance.
  • This resonance is obtained thanks to the combined action of a high frequency electromagnetic field, injected at a first end of the enclosure, and a magnetic field with axial symmetry prevailing in this same enclosure.
  • the ions thus created are extracted from the enclosure by a second end.
  • the axial magnetic field is generally created by solenoids or coils, surrounding the enclosure, traversed by currents flowing in the same direction.
  • the quantity of ions that can be produced results from the competition between two processes, on the one hand the formation of ions by electronic impact on neutral atoms constituting the gas to be ionized, and on the other hand the destruction of these same ions by recombination due to a collision of these ions with a neutral atom; this neutral atom can come from the gas not yet ionized or else be produced on the walls of the enclosure by the impact of an ion on said walls.
  • the problem in this type of source is therefore to minimize the destruction of the ions formed by avoiding any collision of these with a neutral atom.
  • the radial local fields are in particular generated by several magnetic bars, arranged symmetrically around the enclosure and going from one end to the other of the enclosure. They each consist of several elementary magnets, joined together. Such a magnetic configuration is described in particular in document FR-A-2 556 498 filed in the name of the applicant.
  • This magnetic configuration presents at these two ends local magnetic disturbances (or edge effects) generating parasitic axial magnetic components which are added or subtracted, depending on the polarity of the magnets, to the main magnetic field with axial symmetry.
  • magnets of ternary compositions in particular magnets based on iron, praseodymium and boron.
  • These rare earth magnets have the advantage of having high magnetic rigidity, which, in addition to their high magnetic performance, allows the superposition of two opposing fields without risk of demagnetization of these magnets.
  • a high magnetic rigidity allows in particular the making of composite multipole structures where the axial and radial fields are composed algebraically.
  • the extraction orifice being in an area with an unoptimized magnetic field where the plasma of electrons and multicharged ions is moderately dense, the extraction of ions along the axis of the enclosure is not optimal.
  • the resonant caps are always harmful on the side of the injection of the high frequency since they take energy in the electromagnetic wave which should normally be used for the ionization of the medium gas contained in the enclosure.
  • a heat shield In order to avoid damage to the internal wall of the enclosure, a heat shield must be provided on said wall.
  • the magnetic field has symmetry of axial revolution and symmetry with respect to the center of the source.
  • the amplitude of the magnetic field increases in all directions of space from the center of the enclosure, until reaching a maximum near the coils, while passing by values defining closed equimagnetic surfaces on which the condition of electronic cyclotron resonance can be satisfied and whose dimensions increase from the center of the enclosure.
  • the magnetic field created by coils supplied in opposition has axial and radial components.
  • the subject of the present invention is precisely an ion source with electronic cyclotron resonance which makes it possible to remedy the various drawbacks above.
  • the invention relates to an ion source with electronic cyclotron resonance comprising: a closed enclosure having a longitudinal axis of symmetry, a first and a second end oriented along this axis, this enclosure containing a gas intended to form, by cyclotronic resonance, a plasma confined in said enclosure, - a device for injecting a high frequency electromagnetic field at the first end of the enclosure, - a magnetic structure, arranged around the enclosure and having an axis of symmetry coincident with that of the enclosure, generating local, axial and radial magnetic fields, defining at least one equimagnetic sheet on which the condition of electronic cyclotronic resonance is satisfied, and - a system for extracting from the enclosure the ions formed, located at the second end of the enclosure, characterized in that the magnetic structure comprises: - a first and a second coil arranged on the side and other and at equal distance from a median plane, perpendicular to the longitudinal axis of the enclosure and passing through the center of the cavity
  • means for concentrating the magnetic force lines in the median plane of the enclosure constituting a unipolar structure makes it possible in particular to bring the elementary coils supplied in opposition closer together, the antagonistic influences of the coils being attenuated by the presence of these means of concentration.
  • these means of concentration allow a homogeneous distribution of the layers or equimagnetic surfaces inside the enclosure.
  • the concentration means comprise a magnetic shield having the form of a ring surrounding the enclosure and arranged in the median plane.
  • the concentration means can be formed by a magnetic shield enclosing the two coils and having in section along a plane containing the longitudinal axis the shape of an E turned towards this longitudinal axis, the central leg of the E, located in the median plane, having a width twice that of the other legs of the E.
  • the central leg of the E plays the same role as the simple ring, provided above.
  • the magnetic shielding whether in the form of a simple ring or in the form of an E, seen in longitudinal section, is made of soft iron.
  • the concentration means consist of several identical permanent magnets, arranged around the enclosure and in the median plane, the poles of these magnets oriented towards the longitudinal axis being placed side by side and located at the same distance from the longitudinal axis and having the same polarity.
  • these permanent magnets are made of an alloy of samarium and cobalt of formula SmCo5.
  • the shielding can be used simultaneously magnetic, in the form of a simple ring or an E, in longitudinal section, and permanent magnets.
  • FIG. 1 a source of cyclotron resonance ions is shown diagrammatically in longitudinal section. electronics according to the invention.
  • This source comprises a containment vacuum enclosure 2 constituting a resonant cavity which can be excited by a microwave electromagnetic field, continuous or pulsed, having a frequency between 1 and 100 GHz.
  • This enclosure has a longitudinal axis 4 of symmetry, passing through the center 6 of the enclosure, which in the case of a cylindrical enclosure represents the axis of revolution; it further comprises two ends 8 and 10 situated in the extension of one another and oriented along the axis 6.
  • the electromagnetic wave produced by a source 12 such as a Klystron, is introduced into the resonant cavity 2, at the end 10 of the enclosure, by means of a waveguide 14 of circular or rectangular section.
  • a pipe 16, equipped with a valve 18 makes it possible to introduce a gas or a vapor of a material, inside the cavity 2, intended to form a plasma in said cavity.
  • This plasma can be a plasma of hydrogen, neon, xenon, oxygen, carbon, nitrogen, tungsten, titanium, molybdenum, zirconium, etc., at a pressure of the order of 10 ⁇ 5mbar for a 10 GHz electromagnetic wave.
  • Means not shown such as a vacuum pump can be mounted on the cavity 2.
  • Two coils 20 and 22 located respectively in the vicinity of the ends 8 and 10 of the enclosure make it possible mainly to create a magnetic field of axial symmetry.
  • these two coils 20 and 22 are traversed, continuously or pulsed, by currents of opposite direction of circulation. They generate a magnetic structure in which the magnetic field has the shape of a cusped magnetic bottle (called in English terminology cusp) whose lines of magnetic forces 24 are shown in FIG. 2.
  • the magnetic field created by these coils 20 and 22 has a symmetry of revolution along the axis 4 of the enclosure and a symmetry with respect to the center 6 of this enclosure. It is moreover zero at center 6, for reasons of symmetry; maximum and axial in the zones 25 of the enclosure situated inside each coil; maximum and radial in the zone 27 located between the two coils and a certain distance from the axis 4, and maximum but two components (axial and radial) in the zones 29 of the enclosure near the turns of the coils.
  • the magnetic field notably defines an axial north pole at each end 8 and 10 of the enclosure.
  • the two coils supplied in opposition generate a magnetic structure in which the amplitude of the magnetic field increases in all directions of space from the center of the cavity until reaching a maximum near the coils, passing through values which can satisfy the condition of electronic cyclotron resonance.
  • the resonance condition is notably satisfied for an amplitude B r of 3600 Gauss and a frequency of the electromagnetic field of 10 GHz.
  • the highly charged ions formed can be extracted from the enclosure 2 by an extraction orifice 30 located on the side of the end 8 of the enclosure. This orifice is located on the longitudinal axis 4 and in the extension of the waveguide 14 used for the injection of the high frequency.
  • the ions from the enclosure can then be selected according to their degree of ionization using any known means using a magnetic field and / or an electric field.
  • a system for concentrating the lines of magnetic forces surrounding the enclosure 2 is provided in the median plane III-III of the enclosure 2, passing through the center 6 of the enclosure and perpendicular to the longitudinal axis 4 of the enclosure.
  • These means may consist of a magnetic shield 36 of soft iron, having the shape of a continuous annular strip.
  • This iron ring 36 is arranged in the median plane III-III of the enclosure and around it, and as close as possible to it.
  • the coils 20 and 22 are arranged on either side of this ring 36 and at equal distance from this ring.
  • the reluctance of the iron constituting the ring 36 then creates, as shown in FIG. 4, a concentration of the lines of magnetic forces 38 in the median plane III-III and in a radial direction thus allowing a homogeneous distribution of the equimagnetic surfaces 40 in the pregnant 2.
  • This soft iron ring 36 constitutes a southern unipolar magnetic structure for example.
  • the ring-shaped shield 36 can be replaced by a soft iron shield 42 as shown in FIG. 5.
  • This shielding 42 has in longitudinal section the shape of an E facing the longitudinal axis 4 of the enclosure 2.
  • the central leg 44 of the E is located in the median plane III-III of the enclosure and plays the same role than the soft iron ring 36.
  • This central leg 44 has a width L which is twice the width l of the other legs 46 and 48 respectively of the E.
  • a variant, shown in FIG. 6, consists in replacing the soft iron shielding 36 or 42 by permanent magnets 50 preferably made of samarium-cobalt (SmCo5) distributed uniformly around the enclosure 2 and arranged in the median plane III-III of the enclosure. These magnets 50 are joined by their ends 52, oriented towards the longitudinal axis 4 of the enclosure; these ends 52 are located at an equal distance from the axis 4, as close as possible to the enclosure.
  • SmCo5 samarium-cobalt
  • the ends 52 of the permanent magnets 50 all have the same polarity, south for example.
  • This unipolar structure allows the strengthening of the radial field at the level of the median plane III-III of the enclosure 2 as shown in FIG. 7.
  • the lines of magnetic forces generated by the magnets 50 bear the reference 54.
  • the ring 36 by the shield 42 in the form of an E, along a longitudinal plane passing through the central axis 4 of the cavity.
  • the plasma of hot or energetic electrons and multicharged ions is confined in the magnetic structure. Leaks of energetic plasma follow the lines of magnetic forces and preferentially escape where the magnetic field is weak (which corresponds to minimum work). Since the magnetic field has a minimum on the longitudinal axis 4 of the enclosure (it is maximum near the copper of the coils) (see Figures 4, 7 and 9) the density of the leakage plasma is therefore maximum on this axis where the ion extraction is located.
  • the source of the invention allows the extraction, along the longitudinal axis of the enclosure, of multi-charged ions with maximum density unlike the structures of the prior art using a multipolar structure to form the radial field. .
  • the enclosure can have a shape other than a cylindrical shape, and for example a rectangular or polygonal shape.
  • the ion source according to the invention is relatively compact. It makes it possible to obtain beams of ions of high density or intensity and in particular beams of ions several times charged with heavy materials up to uranium.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
EP87401608A 1986-07-10 1987-07-08 Elektronzyklotronresonanz-Ionenquelle Expired - Lifetime EP0252845B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8610066A FR2601498B1 (fr) 1986-07-10 1986-07-10 Source d'ions a resonance cyclotronique electronique
FR8610066 1986-07-10

Publications (2)

Publication Number Publication Date
EP0252845A1 true EP0252845A1 (de) 1988-01-13
EP0252845B1 EP0252845B1 (de) 1990-04-25

Family

ID=9337299

Family Applications (1)

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EP87401608A Expired - Lifetime EP0252845B1 (de) 1986-07-10 1987-07-08 Elektronzyklotronresonanz-Ionenquelle

Country Status (3)

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EP (1) EP0252845B1 (de)
DE (1) DE3762470D1 (de)
FR (1) FR2601498B1 (de)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994003919A1 (de) * 1992-08-08 1994-02-17 Andrae Juergen Verfahren zur erzeugung von strahlen beliebiger, hochgeladener ionen niedriger kinetischer energie sowie vorrichtung zur durchführung des verfahrens
FR2701797A1 (fr) * 1993-02-18 1994-08-26 Commissariat Energie Atomique Coupleur de transfert d'une puissance micro-onde vers une nappe de plasma et source micro-onde linéaire pour le traitement de surfaces par plasma .
FR2705584A1 (fr) * 1993-05-26 1994-12-02 Commissariat Energie Atomique Dispositif de séparation isotopique par résonance cyclotronique ionique.
DE4419970A1 (de) * 1994-06-08 1995-12-21 Juergen Prof Dr Andrae Vorrichtung zur Erzeugung von Strahlen hochgeladener Ionen
FR2756097A1 (fr) * 1996-11-20 1998-05-22 Commissariat Energie Atomique Source a resonance cyclotronique electronique pour la production d'ions multicharges en milieu hostile
DE19933762A1 (de) * 1999-07-19 2001-02-01 Andrae Juergen Gepulste magnetische Öffnung von Elektronen-Zyklotron-Resonanz-Jonenquellen zur Erzeugung kurzer, stromstarker Pulse hoch geladener Ionen oder von Elektronen

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2946919A (en) * 1956-10-03 1960-07-26 Csf Ion sources using a high-frequency field
FR2551302A1 (fr) * 1983-08-30 1985-03-01 Commissariat Energie Atomique Structure ferromagnetique d'une source d'ions creee par des aimants permanents et des solenoides
EP0145586A2 (de) * 1983-12-07 1985-06-19 Commissariat A L'energie Atomique Quelle von mehrfachgeladenen Ionen mit mehreren Elektronzyclotronresonanz-Zonen
US4529571A (en) * 1982-10-27 1985-07-16 The United States Of America As Represented By The United States Department Of Energy Single-ring magnetic cusp low gas pressure ion source

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2548436B1 (fr) * 1983-06-30 1986-01-10 Commissariat Energie Atomique Procede de production d'ions lourds multicharges et sources d'ions en regime impulsionnel, permettant la mise en oeuvre du procede
FR2592518B1 (fr) * 1985-12-26 1988-02-12 Commissariat Energie Atomique Sources d'ions a resonance cyclotronique electronique

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2946919A (en) * 1956-10-03 1960-07-26 Csf Ion sources using a high-frequency field
US4529571A (en) * 1982-10-27 1985-07-16 The United States Of America As Represented By The United States Department Of Energy Single-ring magnetic cusp low gas pressure ion source
FR2551302A1 (fr) * 1983-08-30 1985-03-01 Commissariat Energie Atomique Structure ferromagnetique d'une source d'ions creee par des aimants permanents et des solenoides
EP0145586A2 (de) * 1983-12-07 1985-06-19 Commissariat A L'energie Atomique Quelle von mehrfachgeladenen Ionen mit mehreren Elektronzyclotronresonanz-Zonen

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994003919A1 (de) * 1992-08-08 1994-02-17 Andrae Juergen Verfahren zur erzeugung von strahlen beliebiger, hochgeladener ionen niedriger kinetischer energie sowie vorrichtung zur durchführung des verfahrens
FR2701797A1 (fr) * 1993-02-18 1994-08-26 Commissariat Energie Atomique Coupleur de transfert d'une puissance micro-onde vers une nappe de plasma et source micro-onde linéaire pour le traitement de surfaces par plasma .
WO1994019921A1 (fr) * 1993-02-18 1994-09-01 Commissariat A L'energie Atomique Source micro-onde lineaire pour le traitement de surfaces par plasma
US5726412A (en) * 1993-02-18 1998-03-10 Commissariat A L'energie Atomique Linear microwave source for plasma surface treatment
FR2705584A1 (fr) * 1993-05-26 1994-12-02 Commissariat Energie Atomique Dispositif de séparation isotopique par résonance cyclotronique ionique.
US5422481A (en) * 1993-05-26 1995-06-06 Louvet; Pierre Device for isotope separation by ion cyclotron resonance
DE4419970A1 (de) * 1994-06-08 1995-12-21 Juergen Prof Dr Andrae Vorrichtung zur Erzeugung von Strahlen hochgeladener Ionen
FR2756097A1 (fr) * 1996-11-20 1998-05-22 Commissariat Energie Atomique Source a resonance cyclotronique electronique pour la production d'ions multicharges en milieu hostile
WO1998022970A1 (fr) * 1996-11-20 1998-05-28 Commissariat A L'energie Atomique Source a resonance cyclotronique electronique pour la production d'ions multicharges en milieu hostile
DE19933762A1 (de) * 1999-07-19 2001-02-01 Andrae Juergen Gepulste magnetische Öffnung von Elektronen-Zyklotron-Resonanz-Jonenquellen zur Erzeugung kurzer, stromstarker Pulse hoch geladener Ionen oder von Elektronen
DE19933762C2 (de) * 1999-07-19 2002-10-17 Juergen Andrae Gepulste magnetische Öffnung von Elektronen-Zyklotron-Resonanz-Jonenquellen zur Erzeugung kurzer, stromstarker Pulse hoch geladener Ionen oder von Elektronen

Also Published As

Publication number Publication date
FR2601498A1 (fr) 1988-01-15
DE3762470D1 (de) 1990-05-31
EP0252845B1 (de) 1990-04-25
FR2601498B1 (fr) 1988-10-07

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