EP0184475A1 - Verfahren und Vorrichtung zum Starten einer Mikrowellenionenquelle - Google Patents

Verfahren und Vorrichtung zum Starten einer Mikrowellenionenquelle Download PDF

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Publication number
EP0184475A1
EP0184475A1 EP85402076A EP85402076A EP0184475A1 EP 0184475 A1 EP0184475 A1 EP 0184475A1 EP 85402076 A EP85402076 A EP 85402076A EP 85402076 A EP85402076 A EP 85402076A EP 0184475 A1 EP0184475 A1 EP 0184475A1
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EP
European Patent Office
Prior art keywords
cavity
plasma
electronic
creation
ionized
Prior art date
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Granted
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EP85402076A
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English (en)
French (fr)
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EP0184475B1 (de
Inventor
René Gualandris
Paul Ludwig
Jean-Claude Rocco
François Zadworny
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
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Publication of EP0184475A1 publication Critical patent/EP0184475A1/de
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Publication of EP0184475B1 publication Critical patent/EP0184475B1/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation

Definitions

  • the present invention applies to the field of microwave ion sources, which can also be used as an electron source or as a plasma generator.
  • the electrons then describe trajectories in spiral around the lines of force of the field B by absorbing energy of the field B and thus acquiring a maximum kinetic energy to cause the ionization by shocks of the molecules of neutral gas present in the HF cavity from the source.
  • Such ion sources are described in particular by R. Geller, C. Jacquot and P. Sermet in the "Proceedings of the Symposium on ions sources and formation of ion beams", Berckeley (Oct. 1974) and by F. Bourg, R. Geller, B. Jacquot, T. Lamy, M. Pontonnier and JC Rocco in "Nuclear Instruments and Methods" North-Holland Publishing Company, 196 (1982) pp. 325-329. They are based on the establishment of a plasma confinement using a magnetic mirror configuration with maximum values of the magnetic field B greater than the value which ensures the cyclotronic resonance of the electrons.
  • the maximum and minimum values of the magnetic induction are 0.42 and 0.32 Tesla respectively and the cyclotron resonance of the electrons is carried out at 0.36 Tesla, the frequency of the injected high frequency wave being fixed at around 10 GHz.
  • the ions created in the plasma are extracted by an extraction system, made up of electrodes brought to continuous potentials and which are downstream of the maximum of the magnetic field. Under these conditions, the ion current emitted by the source decreases in proportion to the value of the field at the place of extraction and, to obtain an intense ion current, it is necessary to extract the ions in a magnetic field at least of the same order. larger than the field of cyclotron resonance.
  • the magnetic field must therefore be kept constant throughout the sliding space of the ion beam up to the point of its application or of the transformation of the ions in neutral particles.
  • the field to be kept constant corresponds to an induction of approximately 0.36 Tesla, and the electric power consumed by the coils creating this magnetic field is of the order of 1 Megawatt.
  • the extraction system When using low energy ions (less than 1 keV) the extraction system does not allow high densities to be extracted. To increase the latter, the ion beam can be compressed downstream of the ion source.
  • the magnetic field must be increased proportionally.
  • the ion source described in this patent is always a source implementing the phenomenon of electron cyclotron resonance to create the plasma in the cavity, and it therefore always requires in this cavity the presence of a higher magnetic field or at least equal to that which creates the cyclotron resonance of the electrons.
  • the present invention specifically relates to a method of igniting a microwave ion source which operates without resorting to the phenomenon of cyclotron resonance of the electrons and, consequently, without the presence of a constant magnetic field prevailing for this purpose in the HF cavity.
  • This method of igniting a microwave ion source using in a known manner a resonant cavity supplied by a gas or a vapor of a material intended to form a plasma, a system for injecting into the cavity a microwave power and a system for extracting the ions from the plasma from the cavity, is characterized in that the cavity being of the multimode type, electronic germs are created within the medium to be ionized and the plasma is maintained after its ignition using only microwave power.
  • the essential novelty provided by the present invention resides in the fact that it has been possible to produce, contrary to all the ideas received and affirmed by those skilled in the art for more than twenty years, a source of microwave ions operating at using a resonant cavity without appealing to the phenomenon of electronic cyclotron resonance, that is to say without constant magnetic field inside this cavity.
  • the applicant has demonstrated that it is possible, once the plasma has been ignited, to keep it in activity only using the only microwave power injected into the resonant cavity.
  • the ignition of the ion source by creation of electronic germs within the medium to be ionized can take place either uniquely during initial ignition, or repeatedly, that is to say -to say from time to time when the need arises, or even permanently, which is also rarely essential.
  • a single ignition allows the source to operate in pulsed mode, for a recurrence time of the order of 1 00 milliseconds.
  • an axial and / or multipolar magnetic configuration may nevertheless be necessary and used to confine and homogenize the plasma, but in this case, the values of the magnetic fields are much lower than those which were formerly necessary for the creation of the conditions of cyclotron resonance of electrons.
  • the creation of electronic germs within the medium to be ionized is obtained by direct seeding of electrons.
  • the creation of these same electronic seeds is obtained by temporary and local application of a magnetic field of sufficient intensity to create, in a small volume of the cavity, the conditions for establishing an electronic cyclotron resonance. which in turn causes the creation of plasma.
  • the creation of the same electronic germs within the medium to be ionized is obtained by temporary application of an overpressure in the cavity.
  • the present invention also relates to a device for igniting a microwave source implementing the above method in a particularly simple manner and using means per se known and easy to use.
  • this device for igniting a microwave ion source using in known manner a multimode resonant cavity supplied by a gas or a vapor of a material intended to form a plasma , a system for injecting microwave power into the cavity and a system for extracting plasma ions from the cavity is characterized in that it consists of an electromagnet encircling the external wall of the cavity, a few centimeters downstream of the injection system and the magnetic carcass of which is applied to this cavity.
  • the ignition process is implemented which consists in creating in a small volume of the cavity, temporarily and locally, the conditions for establishing an electronic cyclotron resonance. which in turn causes the creation of plasma.
  • each of the three dimensions of the resonant cavity, length, width and height must be greater than the short side or the diameter of the waveguide of the system for injecting the high frequency power of the cavity. This condition has proven to be effectively necessary in order to be able to obtain the ignition and self-maintenance of a plasma in a multimode resonant cavity having this particular form but in fact very frequently used.
  • microwave ion sources implementing the ignition process can be of any known nature and in particular include, like the other sources, the variants or improvements in detail recalled below. below ..
  • such a source may have a magnetic configuration located downstream of the system for extracting ions from the plasma or electrons in order to carry out, under good conditions, the transport of the extracted beam and even to obtain its radial compression.
  • the ion or electron extraction system can be constituted by a single electrode brought to a determined potential.
  • the device for igniting the microwave ion source is located at a distance of the order of a few centimeters downstream of the junction zone. Between the microwave injector and the ion source cavity. This location has actually proven advantageous for obtaining a good ignition under conditions of maximum efficiency.
  • FIG. 1 schematically represents a simplified example of an embodiment of a source of ions, electrons or plasma, at microwave, in cross section comprising the central axis Z of the source .
  • one end carries an injector 8 of microwave power through a window 13 and the other end is connected to the place of use ions, electrons or plasma.
  • the waveguide 15, which is of revolution has a diameter smaller than that of the cavity 9.
  • the cavity 9 can have any shape depending on the nature of the use.
  • the microwave power injection system 8 can be constituted by several microwave injectors in parallel.
  • the relative dimensions of a source such as that of FIGS. 1 and 2, with respect to the HF injector system are not arbitrary when the cavity 9 is parallelepiped.
  • the dimensions of the three sides of the cavity 9 must be greater than the diameter or the short side of the waveguide which injects the HF power at 13, if one wants to be able to ignite and above all keep the plasma 10 in activity without resorting to cyclotron resonance of the electrons in this plasma.
  • a gas or a vapor intended to form a plasma is introduced at 17 at a low pressure of some 10 ' 3 to 10 ' 2 Torr upstream of the system 14 for extracting the ions and in its vicinity.
  • the plasma can be created at another location and then injected into the cavity 9.
  • the ignition system 7 is constituted in this example by a circular electromagnet surrounding the wall 9 and comprising an annular coil 11 and a soft iron carcass 12 applied against the wall 9.
  • This electromagnet is capable of igniting the discharge by a pulse field by locally and temporarily creating in the cavity a magnetic field fulfilling the cyclotronic resonance conditions of the electrons, and the plasma ignites at 10.
  • the system for extracting ions or electrons is represented here in the form of a single electrode 14.
  • the ion current increases. We can then. extract larger ion currents or reduce the dimensions of the cavities, which allows the use of "mini-cavities" with low consumption of microwave power.
  • the beam extracted from the source can be compressed, downstream of the extraction electrodes by the application of an additional magnetic field, this is the case for example of the coil 15 in the example of FIG. 2.
  • an ion source according to the invention is seen, provided with a spark gap 18 of any shape, preferably pointed, isolated with respect to the ion source 9 by an isolator 19 and polarized by means of a food 20 compared to this same ion source 9.
  • This supply 20 can be alternative (simple transformer) or continuous in this case the tip 18 is brought to a negative potential with respect to the source 9.
  • the source 9 comprises, as the creator of the seed for plating the plasma, a filament 21 of refractory metal (W, Mo, Ta) emitting electrons.
  • This filament 21 passes through the wall 9 of the source in an insulator 22; the filament heating supply 23 is continuous or alternative.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)
  • Particle Accelerators (AREA)
EP85402076A 1984-11-06 1985-10-25 Verfahren und Vorrichtung zum Starten einer Mikrowellenionenquelle Expired EP0184475B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8416884 1984-11-06
FR8416884A FR2572847B1 (fr) 1984-11-06 1984-11-06 Procede et dispositif d'allumage d'une source d'ions hyperfrequence

Publications (2)

Publication Number Publication Date
EP0184475A1 true EP0184475A1 (de) 1986-06-11
EP0184475B1 EP0184475B1 (de) 1989-05-24

Family

ID=9309308

Family Applications (1)

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EP85402076A Expired EP0184475B1 (de) 1984-11-06 1985-10-25 Verfahren und Vorrichtung zum Starten einer Mikrowellenionenquelle

Country Status (6)

Country Link
US (1) US4859909A (de)
EP (1) EP0184475B1 (de)
JP (1) JPS61118938A (de)
CA (1) CA1248643A (de)
DE (1) DE3570551D1 (de)
FR (1) FR2572847B1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10373808B2 (en) 2017-02-09 2019-08-06 Lyten, Inc. Seedless particles with carbon allotropes
US10428197B2 (en) 2017-03-16 2019-10-01 Lyten, Inc. Carbon and elastomer integration

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2631199B1 (fr) * 1988-05-09 1991-03-15 Centre Nat Rech Scient Reacteur a plasma
US5107170A (en) * 1988-10-18 1992-04-21 Nissin Electric Co., Ltd. Ion source having auxillary ion chamber
US5753921A (en) * 1996-07-16 1998-05-19 Eastman Kodak Company X-ray imaging detector with limited substrate and converter
US5650626A (en) * 1996-07-16 1997-07-22 Eastman Kodak Company X-ray imaging detector with thickness and composition limited substrate
FR2895169B1 (fr) * 2005-12-15 2008-08-01 Renault Sas Optimisation de la frequence d'excitation d'un resonateur
KR20150011014A (ko) * 2007-11-01 2015-01-29 오를리콘 트레이딩 아크티엔게젤샤프트, 트뤼프바흐 처리된 표면의 제조방법 및 진공 플라즈마 소스
US9812295B1 (en) 2016-11-15 2017-11-07 Lyten, Inc. Microwave chemical processing
US9767992B1 (en) 2017-02-09 2017-09-19 Lyten, Inc. Microwave chemical processing reactor
US10920035B2 (en) 2017-03-16 2021-02-16 Lyten, Inc. Tuning deformation hysteresis in tires using graphene
WO2019126196A1 (en) 2017-12-22 2019-06-27 Lyten, Inc. Structured composite materials
EP3735582A4 (de) 2018-01-04 2021-11-10 Lyten, Inc. Resonanter gassensor
WO2019143559A1 (en) 2018-01-16 2019-07-25 Lyten, Inc. Microwave transparent pressure barrier
ES2696227B2 (es) * 2018-07-10 2019-06-12 Centro De Investig Energeticas Medioambientales Y Tecnologicas Ciemat Fuente de iones interna para ciclotrones de baja erosion

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2174678A1 (de) * 1972-03-06 1973-10-19 Commissariat Energie Atomique

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2147497A5 (de) * 1971-07-29 1973-03-09 Commissariat Energie Atomique
JPS6043620B2 (ja) * 1982-11-25 1985-09-28 日新ハイボルテージ株式会社 マイクロ波イオン源
US4507588A (en) * 1983-02-28 1985-03-26 Board Of Trustees Operating Michigan State University Ion generating apparatus and method for the use thereof
FR2546358B1 (fr) * 1983-05-20 1985-07-05 Commissariat Energie Atomique Source d'ions a resonance cyclotronique des electrons

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2174678A1 (de) * 1972-03-06 1973-10-19 Commissariat Energie Atomique

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
APPLIED PHYSICS LETTERS, vol. 44, no. 4, février 1984, pages 396-398, American Institute of Physics, New York, US; J. ASMUSSEN et al.: "Characteristics of a microwave plasma disk ion source" *
NUCLEAR INSTRUMENTS AND METHODS, vol. 196, no. 2/3, mai 1982, pages 325-329, North-Holland, Amsterdam, NL; F. BOURG et al.: "Source d'ions multicharges minimafios: nouvelles caracteristiques" *
REVUE DE PHYSIQUE APPLIQUEE, vol. 12, no. 10, octobre 1977, pages 1655-1661, Paris, FR; Ph. BOULANGER et al.: "Une source d'ions de basse energie a flux éléve chauffée en hyperfréquences" *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10373808B2 (en) 2017-02-09 2019-08-06 Lyten, Inc. Seedless particles with carbon allotropes
US10428197B2 (en) 2017-03-16 2019-10-01 Lyten, Inc. Carbon and elastomer integration

Also Published As

Publication number Publication date
EP0184475B1 (de) 1989-05-24
US4859909A (en) 1989-08-22
CA1248643A (en) 1989-01-10
DE3570551D1 (en) 1989-06-29
FR2572847A1 (fr) 1986-05-09
JPS61118938A (ja) 1986-06-06
FR2572847B1 (fr) 1986-12-26

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