DE3784560D1 - Elektronen emittierende vorrichtung. - Google Patents

Elektronen emittierende vorrichtung.

Info

Publication number
DE3784560D1
DE3784560D1 DE8787108715T DE3784560T DE3784560D1 DE 3784560 D1 DE3784560 D1 DE 3784560D1 DE 8787108715 T DE8787108715 T DE 8787108715T DE 3784560 T DE3784560 T DE 3784560T DE 3784560 D1 DE3784560 D1 DE 3784560D1
Authority
DE
Germany
Prior art keywords
emitting device
electron emitting
electron
emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787108715T
Other languages
English (en)
Other versions
DE3784560T2 (de
Inventor
Masahiko Okunuki
Takeo Tsukamoto
Akira Shimizu
Akira Suzuki
Masao Sugata
Isamu Shimoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE3784560D1 publication Critical patent/DE3784560D1/de
Application granted granted Critical
Publication of DE3784560T2 publication Critical patent/DE3784560T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/027—Construction of the gun or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/316—Cold cathodes, e.g. field-emissive cathode having an electric field parallel to the surface, e.g. thin film cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Cold Cathode And The Manufacture (AREA)
DE8787108715T 1986-06-19 1987-06-16 Elektronen emittierende vorrichtung. Expired - Lifetime DE3784560T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61141389A JPS63950A (ja) 1986-06-19 1986-06-19 電子放出装置

Publications (2)

Publication Number Publication Date
DE3784560D1 true DE3784560D1 (de) 1993-04-15
DE3784560T2 DE3784560T2 (de) 1993-07-01

Family

ID=15290854

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787108715T Expired - Lifetime DE3784560T2 (de) 1986-06-19 1987-06-16 Elektronen emittierende vorrichtung.

Country Status (4)

Country Link
US (1) US4825082A (de)
EP (1) EP0249968B1 (de)
JP (1) JPS63950A (de)
DE (1) DE3784560T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2981751B2 (ja) * 1989-03-23 1999-11-22 キヤノン株式会社 電子線発生装置及びこれを用いた画像形成装置、並びに電子線発生装置の製造方法
EP0416558B1 (de) * 1989-09-04 1996-07-31 Canon Kabushiki Kaisha Elektronen emittierendes Element und Verfahren zur Herstellung desselben
EP0416625B1 (de) * 1989-09-07 1996-03-13 Canon Kabushiki Kaisha Elektronemittierende Vorrichtung; Herstellungsverfahren Elektronemittierende Vorrichtung, Herstellungsverfahren derselben und Anzeigegerät und Elektronstrahl- Schreibvorrichtung, welche diese Vorrichtung verwendet.
JPH0536369A (ja) * 1990-09-25 1993-02-12 Canon Inc 電子ビーム装置及びその駆動方法
US5126633A (en) * 1991-07-29 1992-06-30 Energy Sciences Inc. Method of and apparatus for generating uniform elongated electron beam with the aid of multiple filaments
US5237180A (en) * 1991-12-31 1993-08-17 Eastman Kodak Company High resolution image source
CA2138363C (en) * 1993-12-22 1999-06-22 Yasuyuki Todokoro Electron beam generating apparatus, image display apparatus, and method of driving the apparatuses
US5451781A (en) * 1994-10-28 1995-09-19 Regents Of The University Of California Mini ion trap mass spectrometer
CN106252179A (zh) * 2016-08-29 2016-12-21 北京大学 一种基于阻变材料的微型电子源及其阵列和实现方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3611077A (en) * 1969-02-26 1971-10-05 Us Navy Thin film room-temperature electron emitter
US3789471A (en) * 1970-02-06 1974-02-05 Stanford Research Inst Field emission cathode structures, devices utilizing such structures, and methods of producing such structures
US3753022A (en) * 1971-04-26 1973-08-14 Us Army Miniature, directed, electron-beam source
FR2443085A1 (fr) * 1978-07-24 1980-06-27 Thomson Csf Dispositif de microlithographie par bombardement electronique
JPS5698827A (en) * 1979-01-04 1981-08-08 Nippon Telegr & Teleph Corp <Ntt> Electron beam exposure device
NL184589C (nl) * 1979-07-13 1989-09-01 Philips Nv Halfgeleiderinrichting voor het opwekken van een elektronenbundel en werkwijze voor het vervaardigen van een dergelijke halfgeleiderinrichting.
GB2180669A (en) * 1985-09-20 1987-04-01 Phillips Electronic And Associ An electron emissive mask for an electron beam image projector, its manufacture, and the manufacture of a solid state device using such a mask

Also Published As

Publication number Publication date
EP0249968B1 (de) 1993-03-10
US4825082A (en) 1989-04-25
EP0249968A2 (de) 1987-12-23
JPS63950A (ja) 1988-01-05
EP0249968A3 (en) 1990-01-17
DE3784560T2 (de) 1993-07-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition