DE68919004T2 - Elektronenmikroskop. - Google Patents
Elektronenmikroskop.Info
- Publication number
- DE68919004T2 DE68919004T2 DE68919004T DE68919004T DE68919004T2 DE 68919004 T2 DE68919004 T2 DE 68919004T2 DE 68919004 T DE68919004 T DE 68919004T DE 68919004 T DE68919004 T DE 68919004T DE 68919004 T2 DE68919004 T2 DE 68919004T2
- Authority
- DE
- Germany
- Prior art keywords
- electron microscope
- microscope
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/16—Vessels; Containers
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63182991A JPH0760661B2 (ja) | 1988-07-22 | 1988-07-22 | 電子顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68919004D1 DE68919004D1 (de) | 1994-12-01 |
DE68919004T2 true DE68919004T2 (de) | 1995-03-16 |
Family
ID=16127843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68919004T Expired - Fee Related DE68919004T2 (de) | 1988-07-22 | 1989-07-19 | Elektronenmikroskop. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5029249A (de) |
EP (1) | EP0352085B1 (de) |
JP (1) | JPH0760661B2 (de) |
DE (1) | DE68919004T2 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0756443B2 (ja) * | 1990-12-20 | 1995-06-14 | 株式会社島津製作所 | 生体試料観察用走査型トンネル顕微鏡 |
US5748866A (en) * | 1994-06-30 | 1998-05-05 | International Business Machines Corporation | Virtual display adapters using a digital signal processing to reformat different virtual displays into a common format and display |
SG74599A1 (en) * | 1997-09-27 | 2000-08-22 | Inst Of Material Res & Enginee | Portable high resolution scanning electron microscope column using permanent magnet electron lenses |
US6297512B1 (en) * | 1998-03-31 | 2001-10-02 | Cirrus Logic, Inc. | Double shield for electron and ion beam columns |
JP3117950B2 (ja) * | 1998-05-21 | 2000-12-18 | セイコーインスツルメンツ株式会社 | 荷電粒子装置 |
US6515282B1 (en) * | 2000-03-28 | 2003-02-04 | Applied Materials, Inc. | Testing of interconnection circuitry using two modulated charged particle beams |
US20020148971A1 (en) * | 2001-03-05 | 2002-10-17 | Michael Sogard | Lens assembly for electron beam column |
JP4621097B2 (ja) * | 2005-09-14 | 2011-01-26 | 株式会社日立ハイテクノロジーズ | 電子線装置およびその制御方法 |
EP2019414B1 (de) | 2007-07-27 | 2010-06-30 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Magnetische Linsenanordnung |
CN102163529B (zh) * | 2011-03-15 | 2012-07-25 | 北京航空航天大学 | 电子显微镜的聚光镜用可动光阑装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2637000A (en) * | 1951-02-15 | 1953-04-28 | Magnetic electron -lens | |
US3346736A (en) * | 1964-09-22 | 1967-10-10 | Applied Res Lab Inc | Electron probe apparatus having an objective lens with an aperture for restricting fluid flow |
US3535515A (en) * | 1967-06-14 | 1970-10-20 | Us Navy | Ultrasonic apparatus for electron microscope |
DE1804199C3 (de) * | 1968-03-26 | 1975-12-18 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Korpuskularstrahlgerät zur wahlweisen Abbildung eines Präparates oder seines Beugungsdiagrammes |
GB1213374A (en) * | 1968-10-15 | 1970-11-25 | Ass Elect Ind | Improvements in or relating to electron optical systems |
DE2307822C3 (de) * | 1973-02-16 | 1982-03-18 | Siemens AG, 1000 Berlin und 8000 München | Supraleitendes Linsensystem für Korpuskularstrahlung |
JPS51110964A (ja) * | 1975-03-26 | 1976-09-30 | Hitachi Ltd | Sosagatadenshikenbikyo |
JPS5398772A (en) * | 1977-02-09 | 1978-08-29 | Hitachi Ltd | Corpuscular ray unit having atomosphere containing argon |
DE3423149A1 (de) * | 1984-06-22 | 1986-01-02 | Fa. Carl Zeiss, 7920 Heidenheim | Verfahren und anordnung zur elektronenenergiegefilterten abbildung eines objektes oder eines objektbeugungsdiagrammes mit einem transmissions-elektronenmikroskop |
NL8402340A (nl) * | 1984-07-25 | 1986-02-17 | Philips Nv | Microscoop voor niet-gedifferentieerde fase-beeldvorming. |
JPS61138441A (ja) * | 1984-11-29 | 1986-06-25 | Fuji Photo Film Co Ltd | 電子顕微鏡像記録再生方法 |
JPH0616386B2 (ja) * | 1986-01-10 | 1994-03-02 | 株式会社日立製作所 | 粒子線装置の絞りの清浄化法および装置 |
JPS62260335A (ja) * | 1986-05-06 | 1987-11-12 | Hitachi Ltd | パタ−ン検査方法および装置 |
GB2192092A (en) * | 1986-06-25 | 1987-12-31 | Philips Electronic Associated | Magnetic lens system |
JPS6322062U (de) * | 1986-07-26 | 1988-02-13 | ||
US4823006A (en) * | 1987-05-21 | 1989-04-18 | Electroscan Corporation | Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope |
-
1988
- 1988-07-22 JP JP63182991A patent/JPH0760661B2/ja not_active Expired - Lifetime
-
1989
- 1989-07-18 US US07/381,191 patent/US5029249A/en not_active Expired - Fee Related
- 1989-07-19 DE DE68919004T patent/DE68919004T2/de not_active Expired - Fee Related
- 1989-07-19 EP EP89307301A patent/EP0352085B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0352085A2 (de) | 1990-01-24 |
US5029249A (en) | 1991-07-02 |
EP0352085B1 (de) | 1994-10-26 |
JPH0760661B2 (ja) | 1995-06-28 |
JPH0233844A (ja) | 1990-02-05 |
DE68919004D1 (de) | 1994-12-01 |
EP0352085A3 (en) | 1990-11-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |