JPS6322062U - - Google Patents
Info
- Publication number
- JPS6322062U JPS6322062U JP11404686U JP11404686U JPS6322062U JP S6322062 U JPS6322062 U JP S6322062U JP 11404686 U JP11404686 U JP 11404686U JP 11404686 U JP11404686 U JP 11404686U JP S6322062 U JPS6322062 U JP S6322062U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- gun
- electron
- ring
- shaped space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 10
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11404686U JPS6322062U (de) | 1986-07-26 | 1986-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11404686U JPS6322062U (de) | 1986-07-26 | 1986-07-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6322062U true JPS6322062U (de) | 1988-02-13 |
Family
ID=30996419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11404686U Pending JPS6322062U (de) | 1986-07-26 | 1986-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6322062U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0233844A (ja) * | 1988-07-22 | 1990-02-05 | Hitachi Ltd | 電子顕微鏡 |
-
1986
- 1986-07-26 JP JP11404686U patent/JPS6322062U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0233844A (ja) * | 1988-07-22 | 1990-02-05 | Hitachi Ltd | 電子顕微鏡 |