JPS6361123U - - Google Patents
Info
- Publication number
- JPS6361123U JPS6361123U JP15577786U JP15577786U JPS6361123U JP S6361123 U JPS6361123 U JP S6361123U JP 15577786 U JP15577786 U JP 15577786U JP 15577786 U JP15577786 U JP 15577786U JP S6361123 U JPS6361123 U JP S6361123U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- ion beam
- ion
- ion source
- neutralizing filament
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 230000003472 neutralizing effect Effects 0.000 claims 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15577786U JPS6361123U (de) | 1986-10-13 | 1986-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15577786U JPS6361123U (de) | 1986-10-13 | 1986-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6361123U true JPS6361123U (de) | 1988-04-22 |
Family
ID=31076785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15577786U Pending JPS6361123U (de) | 1986-10-13 | 1986-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6361123U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03291375A (ja) * | 1990-04-05 | 1991-12-20 | Matsushita Electric Ind Co Ltd | イオン源装置、および連続蒸着媒体の製造方法 |
-
1986
- 1986-10-13 JP JP15577786U patent/JPS6361123U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03291375A (ja) * | 1990-04-05 | 1991-12-20 | Matsushita Electric Ind Co Ltd | イオン源装置、および連続蒸着媒体の製造方法 |
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