JPS63150455U - - Google Patents
Info
- Publication number
- JPS63150455U JPS63150455U JP4251187U JP4251187U JPS63150455U JP S63150455 U JPS63150455 U JP S63150455U JP 4251187 U JP4251187 U JP 4251187U JP 4251187 U JP4251187 U JP 4251187U JP S63150455 U JPS63150455 U JP S63150455U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- insulator
- ion source
- plasma generation
- generation container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4251187U JPS63150455U (de) | 1987-03-23 | 1987-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4251187U JPS63150455U (de) | 1987-03-23 | 1987-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63150455U true JPS63150455U (de) | 1988-10-04 |
Family
ID=30858493
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4251187U Pending JPS63150455U (de) | 1987-03-23 | 1987-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63150455U (de) |
-
1987
- 1987-03-23 JP JP4251187U patent/JPS63150455U/ja active Pending