JPS63146962U - - Google Patents
Info
- Publication number
- JPS63146962U JPS63146962U JP3968687U JP3968687U JPS63146962U JP S63146962 U JPS63146962 U JP S63146962U JP 3968687 U JP3968687 U JP 3968687U JP 3968687 U JP3968687 U JP 3968687U JP S63146962 U JPS63146962 U JP S63146962U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- emission source
- electron emission
- electron
- ion beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 5
- 238000006386 neutralization reaction Methods 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 2
- 239000000284 extract Substances 0.000 claims 1
- 238000000605 extraction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3968687U JPS63146962U (de) | 1987-03-17 | 1987-03-17 | |
| US07/165,957 US4886971A (en) | 1987-03-13 | 1988-03-09 | Ion beam irradiating apparatus including ion neutralizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3968687U JPS63146962U (de) | 1987-03-17 | 1987-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63146962U true JPS63146962U (de) | 1988-09-28 |
Family
ID=30853088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3968687U Pending JPS63146962U (de) | 1987-03-13 | 1987-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63146962U (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06252079A (ja) * | 1993-02-23 | 1994-09-09 | G T C:Kk | イオン注入方法及びその装置 |
| JP2006500741A (ja) * | 2002-09-23 | 2006-01-05 | エピオン コーポレーション | ガスクラスタイオンビーム処理システム及び方法 |
| JP2013095512A (ja) * | 2011-11-02 | 2013-05-20 | Krones Ag | 媒体で制御される電子ビームによりプラスチック製容器を殺菌する装置 |
-
1987
- 1987-03-17 JP JP3968687U patent/JPS63146962U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06252079A (ja) * | 1993-02-23 | 1994-09-09 | G T C:Kk | イオン注入方法及びその装置 |
| JP2006500741A (ja) * | 2002-09-23 | 2006-01-05 | エピオン コーポレーション | ガスクラスタイオンビーム処理システム及び方法 |
| JP2013095512A (ja) * | 2011-11-02 | 2013-05-20 | Krones Ag | 媒体で制御される電子ビームによりプラスチック製容器を殺菌する装置 |