JPS6435654U - - Google Patents
Info
- Publication number
- JPS6435654U JPS6435654U JP13178987U JP13178987U JPS6435654U JP S6435654 U JPS6435654 U JP S6435654U JP 13178987 U JP13178987 U JP 13178987U JP 13178987 U JP13178987 U JP 13178987U JP S6435654 U JPS6435654 U JP S6435654U
- Authority
- JP
- Japan
- Prior art keywords
- irradiation
- window
- chamber
- vacuum chamber
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011888 foil Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 1
Landscapes
- Particle Accelerators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13178987U JPH0538526Y2 (de) | 1987-08-28 | 1987-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13178987U JPH0538526Y2 (de) | 1987-08-28 | 1987-08-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6435654U true JPS6435654U (de) | 1989-03-03 |
| JPH0538526Y2 JPH0538526Y2 (de) | 1993-09-29 |
Family
ID=31388176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13178987U Expired - Lifetime JPH0538526Y2 (de) | 1987-08-28 | 1987-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0538526Y2 (de) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011051064A (ja) * | 2009-09-02 | 2011-03-17 | Mori Seiki Co Ltd | 工作機械 |
| WO2013042425A1 (ja) * | 2011-09-21 | 2013-03-28 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法 |
| WO2014054477A1 (ja) * | 2012-10-01 | 2014-04-10 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、隔膜の位置調整方法および隔膜位置調整ジグ |
| JP2015111595A (ja) * | 2015-02-17 | 2015-06-18 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。 |
-
1987
- 1987-08-28 JP JP13178987U patent/JPH0538526Y2/ja not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011051064A (ja) * | 2009-09-02 | 2011-03-17 | Mori Seiki Co Ltd | 工作機械 |
| WO2013042425A1 (ja) * | 2011-09-21 | 2013-03-28 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法 |
| JP2013069443A (ja) * | 2011-09-21 | 2013-04-18 | Hitachi High-Technologies Corp | 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。 |
| US9165741B2 (en) | 2011-09-21 | 2015-10-20 | Hitachi High-Technologies Corporation | Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample |
| US9673020B2 (en) | 2011-09-21 | 2017-06-06 | Hitachi High-Technologies Corporation | Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample |
| WO2014054477A1 (ja) * | 2012-10-01 | 2014-04-10 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、隔膜の位置調整方法および隔膜位置調整ジグ |
| JP2014072111A (ja) * | 2012-10-01 | 2014-04-21 | Hitachi High-Technologies Corp | 荷電粒子線装置、隔膜の位置調整方法および隔膜位置調整ジグ |
| US9251996B2 (en) | 2012-10-01 | 2016-02-02 | Hitachi High-Technologies Corporation | Charged particle beam device, position adjusting method for diaphragm, and diaphragm position adjusting jig |
| JP2015111595A (ja) * | 2015-02-17 | 2015-06-18 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0538526Y2 (de) | 1993-09-29 |