JPS6413659U - - Google Patents
Info
- Publication number
- JPS6413659U JPS6413659U JP10870087U JP10870087U JPS6413659U JP S6413659 U JPS6413659 U JP S6413659U JP 10870087 U JP10870087 U JP 10870087U JP 10870087 U JP10870087 U JP 10870087U JP S6413659 U JPS6413659 U JP S6413659U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- vacuum chamber
- irradiation
- hole
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011888 foil Substances 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 1
- 229910001873 dinitrogen Inorganic materials 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987108700U JPH0629884Y2 (ja) | 1987-07-14 | 1987-07-14 | 電子線照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987108700U JPH0629884Y2 (ja) | 1987-07-14 | 1987-07-14 | 電子線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6413659U true JPS6413659U (de) | 1989-01-24 |
| JPH0629884Y2 JPH0629884Y2 (ja) | 1994-08-10 |
Family
ID=31344280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987108700U Expired - Lifetime JPH0629884Y2 (ja) | 1987-07-14 | 1987-07-14 | 電子線照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0629884Y2 (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4856499U (de) * | 1971-11-04 | 1973-07-19 |
-
1987
- 1987-07-14 JP JP1987108700U patent/JPH0629884Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4856499U (de) * | 1971-11-04 | 1973-07-19 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0629884Y2 (ja) | 1994-08-10 |