JPS62141073U - - Google Patents
Info
- Publication number
- JPS62141073U JPS62141073U JP2767986U JP2767986U JPS62141073U JP S62141073 U JPS62141073 U JP S62141073U JP 2767986 U JP2767986 U JP 2767986U JP 2767986 U JP2767986 U JP 2767986U JP S62141073 U JPS62141073 U JP S62141073U
- Authority
- JP
- Japan
- Prior art keywords
- main body
- particle beam
- nozzle
- raw material
- exit port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 9
- 239000002994 raw material Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2767986U JPS62141073U (de) | 1986-02-26 | 1986-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2767986U JPS62141073U (de) | 1986-02-26 | 1986-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62141073U true JPS62141073U (de) | 1987-09-05 |
Family
ID=30829935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2767986U Pending JPS62141073U (de) | 1986-02-26 | 1986-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62141073U (de) |
-
1986
- 1986-02-26 JP JP2767986U patent/JPS62141073U/ja active Pending