JPS6412366U - - Google Patents
Info
- Publication number
- JPS6412366U JPS6412366U JP10690187U JP10690187U JPS6412366U JP S6412366 U JPS6412366 U JP S6412366U JP 10690187 U JP10690187 U JP 10690187U JP 10690187 U JP10690187 U JP 10690187U JP S6412366 U JPS6412366 U JP S6412366U
- Authority
- JP
- Japan
- Prior art keywords
- oven
- ion source
- plasma generation
- wall
- sheath heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10690187U JPS6412366U (de) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10690187U JPS6412366U (de) | 1987-07-10 | 1987-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6412366U true JPS6412366U (de) | 1989-01-23 |
Family
ID=31340825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10690187U Pending JPS6412366U (de) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6412366U (de) |
-
1987
- 1987-07-10 JP JP10690187U patent/JPS6412366U/ja active Pending